GB2338825A9 - An electron gun - Google Patents

An electron gun

Info

Publication number
GB2338825A9
GB2338825A9 GB9914729A GB9914729A GB2338825A9 GB 2338825 A9 GB2338825 A9 GB 2338825A9 GB 9914729 A GB9914729 A GB 9914729A GB 9914729 A GB9914729 A GB 9914729A GB 2338825 A9 GB2338825 A9 GB 2338825A9
Authority
GB
United Kingdom
Prior art keywords
electron gun
gun
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
GB9914729A
Other versions
GB9914729D0 (en
GB2338825B (en
GB2338825A (en
Inventor
Kazuhiko Tabuse
Masao Watanabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Advantest Corp
Original Assignee
Advantest Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advantest Corp filed Critical Advantest Corp
Publication of GB9914729D0 publication Critical patent/GB9914729D0/en
Publication of GB2338825A publication Critical patent/GB2338825A/en
Publication of GB2338825A9 publication Critical patent/GB2338825A9/en
Application granted granted Critical
Publication of GB2338825B publication Critical patent/GB2338825B/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/13—Solid thermionic cathodes
    • H01J1/14—Solid thermionic cathodes characterised by the material
    • H01J1/148—Solid thermionic cathodes characterised by the material with compounds having metallic conductive properties, e.g. lanthanum boride, as an emissive material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/065—Construction of guns or parts thereof

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Solid Thermionic Cathode (AREA)
  • Electron Sources, Ion Sources (AREA)
GB9914729A 1998-06-24 1999-06-23 Method for extending life of an electron gun Expired - Fee Related GB2338825B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17745098A JP2000011853A (en) 1998-06-24 1998-06-24 Electron gun, its service life extending method and electronic apparatus

Publications (4)

Publication Number Publication Date
GB9914729D0 GB9914729D0 (en) 1999-08-25
GB2338825A GB2338825A (en) 1999-12-29
GB2338825A9 true GB2338825A9 (en) 2000-07-04
GB2338825B GB2338825B (en) 2001-03-28

Family

ID=16031168

Family Applications (1)

Application Number Title Priority Date Filing Date
GB9914729A Expired - Fee Related GB2338825B (en) 1998-06-24 1999-06-23 Method for extending life of an electron gun

Country Status (3)

Country Link
JP (1) JP2000011853A (en)
DE (1) DE19929096A1 (en)
GB (1) GB2338825B (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2389450A (en) * 2001-10-30 2003-12-10 York Electron Optics Ltd Electron source
US9984846B2 (en) * 2016-06-30 2018-05-29 Kla-Tencor Corporation High brightness boron-containing electron beam emitters for use in a vacuum environment
CN117929906B (en) * 2024-03-25 2024-06-04 天津蓝孚高能物理技术有限公司 Test system of grid-control electron gun for irradiation accelerator

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5242591B2 (en) * 1972-12-08 1977-10-25
CH672860A5 (en) * 1986-09-29 1989-12-29 Balzers Hochvakuum

Also Published As

Publication number Publication date
GB9914729D0 (en) 1999-08-25
JP2000011853A (en) 2000-01-14
DE19929096A1 (en) 2000-01-27
GB2338825B (en) 2001-03-28
GB2338825A (en) 1999-12-29

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20030623