GB2338106A - A contact of a semiconductor device - Google Patents

A contact of a semiconductor device Download PDF

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Publication number
GB2338106A
GB2338106A GB9909489A GB9909489A GB2338106A GB 2338106 A GB2338106 A GB 2338106A GB 9909489 A GB9909489 A GB 9909489A GB 9909489 A GB9909489 A GB 9909489A GB 2338106 A GB2338106 A GB 2338106A
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GB
United Kingdom
Prior art keywords
contact
forming
conductive layer
contact hole
insulation film
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Granted
Application number
GB9909489A
Other versions
GB2338106B (en
GB9909489D0 (en
Inventor
In-Kwon Jeong
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Samsung Electronics Co Ltd
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Samsung Electronics Co Ltd
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Filing date
Publication date
Priority to KR19980020363A priority Critical patent/KR100272673B1/en
Application filed by Samsung Electronics Co Ltd filed Critical Samsung Electronics Co Ltd
Publication of GB9909489D0 publication Critical patent/GB9909489D0/en
Publication of GB2338106A publication Critical patent/GB2338106A/en
Application granted granted Critical
Publication of GB2338106B publication Critical patent/GB2338106B/en
Anticipated expiration legal-status Critical
Application status is Expired - Lifetime legal-status Critical

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Classifications

    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/768Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
    • H01L21/76838Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/48Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/482Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of lead-in layers inseparably applied to the semiconductor body
    • H01L23/485Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of lead-in layers inseparably applied to the semiconductor body consisting of layered constructions comprising conductive layers and insulating layers, e.g. planar contacts
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Abstract

A method for fabricating a contact of a semiconductor memory device, such as a DRAM cell capacitor, comprises the steps of forming a contact hole 103 in an interlayer insulation film 102 until a portion of a semiconductor substrate 100 is exposed; forming a contact plug 104 which is connected to the semiconductor substrate 100 at the bottom of the contact hole 103 and whose upper surface is lower than that of the interlayer insulation film 102; forming a first conductive layer 105 on the interlayer insulation film 102 and contact hole 103 so as to connect electrically to the contact plug 104; forming a second conductive layer 108 on the first conductive layer 105 after the contact hole 103 is filled up with a material layer 106 to form a plug 106a, or a contact spacer (206a, fig 7E) is formed on the first conductive layer of both side-walls of the contact hole; and sequentially etching the second and first conductive layers 105, 108 by using a contact electrode formation mask to form a contact electrode, thereby preventing severe necking (fig 3) of storage node despite misalignment thereof. Thus, collapse of the storage node is prevented.

Description

2338106 MWTHOD FOR FABRICATING A CONTACT OF A SEIMCONDUCTOR DEVICE The

present invention relates to a method for fabricating a semiconductor device, and more particularly to a method for fabricating a contact of a semiconductor memory device.

Fig. 1A to Fig. IB sequentially illustrate processes of a method for fabricating a conventional storage node of a semiconductor memory device.

A conventional method for fabricating a storage node of a DRAM (dynamic random access memory) cell capacitor follows the steps, as shown in Fig. 1A. An interlayer insulation fihn 2 is formed on a semiconductor substrate 1. The interlayer insulation film 2 is etched until an upper surface of a portion of the semiconductor substrate 1 is exposed, so that a contact hole 3, that is, a storage node contact hole 3 is formed. A conductive layer 4 for forming a storage node, for example, a polysilicon layer is formed on the interlayer insulation fihn 2 so as to fill up the contact hole 3.

When the polysilicon layer 4 is patterned by using a storage node formation mask, as shown in Fig. 1 B, a storage node 4a is formed. In this case, Fig. 2 is a plan projection view showing the storage node 4a to be correctly aligned to the contact hole 3.

If a misaligrunent between a storage node 4b and contact hole 3 is generated in a storage node patteming process, as shown in Fig. 3, necking (reference numeral 5) that a neck of the storage node 4b is narrowed is generated by an overetch process which is conventionally performed during a dry etch process for patterning a storage node.

Fig. 4 is a plan projection view of Fig. 3, herein a reference numeral 5 is a connecting section between the storage node 4b and contact hole 3. If the necking is severe, the storage node 4b is fallen down.

-I- The present invention was made in view of the above problem, and it is therefore an object of the invention to provide a method for fabricating a contact of a semiconductor memory device to prevent severe necking of a storage node despite a misalignment thereof It is another object of the invention to provide a method for fabricating a contact of a semiconductor memory device to prevent falling-down of a storage node.

