GB2372318A - Measurement of objects - Google Patents

Measurement of objects Download PDF

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Publication number
GB2372318A
GB2372318A GB0210548A GB0210548A GB2372318A GB 2372318 A GB2372318 A GB 2372318A GB 0210548 A GB0210548 A GB 0210548A GB 0210548 A GB0210548 A GB 0210548A GB 2372318 A GB2372318 A GB 2372318A
Authority
GB
United Kingdom
Prior art keywords
measuring
fringe pattern
image field
intensity
measurements
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
GB0210548A
Other versions
GB0210548D0 (en
Inventor
David Robert Burton
Michael Joseph Lalor
Christopher John Moore
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of GB0210548D0 publication Critical patent/GB0210548D0/en
Publication of GB2372318A publication Critical patent/GB2372318A/en
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

There is disclosed a method for measuring an object comprising: 1. projecting an interference fringe pattern onto the object using sources of e.m. radiation; 2. measuring the phase shift and image intensity of the fringe pattern across an image field; 3. measuring the intensity of background illumination across the image field; 4. modifying the measurements of the fringe pattern by subtracting an amount corresponding to the measured background illumination across the image field; and 5. generating a 3-D height map of the object using the modified measurements.

Description

(12) UK Patent Application 'g,GB 11 2 372 318 PITA (43) Date of Printing
by UK Office 21.08.2002 ( 1) Application No 0210548.4 (51) iNT CL7 GOlB 11/24 (22) Date of Filing 03.11.2000 (52) UK CL (Edition T) (30) Priority Data G1A M20 ACEX AG13 AG17 AG18 AR7 AT26 AT3 (31) 9926014 (32) 04.11. 1999 (33) GB U1S S1031
(86) International Application Data (56) Documents Cited by ISA PCT/GB2000/004226 En 03.11.2000 DE 004120115 A US 5612786 A US 5381236 A
(87) International Publication Data WO2001/033164 En 10.05.2001 (58) Field of Search by ISA
INTCL7 G01B
PAJ, WPI Data, EPO-internal (71) Applicant(s) David Robert Burton 28 Hoyle Road, Hoylake, WIRRAL, CH47 3AQ, (72) Inventor(s) United Kingdom David Robert Burton Michael Joseph Lalor Michael Joseph Lalor Christopher John Moore 54 Lovelace Road, LIVERPOOL, L19 1QF, United Kingdom (74) Agent and/or Address for Service W P Thompson & Co Christopher John Moore Coopers Building, Church Street. LIVERPOOL L1 3AB, 31 Rosslare Road, Peel Hall, MANCHESTER, M22 5GQ, United Kingdom United Kingdom (54) Abstract lisle Measurement of objects {57) There is disclosed a method for measuring an object comprising: 1. projecting an interference fringe pattern onto the object using sources of e.m. radiation; 2. measuring the phase shift and image intensity of the fringe pattern across an image field; 3. measuring the intensity of background illumination across the image
field; 4. modifying the measurements of the fringe pattern by subtracting an amount corresponding to the
measured background illumination across the image field; and 5. generating a 3-D height map of the object
using the modified measurements.
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This international application has entered the national phase early. D
GB0210548A 1999-11-04 2000-11-03 Measurement of objects Withdrawn GB2372318A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GBGB9926014.3A GB9926014D0 (en) 1999-11-04 1999-11-04 Measurement of objects
PCT/GB2000/004226 WO2001033164A1 (en) 1999-11-04 2000-11-03 Measurement of objects

Publications (2)

Publication Number Publication Date
GB0210548D0 GB0210548D0 (en) 2002-06-19
GB2372318A true GB2372318A (en) 2002-08-21

Family

ID=10863873

Family Applications (2)

Application Number Title Priority Date Filing Date
GBGB9926014.3A Ceased GB9926014D0 (en) 1999-11-04 1999-11-04 Measurement of objects
GB0210548A Withdrawn GB2372318A (en) 1999-11-04 2000-11-03 Measurement of objects

Family Applications Before (1)

Application Number Title Priority Date Filing Date
GBGB9926014.3A Ceased GB9926014D0 (en) 1999-11-04 1999-11-04 Measurement of objects

Country Status (3)

Country Link
AU (1) AU1159401A (en)
GB (2) GB9926014D0 (en)
WO (1) WO2001033164A1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113959360B (en) * 2021-11-25 2023-11-24 成都信息工程大学 Method, device and medium for measuring three-dimensional surface shape based on phase shift and focal shift

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4120115A1 (en) * 1991-06-19 1992-12-24 Volkswagen Ag Contactless determn. of coordinates of points on surface - combining coded light application with phase-shift method using stripes of width corresp. to pattern period
US5381236A (en) * 1991-02-12 1995-01-10 Oxford Sensor Technology Limited Optical sensor for imaging an object
US5612786A (en) * 1994-05-26 1997-03-18 Lockheed Missiles & Space Company, Inc. Contour measurement system

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5381236A (en) * 1991-02-12 1995-01-10 Oxford Sensor Technology Limited Optical sensor for imaging an object
DE4120115A1 (en) * 1991-06-19 1992-12-24 Volkswagen Ag Contactless determn. of coordinates of points on surface - combining coded light application with phase-shift method using stripes of width corresp. to pattern period
US5612786A (en) * 1994-05-26 1997-03-18 Lockheed Missiles & Space Company, Inc. Contour measurement system

Also Published As

Publication number Publication date
GB9926014D0 (en) 2000-01-12
WO2001033164A1 (en) 2001-05-10
GB0210548D0 (en) 2002-06-19
AU1159401A (en) 2001-05-14

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Legal Events

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WAP Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1)