GB2349214B - Methods and apparatus for the in-process detection of workpieces - Google Patents
Methods and apparatus for the in-process detection of workpiecesInfo
- Publication number
- GB2349214B GB2349214B GB0018384A GB0018384A GB2349214B GB 2349214 B GB2349214 B GB 2349214B GB 0018384 A GB0018384 A GB 0018384A GB 0018384 A GB0018384 A GB 0018384A GB 2349214 B GB2349214 B GB 2349214B
- Authority
- GB
- United Kingdom
- Prior art keywords
- workpieces
- methods
- process detection
- detection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
- G05B19/401—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by control arrangements for measuring, e.g. calibration and initialisation, measuring workpiece for machining purposes
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/20—Pc systems
- G05B2219/23—Pc programming
- G05B2219/23231—Mark objects, execute sequence according to mark
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/37—Measurements
- G05B2219/37286—Photoelectric sensor with reflection, emits and receives modulated light
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/37—Measurements
- G05B2219/37573—In-cycle, insitu, during machining workpiece is measured continuously
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/45—Nc applications
- G05B2219/45232—CMP chemical mechanical polishing of wafer
Landscapes
- Engineering & Computer Science (AREA)
- Human Computer Interaction (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Automation & Control Theory (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/683,150 US5733171A (en) | 1996-07-18 | 1996-07-18 | Apparatus for the in-process detection of workpieces in a CMP environment |
US08/781,132 US5823853A (en) | 1996-07-18 | 1997-01-09 | Apparatus for the in-process detection of workpieces with a monochromatic light source |
GB9900800A GB2330200B (en) | 1996-07-18 | 1997-07-16 | Methods and apparatus for the in-process detection of workpieces |
Publications (3)
Publication Number | Publication Date |
---|---|
GB0018384D0 GB0018384D0 (en) | 2000-09-13 |
GB2349214A GB2349214A (en) | 2000-10-25 |
GB2349214B true GB2349214B (en) | 2000-12-20 |
Family
ID=27269614
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB0018384A Expired - Fee Related GB2349214B (en) | 1996-07-18 | 1997-07-16 | Methods and apparatus for the in-process detection of workpieces |
Country Status (1)
Country | Link |
---|---|
GB (1) | GB2349214B (en) |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4626101A (en) * | 1983-11-26 | 1986-12-02 | Kabushiki Kaisha Toshiba | Surface defect inspecting apparatus |
GB2180642A (en) * | 1985-08-29 | 1987-04-01 | Hochiki Co | Counting the number of moving bodies |
GB2248935A (en) * | 1990-10-09 | 1992-04-22 | Hajime Industries | Surface inspection device |
US5667424A (en) * | 1996-09-25 | 1997-09-16 | Chartered Semiconductor Manufacturing Pte Ltd. | New chemical mechanical planarization (CMP) end point detection apparatus |
US5762091A (en) * | 1996-08-01 | 1998-06-09 | Sarne; Daniel L. | Thermal-pressure relief device |
-
1997
- 1997-07-16 GB GB0018384A patent/GB2349214B/en not_active Expired - Fee Related
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4626101A (en) * | 1983-11-26 | 1986-12-02 | Kabushiki Kaisha Toshiba | Surface defect inspecting apparatus |
GB2180642A (en) * | 1985-08-29 | 1987-04-01 | Hochiki Co | Counting the number of moving bodies |
GB2248935A (en) * | 1990-10-09 | 1992-04-22 | Hajime Industries | Surface inspection device |
US5762091A (en) * | 1996-08-01 | 1998-06-09 | Sarne; Daniel L. | Thermal-pressure relief device |
US5667424A (en) * | 1996-09-25 | 1997-09-16 | Chartered Semiconductor Manufacturing Pte Ltd. | New chemical mechanical planarization (CMP) end point detection apparatus |
Also Published As
Publication number | Publication date |
---|---|
GB2349214A (en) | 2000-10-25 |
GB0018384D0 (en) | 2000-09-13 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PCNP | Patent ceased through non-payment of renewal fee |
Effective date: 20010716 |