In accordance with these objects of this invention, the method includes the steps of forming an interlayer insulation film on a semiconductor substrate; selectively etching the interlayer insulation film until a portion of the semiconductor substrate is exposed, thereby forming a contact hole therein; forming a contact plug in the contact hole, herein the contact plug connecting to the semiconductor substrate and having an upper surface relatively lower than that of the interlayer insulation film; forming a first conductive layer on the interlayer insulation film so as to connect electrically to the contact plug along with a topology of the contact hole; filling up the contact hole with a material layer; forming a second conductive layer on the first conductive layer including the material layer; and sequentially etching the second and first conductive layers by using a contact electrode formation mask, thereby forming a contact electrode.

In accordance with these objects of this invention, the method includes the steps of forming an interlayer insulation film on a semiconductor substrate; etching the interlayer insulation film until a portion of the semiconductor substrate is exposed, thereby forming a contact hole therein; forming a contact plug in the contact hole, herein the contact plug connecting to the semiconductor substrate and having an upper surface relatively lower than that of the interlayer insulation film; forming a first conductive layer on the interlayer insulation film so as to connect electrically to the contact plug along with a topology of the contact hole; forming a contact spacer on the first conductive layer of both side-walls of the contact hole; forming a second conductive layer on the first conductive layer to fill up the contact hole; and sequentially etching the second and first conductive layers by using a contact electrode formation mask, thereby forming a contact electrode.

Referring to Fig. 5E and Fig. 7E, after formation of a recessed contact plug, a conductive layer which is electrically connected to a contact plug is formed on an interlayer insulation film along with a topology of a contact hole after formation of a recessed contact plug. A contact hole is filled up with a material layer or a contact spacer is formed on a conductive layer of both side-walls of a contact hole by the material layer. Then, the materia layer is made of a material having an etch selectivity with respect to the conductive layer and a conductive layer for forming a following storage node. According to the present invention, severe necking of a storage node is prevented despite a misalignment thereof. Consequently, falling-down of a storage node is prevented.

The above objects and advantages of the present invention will become more apparent by describing in detail a preferred embodiment thereof with reference to the attached drawings. in which:

Fig.1A to Fig. IB are cross-sectional views showing sequentially processes of a method for fabricating a prior semiconductor memory device; Fig. 2 is a plan projection view of Fig. IB; Fig. 3 is a cross-sectional view showing a prior misaligned storage node; Fig. 4 is a plan projection view of Fig. 3; Fig. 5A to 5E are cross-sectional views showing sequentially processes of a novel method for fabricating a semiconductor memory device according to the first embodiment of the present invention; Fig. 6 is a plan projection view of Fig. 5E; Fig. 7A to Fig. 7E are cross-sectional views showing sequentially processes of a novel method for fabricating a semiconductor memory device according to the second embodiment of the present invention; Fig. 8 is a plan projection view of Fig. 7E; Fig. 9 is a cross-sectional view showing a misaligned storage node according to the second embodiment; and Fig. 10 is a plan projection view of Fig. 9.

(First Embodiment) Now, the present invention will be described in greater detail. in conjunction with a preferred or exemplary embodiment by reference to accompanying drawings.

Fig. 5A to 5E sequentially illustrate processes of a novel method for fabricating a semiconductor memory device according to the first embodiment of the present invention.

Referring to Fig. 5A, an interlayer insulation film 102 is formed on a semiconductor substrate 100. The interlayer insulation film 102 is etched by using a photoresist pattern (not shown) formed thereon as a mask. As a result, a contact hole 103, that is, storage node contact hole 103 is formed to exposed an upper surface of a portion of the semiconductor substrate 100, for example, a portion of an impurity region (not shown). A recessed contact plug 104 is formed to fill up a portion of the contact hole 103. The recessed contact plug 104 has a recess depth (t) in the range of 1 OOA to 5,OOOA.

The recessed contact plug 104 is formed by processes as follows. After a conductive layer is formed on the interlayer insulation filin 102 to fill the contact hole 103, the conductive layer is planarly etched by means of an etch back process. The conductive layer is overetched, so that an upper surface level of the contact plug 104 is relatively lower than that of the interlayer insulation film 102, that is, the recessed contact plug 104 has the recess depth (t). Consequently, the recessed contact plug 104 is formed.

Or, after a conductive layer is formed on the interlayer insulation film 102 to fill the contact hole 103, the conductive layer is planarly etched by means of a CW (chemical mechanical polishing) process until an upper surface of the interlayer insulation film 102 is exposed. Further, a portion of the conductive layer in the contact hole 103 is etched by means of either a wet etch process or dry etch process, thereby forming the recessed contact plug 104.

