GB2379025A - Rotary position sensor - Google Patents

Rotary position sensor Download PDF

Info

Publication number
GB2379025A
GB2379025A GB0227418A GB0227418A GB2379025A GB 2379025 A GB2379025 A GB 2379025A GB 0227418 A GB0227418 A GB 0227418A GB 0227418 A GB0227418 A GB 0227418A GB 2379025 A GB2379025 A GB 2379025A
Authority
GB
United Kingdom
Prior art keywords
sensor
concentrators
magnetic field
relative
array
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
GB0227418A
Other versions
GB0227418D0 (en
Inventor
David Lee Striker
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ford Motor Co
Original Assignee
Ford Motor Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US09/203,248 external-priority patent/US6326780B1/en
Application filed by Ford Motor Co filed Critical Ford Motor Co
Publication of GB0227418D0 publication Critical patent/GB0227418D0/en
Publication of GB2379025A publication Critical patent/GB2379025A/en
Withdrawn legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/142Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices
    • G01D5/145Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices influenced by the relative movement between the Hall device and magnetic fields
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/30Measuring arrangements characterised by the use of electric or magnetic techniques for measuring angles or tapers; for testing the alignment of axes

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)

Abstract

A magnetic rotary position sensor including a base (20) upon which a plurality of radially extending magnetic sensing elements (22) are mounted. Interleaved with the sensing elements (22) are a plurality of uniformly spaced magnetic concentrators (30). The sensor assembly (18) is placed in a uniform magnetic field created, for example, by opposite polarity magnets (32, 34) mounted on opposite sides of the sensor assembly, and rotatable relative to it. The relative rotary position of the sensor assembly to the magnetic field is determined by comparing the relative values of the sensor elements (22) in the array to each other.

