GB2272897B - Improved photoresist composition and method of preparation - Google Patents

Improved photoresist composition and method of preparation

Info

Publication number
GB2272897B
GB2272897B GB9221096A GB9221096A GB2272897B GB 2272897 B GB2272897 B GB 2272897B GB 9221096 A GB9221096 A GB 9221096A GB 9221096 A GB9221096 A GB 9221096A GB 2272897 B GB2272897 B GB 2272897B
Authority
GB
United Kingdom
Prior art keywords
preparation
photoresist composition
improved photoresist
improved
composition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB9221096A
Other versions
GB9221096D0 (en
GB2272897A (en
Inventor
Sambasivan Venkat
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Research Development Corp UK
Original Assignee
National Research Development Corp UK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by National Research Development Corp UK filed Critical National Research Development Corp UK
Priority to GB9221096A priority Critical patent/GB2272897B/en
Publication of GB9221096D0 publication Critical patent/GB9221096D0/en
Priority to DE4240193A priority patent/DE4240193C2/en
Publication of GB2272897A publication Critical patent/GB2272897A/en
Application granted granted Critical
Publication of GB2272897B publication Critical patent/GB2272897B/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
    • C07C247/00—Compounds containing azido groups
    • C07C247/16—Compounds containing azido groups with azido groups bound to carbon atoms of six-membered aromatic rings of a carbon skeleton
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/008—Azides

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Nitrogen Condensed Heterocyclic Rings (AREA)
GB9221096A 1992-10-07 1992-10-07 Improved photoresist composition and method of preparation Expired - Fee Related GB2272897B (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
GB9221096A GB2272897B (en) 1992-10-07 1992-10-07 Improved photoresist composition and method of preparation
DE4240193A DE4240193C2 (en) 1992-10-07 1992-11-30 Photoresist compositions based on dihalo-dimethyl-monoazido-mononitro-benzenes and process for their preparation

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB9221096A GB2272897B (en) 1992-10-07 1992-10-07 Improved photoresist composition and method of preparation
DE4240193A DE4240193C2 (en) 1992-10-07 1992-11-30 Photoresist compositions based on dihalo-dimethyl-monoazido-mononitro-benzenes and process for their preparation

Publications (3)

Publication Number Publication Date
GB9221096D0 GB9221096D0 (en) 1992-11-18
GB2272897A GB2272897A (en) 1994-06-01
GB2272897B true GB2272897B (en) 1996-06-26

Family

ID=25920847

Family Applications (1)

Application Number Title Priority Date Filing Date
GB9221096A Expired - Fee Related GB2272897B (en) 1992-10-07 1992-10-07 Improved photoresist composition and method of preparation

Country Status (2)

Country Link
DE (1) DE4240193C2 (en)
GB (1) GB2272897B (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA2106231A1 (en) * 1993-09-15 1995-03-16 Sambasivan Venkat Eswaran Negative photoresist and a process therefor
CN103012195B (en) * 2012-12-03 2015-04-22 浙江工业大学 Preparation method of aryl azide compound

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
Chemical Abstracts 110 (23): 212239z and Synth. Commun., 18(15), 1807-20 *
Chemical Abstracts 111 (15): 133699s and Indian J. Chem., Sect.B, 27B (9), 830-1. *

Also Published As

Publication number Publication date
GB9221096D0 (en) 1992-11-18
DE4240193A1 (en) 1994-06-01
DE4240193C2 (en) 2003-11-13
GB2272897A (en) 1994-06-01

Similar Documents

Publication Publication Date Title
HU9401580D0 (en) Method for the preparation and popification of alphia - interferon
GB9422571D0 (en) Haemorrihoidal compositions and method of use
AU2578892A (en) Mouthrinse and method of preparation
IL103772A0 (en) Bloodbag and method of making same
PH31270A (en) Superplasticizer-concrete composition and method of preparation.
EP0558032A3 (en) Water repellent powder and method of preparation
GB9014307D0 (en) Method of treatment and compositions therefor
ZA9210101B (en) Solid matal-carbon matrix of metallofullerites and method of forming same
ZA9410004B (en) Aminosulphonyl-phenyl-1h-pyrrole derivatives method of their preparation and their use
EP0510382A3 (en) Method of preparation of alpha-omega-aminoalcohols
PL301204A1 (en) Method of obtaining avermectines and invermectines
GB9224295D0 (en) Method and composition
GB2272897B (en) Improved photoresist composition and method of preparation
GB9200519D0 (en) Composition of matter
ZA944577B (en) Preparation of aminopropionitriles
PL303822A1 (en) Therapeutic compositions containing ipsapyrone and method of obtaining them
GB2275266A8 (en) Preparation of 2-methyl-3-aminobenzotrifluoride
EP0564212A3 (en) Process for the preparation of arylethylamines and substituted arylethylamines
LTIP164A (en) Composition of extract
EP0553954A3 (en) Preparation of tetramethyldiamino-polyoxyethylenes
EP0564213A3 (en) Process for the preparation of arylethylamines and substituted arylethylamines
BG96295A (en) Composition of sulphosene soap and method for its preparation
CS29090A2 (en) //5-substituted-4-oxo-4h-pyran-2-yl/methyl-chloroacetates and method of their preparation
CS9000069A2 (en) 3-azidomethyl-4-hydroxyphenylalkylketones and method of their preparation
BG96610A (en) Tonic agent and method for its preparation

Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20031007