The conductive layer for forming the recessed contact plug 104 is made of one selected from a group consisting of silicon (polysilicon), Ti, TiN, W, WN, AI, Cu, Pt, Au, Ag, and combination thereof.

Referring to Fig. 5B, a conductive layer 105 such as a capping layer which is electrically connected to the recessed contact plug 104 is formed on the interlayer insulation film 102 along with a topology of the contact hole 103. The conductive layer 105 is made of one selected from a group consisting of silicon (polysilicon), Ti, TiN, W, WN, AI, Cu, Pt, Au, Ag, and combination thereof. The conductive layer 105 has a thickness range of 100A to 3,oooA.

Referring to Fig. 5C, a material layer 106 is formed on the conductive layer 105 to fill up the contact hole 103. The material layer 106 is made of a material having an etch selectivity with respect to the conductive layer 105 and a storage electrode material formed by a following process as well as is made of either a conductive material or insulating material.

The material layer 106 such as a silicon oxide layer is made of one selected from a group consisting of BPSG, PSQS'02, and Fox (flowable oxide). In addition, the material layer 106 may be made of one selected from a group consisting of SPO, Si- 0-N, SPN, AI-0, APN, B-N, Ti-N, W-Si, and W-N.

Referring to Fig. 5D, the material layer 106 is planarly etched to be isolated by means of, for example, an etch back process until an upper surface of the conductive layer 105 on both sides of the contact hole 103 is exposed. As a result, a material layer plug 106a, for example, silicon oxide layer plug is formed. A conductive layer 108 for forming a storage node is formed on the conductive layer 105 including the material layer plug 106a.

The conductive layer 108 is made of one selected from a group consisting of silicon (polysilicon), Ti, TiN, W,)XN, AI, Cu, Pt, Au, Ag, and combination thereof Herein, both the recessed contact plug 104 and conductive layers 105, 108 are preferably made of polysilicon and the material layer plug 106a is made of silicon oxide.

As shown in Fig. 5E, the conductive layer 108 is patterned by a conventional photolithography process, thereby forming a storage node 110 such as a lower electrode of a DRAM (dynan-dc random access memory) cell capacitor. Herein, it shows a storage node to be misaligned to the contact hole 103. Since the material plug 106a has an etch selectivity with respect to the conductive layers 105, 108, although the misalignment degree is similar to that of a prior storage node 4b as shown in Fig. 3, the prior severe necking is not generated. Fig. 6 is a plan projection view of Fig. 5E.

Referring to Fig. 6, although a storage node 110 is misaligned to the contact hole 103, it is supported by the conductive layer 105 and material layer plug 106a. A reference numeral 111 is a connecting section between the storage node 110 and contact hole 103.

Considering a connecting area between the storage node 110 and contact hole 10 3, a radius of the material layer plug 106a is controlled to obtain misalignment margin and contact resistance therebetween. This is possible by controlling a thickness ofthe conductive layer 105 formed before deposition of the material layer 106.

(Second Embodiment) Now, the present invention will be described in greater detail in conjunction with a preferred or exemplary embodiment by reference to accompanying drawings. Fig. 7A to Fig. 7E sequentially illustrate processes of a method for fabricating of a semiconductor memory device according to the second embodiment ofthe present invention. 20 Referring to Fig. 7A, an interlayer insulation film 202 is formed on a semiconductor substrate 200. The interlayer insulation film 202 is etched by using a photoresist pattern (not shown) formed thereon as a mask. As a result, a contact hole 203, that is, storage node contact hole 203 is formed to exposed an upper surface of a portion of the semiconductor substrate 200, for example, a portion of an impurity region (not shown). A recessed contact 25 plug 204 is formed to fill up a portion of the contact hole 203. As the first embodiment, a conductive layer which is formed to fill the contact hole 203 is overetched by means of an etch back process or further etched by means of either a wet etch process or dry etch process after planarization-etch thereof by means of a CW (chemical mechanical polishing) process, thereby forming the recessed contact plug 204. The recessed contact plug 204 has a recess depth (t) in the range of 1 OOA to 5,oooA.

The conductive layer for forming the recessed contact plug 204 is made of one selected from a group consisting of silicon (polysilicon), Ti, TiN, W, WN, AI, Cu, Pt, Au, 5 Ag, and combination thereof Referring to Fig. 7B, a conductive layer 205 such as a capping layer which is electrically connected to the recessed contact plug 204 is formed on the interlayer insulation film 202 along with a topology of the contact hole 203. The conductive layer 205 has a thickness range of 1 OOA to 3,OOOA and is formed of one selected from a group consisting 10 of silicon (polysilicon), Ti, TiN, W, WN, AI, Cu, Pt, Au, Ag, and combination thereof.