Description

<Desc/Clms Page number 1>
ROTARY POSITION SENSOR The present invention relates to magnetic position sensors and more particularly to magnetic field concentrators employed in a rotary magnetic sensor.
For mechanisms having one portion that rotates relative to another, it is often necessary to know the precise relative rotational position between the two portions.
There are many types of sensor arrangements that can accomplish such a task ; however, many have drawbacks in that they are too large for a particular application, too expensive to design and fabricate, or require extensive calibration once assembled in the mechanism.
These types of sensors can be used, for example as throttle position sensors, fuel accumulators, transmission position sensors, steering angle sensors, and gear tooth sensors. Many other types of applications of course can also benefit from having rotational position sensing.
Also, of course, it is desirable that the sensor be as inexpensive and easy to fabricate and assemble as possible in order to minimise the cost of the sensor assembly.
Consequently, it is desirable to have a rotational position sensor that does not need calibration, or may need only minimal calibration, is small in size, cost effective, and still reliable.
In its embodiments, the present invention provides a magnetic rotary position sensor comprising means for producing a generally uniform magnetic field over a sensor region ; a mounting base rotatable relative to the magnetic field about a centre of rotation; a plurality of generally triangular shaped concentrators generally uniformly spaced about the centre of relative rotation within the sensor region, with each of the concentrators spaced from adjacent concentrators to form gaps, and with the concentrators made of a magnetisable material; a plurality of hall effect
<Desc/Clms Page number 2>
sensors mounted to the base and extending radially outward front the centre of relative rotation, with each of the hall effect sensors located in a different one of the gaps; and means for communicating signals through each of the hall effect sensors.
In the embodiments of the present invention a generally uniform magnetic field is directed across a rotary position sensor assembly such that the magnetic field strength appearing across each individual sensing element of the array is related to the direction of the magnetic field relative to that particular element.
An advantage of the present invention is that the magnetic flux is distributed by the concentrators in a controlled manner over multiple magnetic field sensing elements.
Another advantage of the present invention is that this sensor array can be used with various types and sizes of magnetic field sensing elements. While this invention will operate on large scale assemblies, it will also operate effectively on very small scale assemblies, including microscale sensors with the structure built up on a ceramic chip or on a silicon chip which may or may not also contain additional electronic components.
A further advantage of the present invention is that magnetic field direction and hence rotary sensor position can be determined by comparing the responses of the individual sensing elements in the array to each other, without the need for precise temperature and magnetic field calibration in the final assembly.
An additional advantage of the present invention is that the arrangement of the sensor array can be configured so as to make assembly and alignment of the array onto a chip easier.
Another advantage of the present invention is that different configurations of magnets, for producing a
<Desc/Clms Page number 3>
magnetic field on the sensor array, can be employed to allow for flexibility of design for the sensor assembly.
The invention will now be described, by way of example, with reference to the accompanying drawings, in which: Fig. 1 is a schematic view illustrating a sensor array; Fig. 2 is a graph illustrating the resistance changes that take place in the GMR elements of Fig. 1 depending upon their orientation relative to a uniform magnetic field; Fig. 3A-3C are enlarged views of a portion of the sensor array of Fig. 1, illustrating the array in different positions of rotation relative to a uniform magnetic field; Fig. 4 is a schematic view of an alternative embodiment of the sensor array; Fig. 5 is a schematic view of a further embodiment of the sensor assembly; Fig. 6 is a schematic view of a fourth embodiment of the sensor assembly; Fig. 7 is a view of the fourth embodiment illustrated in Fig. 6, on a reduced scale, illustrating flux equipotential lines as they pass from a ring magnet through the sensor array; Fig. 8 is an enlarged view of a portion of Fig. 7, illustrating the flow of the flux equipotential lines on the sensor array ; and Fig. 9 is a schematic view of a fifth embodiment of the sensor assembly.
This patent application is a divisional of GB9928238. 6 and as such the description relates also to embodiments provided for a separate inventive concept. The invention of this application relates specifically to the use of Hall effect sensors in place of the giant magnetoresistive (GMR) sensors. While they are make a valid contribution to the parent application, their inclusion here is merely for the
<Desc/Clms Page number 4>
purposes of explanation and consistency wtth the appropriate diagrams.
Fig. 1 illustrates a sensor assembly 18 including a silicon chip 20 having an array of eight giant magnetoresistive (GMR) elements 22 mounted thereon. The silicon chip 20 carries the array structure itself, with the added advantage that, if desired, electronic circuitry can be formed on the same chip since GMR multi-layer element construction and semiconductor processes are compatible, thus forming a circuit board that also processes the sensor information. The magnetic sensor assembly 18 itself can have very small dimensions, for example, as small as 4 millimetres by 4 millimetres. The chip 20 may also be formed from ceramic, if so desired.
The array of GMR elements 22 is mounted extending radially with 22.5 degree separation between each one; each GMR element is numbered, 1-8. The GMR elements 22 themselves are similar to those described in US Patent Application serial Number 09/154,868, filed September 17, 1998, and can be wire bonded, if so desired, to the circuit board 20 and covered with a protective encapsulation material. While this array of magnetic field sensing elements is illustrated as GMR resistors, it need not be; it can also be formed from other magnetic field sensors, for example, Hall effect sensors, magnetoresistive sensors, etc.
The GMR elements 22 are connected at their radial inward ends to an inner wire bond pad 26 and at the outer ends to outer wire bond pads 28. The bond pads 26 and 28 are then connected to processing circuitry, not shown, for employing the sensor outputs in rotational angle calculations. The bond pads can instead be solder bumps, if so desired.
