GB2255229B - Semiconductor cavity device with electric lead - Google Patents

Semiconductor cavity device with electric lead

Info

Publication number
GB2255229B
GB2255229B GB9212939A GB9212939A GB2255229B GB 2255229 B GB2255229 B GB 2255229B GB 9212939 A GB9212939 A GB 9212939A GB 9212939 A GB9212939 A GB 9212939A GB 2255229 B GB2255229 B GB 2255229B
Authority
GB
United Kingdom
Prior art keywords
electric lead
cavity device
semiconductor cavity
semiconductor
lead
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB9212939A
Other versions
GB2255229A (en
GB9212939D0 (en
Inventor
Tony William James Rogers
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BTG International Ltd
Original Assignee
British Technology Group Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from GB898929276A external-priority patent/GB8929276D0/en
Priority claimed from GB898929307A external-priority patent/GB8929307D0/en
Priority claimed from PCT/GB1990/002035 external-priority patent/WO1991010120A2/en
Application filed by British Technology Group Ltd filed Critical British Technology Group Ltd
Priority to GB9212939A priority Critical patent/GB2255229B/en
Publication of GB9212939D0 publication Critical patent/GB9212939D0/en
Publication of GB2255229A publication Critical patent/GB2255229A/en
Application granted granted Critical
Publication of GB2255229B publication Critical patent/GB2255229B/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0073—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Wire Bonding (AREA)
GB9212939A 1989-12-28 1992-06-18 Semiconductor cavity device with electric lead Expired - Fee Related GB2255229B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB9212939A GB2255229B (en) 1989-12-28 1992-06-18 Semiconductor cavity device with electric lead

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
GB898929276A GB8929276D0 (en) 1989-12-28 1989-12-28 Semiconductor cavity device with electric lead
GB898929307A GB8929307D0 (en) 1989-12-29 1989-12-29 Semiconductor cavity device with electric lead
PCT/GB1990/002035 WO1991010120A2 (en) 1989-12-28 1990-12-28 Semiconductor cavity device with electric lead
GB9212939A GB2255229B (en) 1989-12-28 1992-06-18 Semiconductor cavity device with electric lead

Publications (3)

Publication Number Publication Date
GB9212939D0 GB9212939D0 (en) 1992-08-26
GB2255229A GB2255229A (en) 1992-10-28
GB2255229B true GB2255229B (en) 1993-11-17

Family

ID=27264871

Family Applications (1)

Application Number Title Priority Date Filing Date
GB9212939A Expired - Fee Related GB2255229B (en) 1989-12-28 1992-06-18 Semiconductor cavity device with electric lead

Country Status (1)

Country Link
GB (1) GB2255229B (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0156757A2 (en) * 1984-03-12 1985-10-02 United Technologies Corporation Capacitive pressure sensor with low parasitic capacitance
EP0302654A2 (en) * 1987-08-06 1989-02-08 United Technologies Corporation Method of sealing an electrical feedthrough in a semiconductor device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0156757A2 (en) * 1984-03-12 1985-10-02 United Technologies Corporation Capacitive pressure sensor with low parasitic capacitance
EP0302654A2 (en) * 1987-08-06 1989-02-08 United Technologies Corporation Method of sealing an electrical feedthrough in a semiconductor device

Also Published As

Publication number Publication date
GB2255229A (en) 1992-10-28
GB9212939D0 (en) 1992-08-26

Similar Documents

Publication Publication Date Title
GB2228150B (en) Electrical connection device
AR242692A1 (en) Electrical device
GB8816632D0 (en) Electrical device
GB8712181D0 (en) Electrical device
EP0282025A3 (en) Semiconductor device with fuse function
GB2239097B (en) Electrical power measuring devices
GB2238166B (en) Semiconductor device with pre-charge circuit
GB8711810D0 (en) Electric device
GB8624637D0 (en) Electrical device
EP0342971A3 (en) Electric device
EP0283588A3 (en) Controllable power semiconductor device
IL91868A0 (en) Encapsulated electric or electronic device
SG61992G (en) Mounted electrical devices
EP0431586A3 (en) High-power semiconductor device
GB8715143D0 (en) Electric device
EP0408272A3 (en) Bonding electrical conductors
EP0284941A3 (en) Electrical position indication device
GB2255229B (en) Semiconductor cavity device with electric lead
GB8929307D0 (en) Semiconductor cavity device with electric lead
GB8929276D0 (en) Semiconductor cavity device with electric lead
GB8829161D0 (en) Semiconductor device manufacture
GB8919943D0 (en) Electrical device
GB8908219D0 (en) Semiconductor device manufacture
GB8604399D0 (en) Electrical connection device
EP0344719A3 (en) Electric circuit device

Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 19941228