Referring to Fig. 7C, a material layer 206 having an etch selectivity with respect to the conductive layer 205 is formed thereon along with a topology of the contact hole 203. The material layer 206 is made of either a conductive material or insulating material having an etch selectivity with respect to a material for forming a following storage node.

The material layer 206 such as a silicon oxide layer is made of one selected from a group consisting of BPSG, PSG, S'02, and Fox (flowable oxide). In addition, the material layer may be made of one selected from a group consisting of SPO, Si-0-N, SPN, AI-0, AP N, B-N, Ti-N, W-Si, and W-N.

As shown in Fig. 7D, the material layer 206 is etched by means of an etch back process, so that a contact spacer 206, for example, a silicon oxide spacer is formed. A conductive layer 208 for forming a storage node is formed on the conductive layer 205 so as to fill up the contact hole 203.

The conductive layer 208 is made of one selected from a group consisting of silicon (polysilicon), Ti, EN, W, WN, AI, Cu, Pt, Au, Ag, and combination thereof Herein, both the recessed contact plug 204 and conductive layers 205, 208 is preferably formed of polysilicon and the contact spacer 206a is made of silicon oxide.

As shown in Fig. 7E, the conductive layer 208 is patterned by a conventional photolithography process, thereby forming a storage node 2 10 such as a lower electrode of a DRAM (dynamic random access memory) cell capacitor. Herein, it shows a storage node 2 10 to be misaligned to the contact hole 203. Since the contact spacer 206a has an etch selectivity with respect to the conductive layers 205, 208, the prior severe necking is not generated.

Fig. 8 is a plan projection view of Fig. 7E.

Referring to Fig. 8, although a little necking may be generated outside the contact spacer 206a, the contact spacer 206a perfectly maintains connection of the storage node 210 therein and contact hole 203 (reference numeral 211).

As shown in Fig. 9, if misalignment of the storage node 2 10 and contact hole 203 is severe during formation of a conductive layer pattern 208b, as shown in Fig. 10, the necking may be also generated inside contact spacer 206a. Accordingly, the storage node 2 10 and contact hole 203 are directly connected not inside but a portion of outside the contact spacer 206a (reference numeral 213).

A thickness and radius of the contact spacer 206a, should be properly controlled to prevent this case. The radius of the contact spacer 206a is controlled by controlling a thickness of the conductive layer 205 and the thickness thereof is controlled by controlling a thickness of the material layer 206.

A portion of a contact hole is filled with a material having an etch selectivity with respect to a storage node or a contact spacer is formed of the material, thereby preventing severe necking of storage node despite misalignment thereof Thus, falling-down of the storage node is prevented.

Although embodiments of the present invention have been described and illustrated in detail, it is to be clearly understood that the same is by way of illustration and example only and is not to be taken by way of limitation, the scope of the present invention being determined instead by the terms of the appended claims.

Claims (17)