Also mounted on the Chip 20, in a uniform radial pattern interleaved with the GMR elements 22, are concentrators 30. The concentrators 30 are generally triangular shaped, each one being generally the same size,
<Desc/Clms Page number 5>
and are formed of a magnetisable material. The magnetisable material may be any soft ferromagnetic material such as iron, nickel-iron alloys, nickel and some ferrites. The pattern of the concentrators 30 is extended to complete a 360 degree layout, even though the pattern of the GMR elements 22 is less than 180 degrees. Thus, the shape of all of the concentrators 30 is uniform, as is the spacing between them that forms gaps 31 within which the GMR elements 22 are mounted. The uniformity is used to maintain control of the magnetic flux pattern.
There is a magnetic north pole 32 and a parallel magnetic south pole 34 spaced from, on opposite sides of, and facing the sensor assembly 18. These magnetic poles 32 and 34 are rotatable relative to the sensor assembly about the same axis as the sensor array has. For this configuration, then, a relatively uniform magnetic field, indicated by arrow 36, is created from left to right in Fig.
1, across the sensor assembly 18, and can be rotated relative to the assembly while remaining uniform. The uniform magnetic field can also be formed by a ring magnet, as will be discussed in relation to the fourth embodiment below.
When this parallel magnetic field is introduced across the sensor assembly 18, the magnetic field lines are directed in a controlled manner across the gaps 31 between the concentrators 30. As a result, if this uniform magnetic field 36 is introduced across the sensor assembly 18, then the magnetic field lines will appear in the general direction indicated in Fig. 3B ; for the discussion in relation to Figs. 1-3C, this will be considered the zero degree direction. One will note that the magnetic field lines will cross GMR element 5 generally perpendicular to the direction that this element extends. This will result in GMR element 5 being subject to the strongest magnetic flux of any GMR element because almost half the magnetic flux passing through the sensor array 22 will cross it.
<Desc/Clms Page number 6>
Line 50 in Fig. 2 shows that the resistance in the GMR element 5 for this zero degree direction of the magnetic field is at a minimum value of about 850 ohms. The resistance values used herein are only examples of values that may be used for a particular application and assumes that the GMR elements in this embodiment have a resistance of 1000 ohms at zero magnetic field strength and a decreasing resistance with an increasing magnetic field strength.
On the other hand, when this zero degree magnetic field crosses GMR element 1, there will be virtually no magnetic flux crossing it because the field will pass through the adjacent concentrators 30. Consequently, the resistance in GMR element 1 will be almost 1000 ohms, as is also indicated by line 50 in Fig. 2. With the configuration of the concentrators 30 in this sensor assembly 18, the remaining GMR elements 2-4 and 7-8 will be subjected to magnetic field strengths that vary approximately as the sine of the angle between the field direction and the radial centreline of the particular element. Thus, the magnitude of each of the element resistances, as the sensor is rotated relative to the magnets, generally varies in a sinusoidal fashion between a minimum and maximum resistance. So for this embodiment, GMR elements 2 and 8 will be reduced from the 1000 ohms base value by sin (22. 5 ) multiplied by the difference between the resistance values of GMR elements 1 and 5. GMR elements 3 and 7 will also be reduced, but by a factor of sin (45 ). Likewise, GMR elements 3 and 6 will have a factor of about sin (67. 5 ).
Fig. 3C shows an example where 45 degrees of relative rotation has occurred; the resulting change in resistance for the GMR elements, is indicated by line 52 of Fig. 2.
Fig. 3A illustrates that at 90 degrees rotation of the magnetic field 36, GMR element 5 now will be exposed to the same magnetic flux as GMR element 1 was at zero degrees rotation.
<Desc/Clms Page number 7>
As can be seen from Figs. 1-3C, the shape and positioning of the concentrators 30 in the sensor assembly 18 are such that if a relatively parallel magnetic field (preferably at less than concentrator magnetic saturation level) is placed across the array of concentrators 30, the field will be directed in a controlled manner across the magnetic field sensing devices, in this case the array of GMR elements 22. The individual sensing elements within the array 22 are subjected to different, but predictable, magnetic field conditions depending on their own location.
The reaction of each GMR element within the array of sensing elements 22 can then be measured and compared to the reaction of the other elements. Field direction is determined by these comparisons between the elements.
The processing can then be done by an applicable electronic processing method to provide an analogue, pulse width modulated, or digital word signal indicating magnetic field direction by comparing the relative resistances between the GMR elements in the array 22. For example, the method disclosed in US Patent Number 5,929, 631 filed July 2, 1997 may be employed. Consequently, absolute resistance of any single GMR element is not needed to determine rotational position, and so the need for calibration to magnetic field strength is substantially reduced and in most instances may be eliminated.
One will note that in this description relating to GMR elements, rather than hall effect sensors employed by the present invention, since the GMR elements in the array 22 react to the strength of the magnetic field independent of field polarity, they will change the same amount regardless of the polarity, i. e. whether a magnetic field crosses, for example, from left to right or right to left, through the sensor assembly 18. Consequently, the embodiment of the sensor assembly in Fig. 1 is only applicable for measuring 180 degrees of rotation because more rotation than that will merely repeat the pattern.
<Desc/Clms Page number 8>
Fig. 4 illustrates a modified embodiment of a rotary position sensor which allows for full 360 degree rotational angle measurement by the addition of the ability to indicate field direction. For this embodiment similar elements are numbered the same as the first embodiment, while modified elements are given 100 series numbers. The sensor assembly 118 now includes a Hall effect sensor 56. The Hall effect sensor 56 is mounted to the chip 120 close enough to the sensor array 22 so that it will also be in the uniform magnetic field. It has bond pads 58 on the chip 120 that will connect to the electronic sensor circuitry, not shown, in the same manner as the GMR elements of the array 22.
Since the hall sensor 56 can detect polarity as well as magnitude of a magnetic field, it will reverse polarity at 180 degrees of relative rotation, providing an identifier of polarity. The Hall sensor 56 will put out a positive or negative voltage depending on the magnetic field polarity.
