GB2413647B - Open hole-based diffractive light modulator - Google Patents

Open hole-based diffractive light modulator

Info

Publication number
GB2413647B
GB2413647B GB0508353A GB0508353A GB2413647B GB 2413647 B GB2413647 B GB 2413647B GB 0508353 A GB0508353 A GB 0508353A GB 0508353 A GB0508353 A GB 0508353A GB 2413647 B GB2413647 B GB 2413647B
Authority
GB
United Kingdom
Prior art keywords
light modulator
open hole
diffractive light
based diffractive
open
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB0508353A
Other languages
English (en)
Other versions
GB2413647A (en
GB0508353D0 (en
Inventor
Sang Kyeong Yun
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Samsung Electro Mechanics Co Ltd
Original Assignee
Samsung Electro Mechanics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from KR1020050000907A external-priority patent/KR20050118105A/ko
Application filed by Samsung Electro Mechanics Co Ltd filed Critical Samsung Electro Mechanics Co Ltd
Priority to GB0625065A priority Critical patent/GB2433327B/en
Publication of GB0508353D0 publication Critical patent/GB0508353D0/en
Publication of GB2413647A publication Critical patent/GB2413647A/en
Application granted granted Critical
Publication of GB2413647B publication Critical patent/GB2413647B/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0808—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more diffracting elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00134—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems comprising flexible or deformable structures
    • B81C1/00142—Bridges
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/085—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/85—Piezoelectric or electrostrictive active materials
    • H10N30/853—Ceramic compositions
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H2225/00—Active addressable light modulator
    • G03H2225/20—Nature, e.g. e-beam addressed
    • G03H2225/24—Having movable pixels, e.g. microelectromechanical systems [MEMS]

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Electromagnetism (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)
GB0508353A 2004-04-29 2005-04-26 Open hole-based diffractive light modulator Expired - Fee Related GB2413647B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB0625065A GB2433327B (en) 2004-04-29 2005-04-26 Open hole-based diffractive light modulator

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR20040030159 2004-04-29
KR1020050000907A KR20050118105A (ko) 2004-04-29 2005-01-05 오픈홀 기반의 회절 광변조기

Publications (3)

Publication Number Publication Date
GB0508353D0 GB0508353D0 (en) 2005-06-01
GB2413647A GB2413647A (en) 2005-11-02
GB2413647B true GB2413647B (en) 2007-05-16

Family

ID=34656347

Family Applications (2)

Application Number Title Priority Date Filing Date
GB0625065A Expired - Fee Related GB2433327B (en) 2004-04-29 2005-04-26 Open hole-based diffractive light modulator
GB0508353A Expired - Fee Related GB2413647B (en) 2004-04-29 2005-04-26 Open hole-based diffractive light modulator

Family Applications Before (1)

Application Number Title Priority Date Filing Date
GB0625065A Expired - Fee Related GB2433327B (en) 2004-04-29 2005-04-26 Open hole-based diffractive light modulator

Country Status (4)

Country Link
KR (1) KR100832646B1 (ko)
DE (1) DE102005018604A1 (ko)
FR (1) FR2869696B1 (ko)
GB (2) GB2433327B (ko)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100485443C (zh) * 2005-04-26 2009-05-06 三星电机株式会社 基于开孔的衍射光调制器
KR100883989B1 (ko) * 2007-10-19 2009-02-17 삼성전기주식회사 광변조기 소자

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5311360A (en) * 1992-04-28 1994-05-10 The Board Of Trustees Of The Leland Stanford, Junior University Method and apparatus for modulating a light beam
US5949570A (en) * 1995-06-20 1999-09-07 Matsushita Electric Industrial Co., Ltd. Diffractive optical modulator and method for producing the same, infrared sensor including such a diffractive optical modulator and method for producing the same, and display device including such a diffractive optical modulator
US6141139A (en) * 1998-11-30 2000-10-31 Eastman Kodak Company Method of making a bistable micromagnetic light modulator
WO2005031394A2 (en) * 2003-09-26 2005-04-07 Silicon Light Machines Corporation High-density spatial light modulator

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100327367B1 (ko) * 1999-05-26 2002-03-06 구자홍 마이크로-미러 소자 및 그를 이용한 광 픽업 장치
US6466354B1 (en) * 2000-09-19 2002-10-15 Silicon Light Machines Method and apparatus for interferometric modulation of light
JP4582380B2 (ja) 2001-05-11 2010-11-17 ソニー株式会社 光変調素子とそれを用いた光学装置、および光変調素子の製造方法
US6639722B2 (en) 2001-08-15 2003-10-28 Silicon Light Machines Stress tuned blazed grating light valve
US6829092B2 (en) 2001-08-15 2004-12-07 Silicon Light Machines, Inc. Blazed grating light valve
US6791735B2 (en) * 2002-01-09 2004-09-14 The Regents Of The University Of California Differentially-driven MEMS spatial light modulator
US7057819B1 (en) 2002-12-17 2006-06-06 Silicon Light Machines Corporation High contrast tilting ribbon blazed grating
US20050057810A1 (en) * 2003-09-15 2005-03-17 Goodwill Patrick W. Diffraction grating
US7245285B2 (en) * 2004-04-28 2007-07-17 Hewlett-Packard Development Company, L.P. Pixel device

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5311360A (en) * 1992-04-28 1994-05-10 The Board Of Trustees Of The Leland Stanford, Junior University Method and apparatus for modulating a light beam
US5949570A (en) * 1995-06-20 1999-09-07 Matsushita Electric Industrial Co., Ltd. Diffractive optical modulator and method for producing the same, infrared sensor including such a diffractive optical modulator and method for producing the same, and display device including such a diffractive optical modulator
US6141139A (en) * 1998-11-30 2000-10-31 Eastman Kodak Company Method of making a bistable micromagnetic light modulator
WO2005031394A2 (en) * 2003-09-26 2005-04-07 Silicon Light Machines Corporation High-density spatial light modulator

Also Published As

Publication number Publication date
FR2869696B1 (fr) 2009-10-16
FR2869696A1 (fr) 2005-11-04
DE102005018604A1 (de) 2005-11-24
KR100832646B1 (ko) 2008-05-27
GB0625065D0 (en) 2007-01-24
GB2433327B (en) 2008-03-12
GB2433327A (en) 2007-06-20
KR20060047478A (ko) 2006-05-18
GB2413647A (en) 2005-11-02
GB0508353D0 (en) 2005-06-01

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20150426