CLAIMS:
1. A method for fabricating a contact of a semiconductor memory device, comprising the steps of.. forming an interlayer insulation film on a semiconductor substrate; selectively etching said interlayer insulation film until a portion of said semiconductor substrate is exposed, thereby forming a contact hole therein; forming a contact plug in said contact hole, wherein said contact plug connecting to said semiconductor substrate and having an upper surface relatively lower than that of said interlayer insulation film; forming a first conductive layer on said interlayer insulation film so as to connect electrically to said contact plug along with a topology of said contact hole; filling up said contact hole with a material layer; forming a second conductive layer on said first conductive layer including said material layer; and sequentially etching said second and first conductive layers by using a contact electrode formation mask, thereby forming a contact electrode.
2. A method according to claim 1, wherein the step of forming said contact plug comprises the steps of. forming a conductive layer on said interlayer insulation film to fill said contact hole; and overetch.
etching back said conductive layer to form a recessed contact plug by means of
3. A method according to claim 2, wherein said recessed contact plug has a recess depth in the range of i ooA to 5,oooA.
4.
comprises the steps of..
A method according to claim 1, wherein the step of forming contact plug forming a conductive layer on said interlayer insulation film to flu said contact hole; planarization-etching said conductive layer by means ofa CW (chemical mechanical polishing) process until said upper surface of said interlayer insulation film is exposed; and etching a portion of said conductive layer by means of either a dry or wet etch process, thereby forming a recessed contact plug.
5. A method according to claim 4, wherein said recessed contact plug has a 10 recess depth in the range of 1 OOA to 5,OOOA.
6. A method according to claim 1, wherein said conductive layer has a thickness range of 1 OOA to 3,OOOA.
7. A method according to claim 1, wherein said material layer is made of either a conductive layer or an insulating layer which has an etch selectivity with respect to said first and second conductive layers.
8. A method according to claim 7, wherein said insulating layer is made of 20 silicon oxide.
9. Amethod according to claim 7, wherein said insulating layer is made of one selected from a group consisting of BPSG, PSG, S'021 and Fox (flowable oxide).
10. A method according to claim 1, wherein said material layer is made of one selected from a group consisting of SPO, Si-0-N, SPN, APO, APN, B-N, Ti-N, W-Si, and W-N.
11. A method according to claim 1, wherein said contact plug, first conductive layer, and second conductive layer are respectively made of one selected from a group consisting of silicon (polysilicon), Ti, TiN, W, )XN, AI, Cu, Pt, Au, Ag, and combination thereof.
12. A method for fabricating a contact of a semiconductor memory device, comprising the steps of forming an interlayer insulation film on a semiconductor substrate; etching said interlayer insulation film until a portion of said semiconductor substrate is exposed, thereby forming a contact hole therein; forming a contact plug in said contact hole, wherein said contact plug connecting to said semiconductor substrate and having an upper surface relatively lower than that of said interlayer insulation film; forming a first conductive layer on said interlayer insulaion fibn so as to connect electrically to said contact plug along with a topology of said contact hole; forming a contact spacer on said first conductive layer of both side- walls of said contact hole; forming a second conductive layer on said first conductive layer to fill up said contact hole; and sequentially etching said second and first conductive layers by using a contact electrode formation mask, thereby forming a contact electrode.
13. A method according to claim 12, wherein said contact spacer is made of either a conductive material or an insulating material which has an etch selectivity with respect to said first and second conductive layers.
14. A method according to claim 14, wherein said insulating material is made of silicon oxide.
15. A method according to claim 13, wherein said insulating material is made of one selected from a group consisting of BPSG, PSG, Si02, and flowable oxide.
16. Amethod according to claim 12, wherein said contact spacer is made of one selected from a group consisting of SPO, Si-0-N, SPN, AI-0, APN, B-N, Ti- N, W-Si, and W-N.
17. A method of fabricating a contact of a semiconductor memory devict substantially as hereinbefore described with reference to Figures 5A to 6, or Figures 7A to 10 of the accompanying drawings.
GB9909489A 1998-06-02 1999-04-23 Method for fabricating a contact of a semiconductor device Expired - Lifetime GB2338106B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR19980020363A KR100272673B1 (en) 1998-06-02 1998-06-02 Method for fabricating a semiconductor memory device

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GB9909489D0 GB9909489D0 (en) 1999-06-23
GB2338106A true GB2338106A (en) 1999-12-08
GB2338106B GB2338106B (en) 2000-08-02

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US (1) US6323558B1 (en)
JP (1) JP4057745B2 (en)
KR (1) KR100272673B1 (en)
CN (1) CN1107969C (en)
DE (1) DE19924651B4 (en)
GB (1) GB2338106B (en)
TW (1) TW404012B (en)

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JP2005032769A (en) * 2003-07-07 2005-02-03 Seiko Epson Corp Method of forming multilayer wiring, method of manufacturing wiring board, and method of manufacturing device
KR100654353B1 (en) 2005-06-28 2006-11-29 삼성전자주식회사 Semiconductor integrated circuit device having capacitor and fabrication method thereof
WO2007026429A1 (en) * 2005-08-31 2007-03-08 Fujitsu Limited Semiconductor device and fabrication method thereof
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KR100929643B1 (en) * 2008-03-07 2009-12-03 주식회사 하이닉스반도체 A semiconductor device and a method of producing
JP2011223031A (en) * 2011-07-08 2011-11-04 Fujitsu Semiconductor Ltd Method of manufacturing semiconductor device
CN102446836A (en) * 2011-09-29 2012-05-09 上海华力微电子有限公司 Damascus process with metal protection layer on copper interconnection wire

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Also Published As

Publication number Publication date
GB2338106B (en) 2000-08-02
TW404012B (en) 2000-09-01
US6323558B1 (en) 2001-11-27
DE19924651B4 (en) 2007-03-01
JP2000031421A (en) 2000-01-28
GB9909489D0 (en) 1999-06-23
KR100272673B1 (en) 2000-11-15
CN1107969C (en) 2003-05-07
DE19924651A1 (en) 1999-12-16
CN1237782A (en) 1999-12-08
JP4057745B2 (en) 2008-03-05
KR20000000633A (en) 2000-01-15

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Expiry date: 20190422