The rotational position within each 180 degrees of rotation, then, will still be provided by the GMR element array 22.
By mounting Hall sensors in the sensor array, the present invention does not rely on an additional Hall sensor 56, since the sensors in the sensor array are capable of measuring both field strength and direction.
Fig. 5 illustrates another embodiment of a rotary
pOS4 position sensor, similar to the first embodiment, but with the array of GMR elements 222 positioned differently on the chip 220 to form the sensor assembly 218. For this embodiment, modified elements from the first embodiment will be given 200 series numbers. The concentrators 30 are arranged the same as in the first embodiment. This embodiment illustrates that individual GMR elements 1-8 can be located at various locations within the array of concentrators 30 without reducing the effectiveness for determining rotational position. Being able to accommodate the various positions allows for optimising the overall circuitry pattern, not shown, when it is desirable to have
<Desc/Clms Page number 9>
the sensor circuitry located on the same chip 220 as the sensor assembly 218.
Fig. 6 illustrates a further embodiment of a rotary position sensor, similar to the first embodiment. For this embodiment, modified elements from the first embodiment will be given a 300 series number. The sensor assembly 318 now includes an array of nine GMR elements 322 mounted on the chip 320 rather than eight, with the elements 322 spaced with a greater angle (40 degrees) between them. To accommodate this change, the concentrators 330 are wider and there are of course fewer of them for this arrangement.
Despite the fact that the array of sensor elements 322 is now spaced around a full 360 degrees, it will still only sense 180 degrees of rotational motion since all of the sensors in this array are shown as GMR elements. With this embodiment as well, one can employ Hall effect sensor as taught in the present invention to obtain a full 360 degree rotational sensing capability, if desired.
Figs. 7 and 8 illustrate magnetic field characteristics for the sensor array embodiment in Fig. 6. For this magnetic field measurement, the silicon substrate 320 upon which the sensor assembly 318 is mounted is about four millimetres by four millimetres, placed within a ring magnet 332 (employed rather than the magnets illustrated in Fig.
1). The concentrators 330 are formed from iron. The ring magnet 332 and sensor array 318 are rotatable relative to one another. One will note that the flux equipotential lines 70 (indicated by the dashed lines in Figs. 7 and 8) overall are generally parallel and uniform, except in the immediate vicinity of the sensor assembly 318. Fig. 8 illustrates the enlarged view of the sensor assembly of Fig.
7 to more clearly show the magnetic flux equipotential lines 70 and how they are oriented through the sensor array 318 itself. One will note that the more parallel a sensor element is to the general direction of the flux equipotential lines 70, the less magnetic flux will be seen
<Desc/Clms Page number 10>
by that particular sensor. In this way, the relative magnitudes of the magnetic field sensed between the different sensors of the array can be used to determine the rotational position.
Fig. 9 illustrates a fifth embodiment of a rotary position sensor. This embodiment is of particular interest for applications that require a redundant output signal for the same rotational position measurement. For this embodiment, modified elements from the first embodiment will be given a 400 series number; also, the sensor assembly 418 in this embodiment contains a sensor array 422 of sixteen GMR elements, now numbered 1-16. The GMR elements numbered 1-8 are located about a first 180 degree arc of the assembly 418 and form a first set 74, while the GMR elements numbered 9-16 are located about a second 180 degree arc of the assembly 418 and form a second set 76 to mirror the first set 74. The second set 76 is 180 degrees out of phase with the first set 74. The first and second sets 74,76 each form a different 180 degree sensing array that operates independently of the other set. The first set 74 connects to a first portion of sensor circuitry, not shown, and the second set 76 connects to a second portion of sensor circuitry. Each set 74,76 will produce a signal indicating the relative rotational position to the magnetic field. So long as the two sets agree, the implication is that the sensors are working properly. But if the two sets 74,76 do not agree as to the rotational position, then this indicates that some element within the sensor assembly has failed. Thus, this configuration provides redundancy to assure sensor failures are found.
This embodiment also illustrates a different way to produce the magnetic field. The magnetic field is produced by a rectangular magnet 432 that is mounted adjacent to and rotatable relative to the sensor assembly 418 about the central axis of the assembly. The magnet 432 is wider and longer that the sensor assembly 418 and located directly
<Desc/Clms Page number 11>
below the sensor assembly. With this arrangement, the magnetic field will be generally parallel from the north (N) to south (S) pole across the sensor assembly 418 except where it is directed by the concentrators 430. The flux lines will also have some symmetrical direction away from the plane of the sensor assembly 418, particularly nearer the magnetic poles. But that will not affect sensor performance since field direction is determined by comparison of the sensor elements within the array 422 and the concentrators 430 will still direct the magnetic field over the sensor elements 1-16 in a predictable manner.
Also, for this fifth embodiment, the sensor assembly 418 pattern is repetitive (i. e. symmetrical) in each quadrant of the chip 420, demarcated by phantom lines 82.
For this embodiment, the chip 420 can be, for example, made of ceramic. There are four inner bond pads 426, each of which connects to the radially inward ends of four adjacent sensing elements. All bond pads 426 and 428 are shown with solder bumps 80 for connection to processing circuitry, not shown. This symmetrical layout by quadrants is intended to foolproof orientation of the chip 420 when it is attached to processing circuitry, on a circuit board for example. The processing circuitry can then directly connect to the inner bond pad 426 of the sensing elements 1-4, to the inner bond pad of the sensing elements 5-8, the inner bond pad of sensing elements 9-12, and to the bond pad of elements 13-16. If the sensor assembly 418 is inadvertently rotated by 90,180 or 270 degrees before assembly, to a circuit board for example, the rotational shift will be transparent. All bond pads 426 and 428 will still align with the circuit board pattern and the relocated sensing elements will provide the correct output for their location.
Consequently, the potential for manufacturing error is reduced.

