GB2412233B - Electrostatic micro-actuator - Google Patents

Electrostatic micro-actuator

Info

Publication number
GB2412233B
GB2412233B GB0405757A GB0405757A GB2412233B GB 2412233 B GB2412233 B GB 2412233B GB 0405757 A GB0405757 A GB 0405757A GB 0405757 A GB0405757 A GB 0405757A GB 2412233 B GB2412233 B GB 2412233B
Authority
GB
United Kingdom
Prior art keywords
actuator
electrostatic micro
electrostatic
micro
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB0405757A
Other versions
GB0405757D0 (en
GB2412233A (en
Inventor
Salah A Al-Chalabi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to GB0405757A priority Critical patent/GB2412233B/en
Publication of GB0405757D0 publication Critical patent/GB0405757D0/en
Publication of GB2412233A publication Critical patent/GB2412233A/en
Application granted granted Critical
Publication of GB2412233B publication Critical patent/GB2412233B/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0064—Constitution or structural means for improving or controlling the physical properties of a device
    • B81B3/0086—Electrical characteristics, e.g. reducing driving voltage, improving resistance to peak voltage
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B5/00—Devices comprising elements which are movable in relation to each other, e.g. comprising slidable or rotatable elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00134—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems comprising flexible or deformable structures
    • B81C1/0015—Cantilevers
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
    • G02B6/357—Electrostatic force
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/002—Electrostatic motors
    • H02N1/006—Electrostatic motors of the gap-closing type
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/002—Electrostatic motors
    • H02N1/006—Electrostatic motors of the gap-closing type
    • H02N1/008—Laterally driven motors, e.g. of the comb-drive type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/03—Microengines and actuators
    • B81B2201/033—Comb drives
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/01—Suspended structures, i.e. structures allowing a movement
    • B81B2203/0136—Comb structures

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Micromachines (AREA)
GB0405757A 2004-03-15 2004-03-15 Electrostatic micro-actuator Expired - Fee Related GB2412233B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB0405757A GB2412233B (en) 2004-03-15 2004-03-15 Electrostatic micro-actuator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB0405757A GB2412233B (en) 2004-03-15 2004-03-15 Electrostatic micro-actuator

Publications (3)

Publication Number Publication Date
GB0405757D0 GB0405757D0 (en) 2004-04-21
GB2412233A GB2412233A (en) 2005-09-21
GB2412233B true GB2412233B (en) 2008-09-17

Family

ID=32117688

Family Applications (1)

Application Number Title Priority Date Filing Date
GB0405757A Expired - Fee Related GB2412233B (en) 2004-03-15 2004-03-15 Electrostatic micro-actuator

Country Status (1)

Country Link
GB (1) GB2412233B (en)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5025346A (en) * 1989-02-17 1991-06-18 Regents Of The University Of California Laterally driven resonant microstructures
JPH07308080A (en) * 1994-05-10 1995-11-21 Yokogawa Electric Corp Micro actuator
US6178069B1 (en) * 1997-05-23 2001-01-23 Nec Corporation Microactuator and method of manufacturing the same
US20030155221A1 (en) * 2002-01-23 2003-08-21 Murata Manufacturing Co., Ltd. Electrostatic actuator
EP1375416A1 (en) * 2002-06-20 2004-01-02 STMicroelectronics S.r.l. Micro-electro-mechanical device, in particular micro-actuator for hard-disk drive, and manufacturing process thereof

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5025346A (en) * 1989-02-17 1991-06-18 Regents Of The University Of California Laterally driven resonant microstructures
JPH07308080A (en) * 1994-05-10 1995-11-21 Yokogawa Electric Corp Micro actuator
US6178069B1 (en) * 1997-05-23 2001-01-23 Nec Corporation Microactuator and method of manufacturing the same
US20030155221A1 (en) * 2002-01-23 2003-08-21 Murata Manufacturing Co., Ltd. Electrostatic actuator
EP1375416A1 (en) * 2002-06-20 2004-01-02 STMicroelectronics S.r.l. Micro-electro-mechanical device, in particular micro-actuator for hard-disk drive, and manufacturing process thereof

Also Published As

Publication number Publication date
GB0405757D0 (en) 2004-04-21
GB2412233A (en) 2005-09-21

Similar Documents

Publication Publication Date Title
GB2425891B (en) Microelectromechanical devices
EP1892044A4 (en) Electrostatic precipitator
EP1948363A4 (en) Single stage electrostatic precipitator
GB2426926B (en) Pocketted spring units
TWI366553B (en) Assembly
PL1755789T3 (en) Electrostatic spray assembly
GB0419634D0 (en) Novel herbicides
GB0508063D0 (en) Binoculars
GB2411489B (en) Binoculars
GB2410808B (en) Binoculars
GB2423593B (en) Inertial actuator
GB2412233B (en) Electrostatic micro-actuator
GB2411737B (en) Binoculars
GB0502715D0 (en) Binoculars
GB0418887D0 (en) Assembly
GB0405695D0 (en) Actuator assembly
GB0402624D0 (en) Assembly
GB0408504D0 (en) Governors
GB0412810D0 (en) Actuator assembly
GB0409323D0 (en) Micromechanical devices
GB0418321D0 (en) Electro-mechanical R N G
AU302061S (en) Actuator
GB0404963D0 (en) Actuator
IL165465A0 (en) Flexure arrangements
GB0502713D0 (en) Binoculars

Legal Events

Date Code Title Description
WAP Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1)
720A Reinstatement of application (patents act 1977, section 20(2)a)

Free format text: REQUEST FOR REINSTATEMENT ALLOWED

PCNP Patent ceased through non-payment of renewal fee

Effective date: 20170315