GB2394600B - One-cylinder stack capacitor - Google Patents
One-cylinder stack capacitorInfo
- Publication number
- GB2394600B GB2394600B GB0400348A GB0400348A GB2394600B GB 2394600 B GB2394600 B GB 2394600B GB 0400348 A GB0400348 A GB 0400348A GB 0400348 A GB0400348 A GB 0400348A GB 2394600 B GB2394600 B GB 2394600B
- Authority
- GB
- United Kingdom
- Prior art keywords
- stack capacitor
- cylinder stack
- cylinder
- capacitor
- stack
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
- H01L28/40—Capacitors
- H01L28/60—Electrodes
- H01L28/82—Electrodes with an enlarged surface, e.g. formed by texturisation
- H01L28/90—Electrodes with an enlarged surface, e.g. formed by texturisation having vertical extensions
- H01L28/91—Electrodes with an enlarged surface, e.g. formed by texturisation having vertical extensions made by depositing layers, e.g. by depositing alternating conductive and insulating layers
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Semiconductor Memories (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR10-2001-0078286A KR100434496B1 (en) | 2001-12-11 | 2001-12-11 | One cylinder stack capacitor and fabrication method thereof using double mold |
US10/136,385 US6700153B2 (en) | 2001-12-11 | 2002-05-02 | One-cylinder stack capacitor and method for fabricating the same |
GB0227700A GB2386471B (en) | 2001-12-11 | 2002-11-27 | A method for fabricating a one-cylinder stack capacitor |
Publications (3)
Publication Number | Publication Date |
---|---|
GB0400348D0 GB0400348D0 (en) | 2004-02-11 |
GB2394600A GB2394600A (en) | 2004-04-28 |
GB2394600B true GB2394600B (en) | 2004-08-18 |
Family
ID=32045680
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB0400348A Expired - Lifetime GB2394600B (en) | 2001-12-11 | 2002-11-27 | One-cylinder stack capacitor |
Country Status (1)
Country | Link |
---|---|
GB (1) | GB2394600B (en) |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5100825A (en) * | 1990-11-16 | 1992-03-31 | Micron Technology, Inc. | Method of making stacked surrounding reintrant wall capacitor |
JPH11214645A (en) * | 1998-01-27 | 1999-08-06 | Sony Corp | Semiconductor memory and manufacture thereof |
US6222722B1 (en) * | 1998-04-02 | 2001-04-24 | Kabushiki Kaisha Toshiba | Storage capacitor having undulated lower electrode for a semiconductor device |
-
2002
- 2002-11-27 GB GB0400348A patent/GB2394600B/en not_active Expired - Lifetime
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5100825A (en) * | 1990-11-16 | 1992-03-31 | Micron Technology, Inc. | Method of making stacked surrounding reintrant wall capacitor |
JPH11214645A (en) * | 1998-01-27 | 1999-08-06 | Sony Corp | Semiconductor memory and manufacture thereof |
US6222722B1 (en) * | 1998-04-02 | 2001-04-24 | Kabushiki Kaisha Toshiba | Storage capacitor having undulated lower electrode for a semiconductor device |
Also Published As
Publication number | Publication date |
---|---|
GB2394600A (en) | 2004-04-28 |
GB0400348D0 (en) | 2004-02-11 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PE20 | Patent expired after termination of 20 years |
Expiry date: 20221126 |