GB2365488B - Wafer enclosure with door - Google Patents

Wafer enclosure with door

Info

Publication number
GB2365488B
GB2365488B GB0126278A GB0126278A GB2365488B GB 2365488 B GB2365488 B GB 2365488B GB 0126278 A GB0126278 A GB 0126278A GB 0126278 A GB0126278 A GB 0126278A GB 2365488 B GB2365488 B GB 2365488B
Authority
GB
United Kingdom
Prior art keywords
door
wafer enclosure
enclosure
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB0126278A
Other versions
GB0126278D0 (en
GB2365488A (en
Inventor
Kirk J Mikkelsen
Michael S Adams
Greg Bores
Brian S Wiseman
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fluoroware Inc
Original Assignee
Fluoroware Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US08/904,660 external-priority patent/US5957292A/en
Application filed by Fluoroware Inc filed Critical Fluoroware Inc
Priority claimed from GB0021476A external-priority patent/GB0021476D0/en
Publication of GB0126278D0 publication Critical patent/GB0126278D0/en
Publication of GB2365488A publication Critical patent/GB2365488A/en
Application granted granted Critical
Publication of GB2365488B publication Critical patent/GB2365488B/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67373—Closed carriers characterised by locking systems

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Packaging Frangible Articles (AREA)
GB0126278A 1997-08-01 2000-09-01 Wafer enclosure with door Expired - Fee Related GB2365488B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/904,660 US5957292A (en) 1997-08-01 1997-08-01 Wafer enclosure with door
GB0021476A GB0021476D0 (en) 2000-09-01 2000-09-01 Method of attachment

Publications (3)

Publication Number Publication Date
GB0126278D0 GB0126278D0 (en) 2002-01-02
GB2365488A GB2365488A (en) 2002-02-20
GB2365488B true GB2365488B (en) 2002-04-10

Family

ID=26244945

Family Applications (1)

Application Number Title Priority Date Filing Date
GB0126278A Expired - Fee Related GB2365488B (en) 1997-08-01 2000-09-01 Wafer enclosure with door

Country Status (1)

Country Link
GB (1) GB2365488B (en)

Also Published As

Publication number Publication date
GB0126278D0 (en) 2002-01-02
GB2365488A (en) 2002-02-20

Similar Documents

Publication Publication Date Title
GB2341890B (en) Wafer enclosure with door
GB2340167B (en) Door
GB2321496B (en) Cabinet latch
GB2313870B (en) Enclosure
GB2365488B (en) Wafer enclosure with door
GB9725999D0 (en) Enclosure
GB2328712B (en) Door mechanisms
GB9814153D0 (en) Door arrangement
GB2322660B (en) Doors
GB9808437D0 (en) Door
GB9719226D0 (en) Enclosure
GB9825588D0 (en) Enclosure
ZA988458B (en) An enclosure
GB9713940D0 (en) Door arrangement
GB9821530D0 (en) An enclosure
AU139793S (en) An enclosure
GB9724687D0 (en) Door device
PL322460A1 (en) Antiburglary door
PL105860U1 (en) Door
IL120053A0 (en) Door
PL105861U1 (en) Door
PL105862U1 (en) Door
TW375163U (en) Door set
TW352786U (en) Structure for door inside the door
GB9726282D0 (en) Shower enclosure

Legal Events

Date Code Title Description
732E Amendments to the register in respect of changes of name or changes affecting rights (sect. 32/1977)
732E Amendments to the register in respect of changes of name or changes affecting rights (sect. 32/1977)
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20090731