Claims (7)

  1. CLAIMS 1. A magnetic rotary position sensor comprising: means for producing a generally uniform magnetic field over a sensor region; a mounting base rotatable relative to the magnetic field about a centre of rotation; a plurality of generally triangular shaped concentrators generally uniformly spaced about the centre of relative rotation within the sensor region, with each of the concentrators spaced from adjacent concentrators to form gaps, and with the concentrators made of a magnetisable material; a plurality of hall effect sensors mounted to the base and extending radially outward from the. centre of relative rotation, with each of the hall effect sensors located in a different one of the gaps; and means for communicating signals through each of the hall effect sensors.
  2. 2. A sensor as claimed in claim 1, wherein the mounting base is made of a ceramic material.
  3. 3. A sensor as claimed in claim 1, wherein the mounting base is made of silicon.
  4. 4. A sensor as claimed in any preceding claim, wherein the concentrators are made of a ferromagnetic material.
  5. 5. A sensor as claimed in any of claims 1 to 3, wherein the concentrators are made at least partially from nickel.
    <Desc/Clms Page number 13>
  6. 6. A sensor as claimed in any preceding claim, wherein the plurality of concentrators comprises sixteen concentrators of generally equal size extending circumferentially about the relative centre of rotation 360 degrees, and the plurality of hall effect sensors comprises eight sensors.
  7. 7. A sensor as claimed in any of claims 1 to 5, wherein the plurality of concentrators comprises nine concentrators of generally equal size extending circumferentially about the relative centre of rotation 360 degrees, and the plurality of hall effect sensors comprises nine sensors.
GB0227418A 1998-12-01 1999-12-01 Rotary position sensor Withdrawn GB2379025A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/203,248 US6326780B1 (en) 1998-12-01 1998-12-01 Magnetic field concentrator array for rotary position sensors
GB9928238A GB2344424B (en) 1998-12-01 1999-12-01 Magnetic field concentrator array for rotary position sensors

