GB2370271B - Novel precursors for the growth of heterometal oxide films by mocvd - Google Patents
Novel precursors for the growth of heterometal oxide films by mocvdInfo
- Publication number
- GB2370271B GB2370271B GB0110862A GB0110862A GB2370271B GB 2370271 B GB2370271 B GB 2370271B GB 0110862 A GB0110862 A GB 0110862A GB 0110862 A GB0110862 A GB 0110862A GB 2370271 B GB2370271 B GB 2370271B
- Authority
- GB
- United Kingdom
- Prior art keywords
- mocvd
- growth
- oxide films
- novel precursors
- heterometal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000002243 precursor Substances 0.000 title 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
- C07F9/00—Compounds containing elements of Groups 5 or 15 of the Periodic Table
- C07F9/005—Compounds of elements of Group 5 of the Periodic Table without metal-carbon linkages
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Formation Of Insulating Films (AREA)
- Chemical Vapour Deposition (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB0010926A GB0010926D0 (en) | 2000-05-06 | 2000-05-06 | Novel precursors for the growth of heterometal oxide films by MOCVD |
Publications (3)
Publication Number | Publication Date |
---|---|
GB0110862D0 GB0110862D0 (en) | 2001-06-27 |
GB2370271A GB2370271A (en) | 2002-06-26 |
GB2370271B true GB2370271B (en) | 2004-02-11 |
Family
ID=9891076
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB0010926A Ceased GB0010926D0 (en) | 2000-05-06 | 2000-05-06 | Novel precursors for the growth of heterometal oxide films by MOCVD |
GB0110862A Expired - Fee Related GB2370271B (en) | 2000-05-06 | 2001-05-03 | Novel precursors for the growth of heterometal oxide films by mocvd |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB0010926A Ceased GB0010926D0 (en) | 2000-05-06 | 2000-05-06 | Novel precursors for the growth of heterometal oxide films by MOCVD |
Country Status (1)
Country | Link |
---|---|
GB (2) | GB0010926D0 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100857590B1 (en) * | 2007-02-12 | 2008-09-09 | 충남대학교산학협력단 | Method for Room Temperature Chemical Vapor Deposition on Flexible Polymer Substrates |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH1135394A (en) * | 1997-07-17 | 1999-02-09 | Sony Corp | Production of ferroelectric thin film and raw material for chemical vapor growth or organic metal |
US5885648A (en) * | 1996-04-19 | 1999-03-23 | Raytheon Company | Process for making stoichiometric mixed metal oxide films |
-
2000
- 2000-05-06 GB GB0010926A patent/GB0010926D0/en not_active Ceased
-
2001
- 2001-05-03 GB GB0110862A patent/GB2370271B/en not_active Expired - Fee Related
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5885648A (en) * | 1996-04-19 | 1999-03-23 | Raytheon Company | Process for making stoichiometric mixed metal oxide films |
JPH1135394A (en) * | 1997-07-17 | 1999-02-09 | Sony Corp | Production of ferroelectric thin film and raw material for chemical vapor growth or organic metal |
Non-Patent Citations (1)
Title |
---|
CHEMICAL ABSTRACT, No 130:175614 & JP-A-11 035394 (SONY CORPORATION JAPAN) (09-02-1999) * |
Also Published As
Publication number | Publication date |
---|---|
GB0010926D0 (en) | 2000-06-28 |
GB0110862D0 (en) | 2001-06-27 |
GB2370271A (en) | 2002-06-26 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
732E | Amendments to the register in respect of changes of name or changes affecting rights (sect. 32/1977) | ||
PCNP | Patent ceased through non-payment of renewal fee |
Effective date: 20130503 |