GB2370271B - Novel precursors for the growth of heterometal oxide films by mocvd - Google Patents

Novel precursors for the growth of heterometal oxide films by mocvd

Info

Publication number
GB2370271B
GB2370271B GB0110862A GB0110862A GB2370271B GB 2370271 B GB2370271 B GB 2370271B GB 0110862 A GB0110862 A GB 0110862A GB 0110862 A GB0110862 A GB 0110862A GB 2370271 B GB2370271 B GB 2370271B
Authority
GB
United Kingdom
Prior art keywords
mocvd
growth
oxide films
novel precursors
heterometal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB0110862A
Other versions
GB2370271A (en
GB0110862D0 (en
Inventor
Anthony Copeland Jones
Timothy John Leedham
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Inorgtech Ltd
Original Assignee
Inorgtech Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Inorgtech Ltd filed Critical Inorgtech Ltd
Publication of GB0110862D0 publication Critical patent/GB0110862D0/en
Publication of GB2370271A publication Critical patent/GB2370271A/en
Application granted granted Critical
Publication of GB2370271B publication Critical patent/GB2370271B/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
    • C07F9/00—Compounds containing elements of Groups 5 or 15 of the Periodic System
    • C07F9/005—Compounds of elements of Group 5 of the Periodic System without metal-carbon linkages
GB0110862A 2000-05-06 2001-05-03 Novel precursors for the growth of heterometal oxide films by mocvd Expired - Fee Related GB2370271B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB0010926A GB0010926D0 (en) 2000-05-06 2000-05-06 Novel precursors for the growth of heterometal oxide films by MOCVD

Publications (3)

Publication Number Publication Date
GB0110862D0 GB0110862D0 (en) 2001-06-27
GB2370271A GB2370271A (en) 2002-06-26
GB2370271B true GB2370271B (en) 2004-02-11

Family

ID=9891076

Family Applications (2)

Application Number Title Priority Date Filing Date
GB0010926A Ceased GB0010926D0 (en) 2000-05-06 2000-05-06 Novel precursors for the growth of heterometal oxide films by MOCVD
GB0110862A Expired - Fee Related GB2370271B (en) 2000-05-06 2001-05-03 Novel precursors for the growth of heterometal oxide films by mocvd

Family Applications Before (1)

Application Number Title Priority Date Filing Date
GB0010926A Ceased GB0010926D0 (en) 2000-05-06 2000-05-06 Novel precursors for the growth of heterometal oxide films by MOCVD

Country Status (1)

Country Link
GB (2) GB0010926D0 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100857590B1 (en) * 2007-02-12 2008-09-09 충남대학교산학협력단 Method for Room Temperature Chemical Vapor Deposition on Flexible Polymer Substrates

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1135394A (en) * 1997-07-17 1999-02-09 Sony Corp Production of ferroelectric thin film and raw material for chemical vapor growth or organic metal
US5885648A (en) * 1996-04-19 1999-03-23 Raytheon Company Process for making stoichiometric mixed metal oxide films

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5885648A (en) * 1996-04-19 1999-03-23 Raytheon Company Process for making stoichiometric mixed metal oxide films
JPH1135394A (en) * 1997-07-17 1999-02-09 Sony Corp Production of ferroelectric thin film and raw material for chemical vapor growth or organic metal

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
CHEMICAL ABSTRACT, No 130:175614 & JP-A-11 035394 (SONY CORPORATION JAPAN) (09-02-1999) *

Also Published As

Publication number Publication date
GB2370271A (en) 2002-06-26
GB0110862D0 (en) 2001-06-27
GB0010926D0 (en) 2000-06-28

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Legal Events

Date Code Title Description
732E Amendments to the register in respect of changes of name or changes affecting rights (sect. 32/1977)
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20130503