Publications (2)

Publication Number Publication Date
GB0227418D0 GB0227418D0 (en) 2002-12-31
GB2379025A true GB2379025A (en) 2003-02-26

Family

ID=26316099

Family Applications (1)

Application Number Title Priority Date Filing Date
GB0227418A Withdrawn GB2379025A (en) 1998-12-01 1999-12-01 Rotary position sensor

Country Status (1)

Country Link
GB (1) GB2379025A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2403294A (en) * 2003-06-26 2004-12-29 Metaltech Services Ltd Rotary movement sensor with magnetic flux directing members
EP2038617A2 (en) * 2006-07-11 2009-03-25 Continental Automotive Systems US, Inc. Rotary angle sensing system
WO2013188058A1 (en) * 2012-06-15 2013-12-19 Bourns, Inc. Steering torque angle sensor having a processor and a magneto-resistive element configured in a monolithic architecture

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19532674C1 (en) * 1995-09-05 1996-11-07 Inst Physikalische Hochtech Ev Rotational angle encoder using giant magnetoresistance striplines
WO1998008060A1 (en) * 1996-08-24 1998-02-26 Robert Bosch Gmbh Measuring device for contactless capture of the angle of rotation
WO1998048244A1 (en) * 1997-04-23 1998-10-29 Ab Elektronik Gmbh Device for determining the position and/or torsion of rotating shafts

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19532674C1 (en) * 1995-09-05 1996-11-07 Inst Physikalische Hochtech Ev Rotational angle encoder using giant magnetoresistance striplines
WO1998008060A1 (en) * 1996-08-24 1998-02-26 Robert Bosch Gmbh Measuring device for contactless capture of the angle of rotation
WO1998048244A1 (en) * 1997-04-23 1998-10-29 Ab Elektronik Gmbh Device for determining the position and/or torsion of rotating shafts

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2403294A (en) * 2003-06-26 2004-12-29 Metaltech Services Ltd Rotary movement sensor with magnetic flux directing members
GB2403294B (en) * 2003-06-26 2006-06-14 Metaltech Services Ltd Movement sensor
EP2038617A2 (en) * 2006-07-11 2009-03-25 Continental Automotive Systems US, Inc. Rotary angle sensing system
WO2013188058A1 (en) * 2012-06-15 2013-12-19 Bourns, Inc. Steering torque angle sensor having a processor and a magneto-resistive element configured in a monolithic architecture

Also Published As

Publication number Publication date
GB0227418D0 (en) 2002-12-31

Similar Documents

Publication Publication Date Title
US6326780B1 (en) Magnetic field concentrator array for rotary position sensors
US6191579B1 (en) Rotary position sensor with redundant sensing
JP6663421B2 (en) Dual Z-axis magnetoresistive angle sensor
KR101365349B1 (en) Angle measurement system
EP2284495B1 (en) Magnetic sensor
JP4319153B2 (en) Magnetic sensor
JP4259937B2 (en) Angle detection sensor
JP4117175B2 (en) Rotation angle detector
JP7056503B2 (en) Rotation detector
JP5721804B2 (en) Magnetic detection device and vehicle rotation detection device equipped with the same
JP2008101954A (en) Magnetic sensor element
JP3609645B2 (en) Rotation detection sensor
GB2379025A (en) Rotary position sensor
WO2007147021A2 (en) Permalloy bridge with selectable wafer-anistropy using multiple layers
JP3605526B2 (en) Detection circuit of rotation detection sensor
JP3922427B2 (en) Magnetic encoder
JP2014202704A (en) Magnetic field detection device
US5986450A (en) Directionally independent magnet sensor
JP3308123B2 (en) Magnetoresistive sensor
JP3710973B2 (en) Rotation detection sensor
WO1998045665A9 (en) Directionally independent magnetic sensor
JPH0329875A (en) Magnetoresistance element made of ferromagnetic body
JP2022086818A (en) Magnetic sensor device
JP2023055157A (en) magnetic sensor
CN114370888A (en) Magnetic encoder chip

Legal Events

Date Code Title Description
WAP Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1)