GB2341720A - Electron beam aperture element with beam sheilding - Google Patents

Electron beam aperture element with beam sheilding Download PDF

Info

Publication number
GB2341720A
GB2341720A GB9820205A GB9820205A GB2341720A GB 2341720 A GB2341720 A GB 2341720A GB 9820205 A GB9820205 A GB 9820205A GB 9820205 A GB9820205 A GB 9820205A GB 2341720 A GB2341720 A GB 2341720A
Authority
GB
United Kingdom
Prior art keywords
aperture element
passage opening
chamber
element according
wall
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
GB9820205A
Other languages
English (en)
Other versions
GB9820205D0 (en
Inventor
Tao Zhang
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Vistec Lithography Ltd
Original Assignee
Vistec Lithography Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vistec Lithography Ltd filed Critical Vistec Lithography Ltd
Priority to GB9820205A priority Critical patent/GB2341720A/en
Publication of GB9820205D0 publication Critical patent/GB9820205D0/en
Priority to PCT/EP1999/006770 priority patent/WO2000016370A1/en
Priority to JP2000570812A priority patent/JP4568431B2/ja
Priority to DE69932067T priority patent/DE69932067T2/de
Priority to EP99969178A priority patent/EP1121704B1/en
Publication of GB2341720A publication Critical patent/GB2341720A/en
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/30—Electron or ion beam tubes for processing objects
    • H01J2237/317—Processing objects on a microscale
    • H01J2237/3175—Lithography

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
GB9820205A 1998-09-16 1998-09-16 Electron beam aperture element with beam sheilding Withdrawn GB2341720A (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
GB9820205A GB2341720A (en) 1998-09-16 1998-09-16 Electron beam aperture element with beam sheilding
PCT/EP1999/006770 WO2000016370A1 (en) 1998-09-16 1999-09-13 Electron beam aperture element with beam shielding
JP2000570812A JP4568431B2 (ja) 1998-09-16 1999-09-13 ビームシールドを備えた電子ビーム開口要素
DE69932067T DE69932067T2 (de) 1998-09-16 1999-09-13 Aperturblende mit strahlabschirmung für elektronenstrahl
EP99969178A EP1121704B1 (en) 1998-09-16 1999-09-13 Electron beam aperture element with beam shielding

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB9820205A GB2341720A (en) 1998-09-16 1998-09-16 Electron beam aperture element with beam sheilding

Publications (2)

Publication Number Publication Date
GB9820205D0 GB9820205D0 (en) 1998-11-11
GB2341720A true GB2341720A (en) 2000-03-22

Family

ID=10838977

Family Applications (1)

Application Number Title Priority Date Filing Date
GB9820205A Withdrawn GB2341720A (en) 1998-09-16 1998-09-16 Electron beam aperture element with beam sheilding

Country Status (5)

Country Link
EP (1) EP1121704B1 (https=)
JP (1) JP4568431B2 (https=)
DE (1) DE69932067T2 (https=)
GB (1) GB2341720A (https=)
WO (1) WO2000016370A1 (https=)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110536535A (zh) * 2019-07-12 2019-12-03 西安交通大学 一种用于高能粒子加速器的束屏
US20230005699A1 (en) * 2020-03-09 2023-01-05 Asml Netherlands B.V. Aperture body, flood column and charged particle tool

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6750981B2 (ja) * 2016-08-25 2020-09-02 株式会社ニューフレアテクノロジー マルチ荷電粒子ビーム露光装置

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB714613A (en) * 1951-01-31 1954-09-01 Sueddeutsche Laboratorien Gmbh Improvements in drilling by electrons
EP0344646A2 (en) * 1988-06-01 1989-12-06 IMS Ionen Mikrofabrikations Systeme Gesellschaft m.b.H. Ion beam lithography introduction
WO1991006393A1 (fr) * 1989-11-01 1991-05-16 Vladimir Omarovich Tokarev Dispositif de protection contre les depots se formant sur la cathode d'un pistolet de soudage par bombardement electronique et surles parois d'une enceinte a vide
WO1998016946A2 (en) * 1996-10-17 1998-04-23 Etec Systems, Inc. Conical baffle for reducing charging drift in a particle beam system

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5935501B2 (ja) * 1979-07-25 1984-08-29 株式会社日立製作所 電子線装置
JPS59203353A (ja) * 1983-05-06 1984-11-17 Sony Corp 電子ビ−ム発生装置
DE3407050A1 (de) * 1984-02-27 1985-09-05 Siemens AG, 1000 Berlin und 8000 München Korpuskelbeschleunigende elektrode
DE3666897D1 (en) * 1985-03-28 1989-12-14 Philips Nv Electron beam apparatus comprising an integrated anode/beam blanking unit
EP0308560A1 (fr) * 1987-09-22 1989-03-29 Universite De Reims Champagne Ardenne Canon à particules électriques permettant l'émission pulsée de particules d'énergie déterminée
US5493116A (en) * 1993-10-26 1996-02-20 Metrologix, Inc. Detection system for precision measurements and high resolution inspection of high aspect ratio structures using particle beam devices

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB714613A (en) * 1951-01-31 1954-09-01 Sueddeutsche Laboratorien Gmbh Improvements in drilling by electrons
EP0344646A2 (en) * 1988-06-01 1989-12-06 IMS Ionen Mikrofabrikations Systeme Gesellschaft m.b.H. Ion beam lithography introduction
WO1991006393A1 (fr) * 1989-11-01 1991-05-16 Vladimir Omarovich Tokarev Dispositif de protection contre les depots se formant sur la cathode d'un pistolet de soudage par bombardement electronique et surles parois d'une enceinte a vide
WO1998016946A2 (en) * 1996-10-17 1998-04-23 Etec Systems, Inc. Conical baffle for reducing charging drift in a particle beam system

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110536535A (zh) * 2019-07-12 2019-12-03 西安交通大学 一种用于高能粒子加速器的束屏
CN110536535B (zh) * 2019-07-12 2020-06-19 西安交通大学 一种用于高能粒子加速器的束屏
US20230005699A1 (en) * 2020-03-09 2023-01-05 Asml Netherlands B.V. Aperture body, flood column and charged particle tool

Also Published As

Publication number Publication date
EP1121704A1 (en) 2001-08-08
JP4568431B2 (ja) 2010-10-27
GB9820205D0 (en) 1998-11-11
EP1121704B1 (en) 2006-06-21
JP2002525800A (ja) 2002-08-13
DE69932067D1 (de) 2006-08-03
DE69932067T2 (de) 2007-01-11
WO2000016370A1 (en) 2000-03-23

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Legal Events

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WAP Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1)