GB2250341A - Dispalcement sensor using the reflected image of a raster structure and a scanning grating - Google Patents
Dispalcement sensor using the reflected image of a raster structure and a scanning grating Download PDFInfo
- Publication number
- GB2250341A GB2250341A GB9123748A GB9123748A GB2250341A GB 2250341 A GB2250341 A GB 2250341A GB 9123748 A GB9123748 A GB 9123748A GB 9123748 A GB9123748 A GB 9123748A GB 2250341 A GB2250341 A GB 2250341A
- Authority
- GB
- United Kingdom
- Prior art keywords
- objective
- raster structure
- carrier element
- carrier
- reflecting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 230000003287 optical effect Effects 0.000 claims description 25
- 238000006073 displacement reaction Methods 0.000 claims description 20
- 230000004907 flux Effects 0.000 claims description 4
- 230000001419 dependent effect Effects 0.000 claims description 2
- 238000005259 measurement Methods 0.000 description 28
- 238000003384 imaging method Methods 0.000 description 10
- 238000010276 construction Methods 0.000 description 3
- 230000008020 evaporation Effects 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 101100509494 Mus musculus Jkamp gene Proteins 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
- G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
- G01D5/34715—Scale reading or illumination devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
- G01B11/005—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines
- G01B11/007—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines feeler heads therefor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Optical Transform (AREA)
Description
- 1 22503'fl Device for Measuring changes in relative position The present
invention relates to an opti-electronic device for measuring changes in relative position.
To be understood as changes in position are translational displacements in one or more co-ordinate directions as well as tilting about one or more axes. Opti-electronic devices for the measurement of displacement in incremental units are known as step transmitters. Devices for the measurement of angles of tilt are known as autocollimation telescopes.
The basic construction of an incremental step transmitter for the measurement of length is described in, for example, the manual G. Schr6der, Technische Optik, 6th addition (1987), pages 171 and 172. A light source by way of a condensor illuminates a grating scale which is connected with a feeler pin,the displacement of which is to be measured. A stationary scanning plate, which contains a reference grating graduation, is arranged behind the grating -scale in the direction of light. On displacement of the grating scale, the light flux behind the reference grating is modulated and the modulation is detected by a photoelectric receiver.
The reference grating is divided into four individual gratings with graduation periods displaced in phase relative to each other for the recognition of direction and obtaining a push-pull signal. A photoelectric receiver is associated with each reference grating. The grating scale and the scanning plate must be displaced parallelly relative to each other at the smallest possible spacing. The grating graduation directions must be oriented separately to each other, which imposes appreciable demands on the construction, assembly and adjustment of the system.
In addition, it is known from DE-PS 1 217 637 to image a partial region of a scale grating onto another partial region of the same scale grating. The image of the first partial region moves in opposite sense to the scale grating itself. Although adjustment is simpler in this arrangement, it is not possible to produce phasedisplaced signals in the scanning field. Through the use of cross gratings in place of line gratings, it is posible to construct step transmitters of that kind for two-dimensional measurements.
Autocollimation telescopes with a geometrically separate beam path for imaging of a measurement mark onto a reference mark in the telescope eyepiece are also described in the manual G. Schr6der, loc.
cit., pages 140 et seq. The illuminated measurement mark lies in the focal plane of the telescope objective and- is imaged by this to infinity. After reflection at a planar mirror, the image of the measurement mark is produced in the plane of the reference mark. In place of visual observation of the deviation of the measurement mark image from the reference, it is known from, for example, EP 0 253 247 A2 to form the reference mark as a light-sensitive line sensor and to ascertain the position of the measurement mark image photo electrically. The accuracy of the measurement is determined by the number and size of the sensor elements.
There remains a need for a measuring device which may permit one-dimensional and/or multi-dimensional highly resolving measurements measurement of changes in position with great accuracy and which may have a compact construction, the optical and electronic components of the device preferably being relatively insensitive with respect to assembly and adjustment. 5 According to the present invention there is provided an optielectronic device for measuring changes in relative position, the device comprising a transparent planar carrier element provided in a common plane with an at least one-dimensional raster structure and a scanning grating associated with the raster structure, illuminating means for illuminating the raster structure, an objective for forming an image from the illuminated raster structure and so arranged that the plane of the raster structure is perpendicular to the optical axis of the objective and spaced from the objective by an amount equal to the focal length thereof, a planar reflecting element for reflecting the image back to the carrier element, one of the elements being so displaceable relative to the other element as to cause the reflected image to move in the raster structure plane and in a direction perpendicular to the direction of the at least one dimension of the raster structure thereby to produce a modulated light flux at the scanning grating, and photoelectric means responsive to the modulation to provide a signal dependent on the displacement of said one element. In one preferred embodiment a reflecting surface of the reflecting element is stationarily oriented perpendicularly to the optical axis of the objective and the position of the carrier element is displaceable in its plane relative to the optical axis of the objective and perpendicularly to the raster structure device.
Alternatively, the carrier element is stationary and the reflecting element is inclinable relative to the optical axis of the objective about an axis parallel to the raster structure device.
In yet another embodiment the device comprises a deflecting mirror arranged between the objective and the reflecting element to deflect the beam path therebetween through 90, a further such illuminating -means, carrier element with raster structure and scanning grating and photoelectric means arranged in the deflected part of the beam path, and a further such reflecting element arranged in the beam path between the objective and the first-mentioned illuminating means to reflect back to the further carrier element an image formed from the illuminated raster structure thereof, wherein the reflecting element associated with each illuminating means, carrier element and photoelectric means group is provided by a reflecting surface at that side of the raster structure of the carrier element of the respective other group which is remote from the illuminating means of that other group, and said one element in each group is the carrier element, the carrier elements being 20 displaceable independently of each other in their respective planes relative to the optical axis of the objective.
A significant feature is the arrangement of the raster structure representing a scale grating and a reference structure forming the scanning grating beside one other on the same carrier element or 25 plate. Additionally, the photoelectric receiving means associated with the scanning grating can be mounted on the carrier element. The raster structure and the scanning grating can be applied to the carrier plate with high precision and simultaneously by evaporation or photolithography. The mutual orientation of the scale and reference structures is thereby fixed immovably.
The adjustment of the optical components of the arrangement is free of problems, since merely the spacing of the carrier plate from the imaging objective is significant. Neither the arrangement of the illuminating means nor the orientation of the reflecting element or mirror perpendicularly to the optical axis of the objective is critical to the accuracy of measurement.
For use of the device as a position transmitter for a lengthmeasuring system, the mirror must be immovably retained in its position. The relative displacement between the image of the scale grating and the scanning grating can be produced by displacement of the carrier plate in its plane as well as through displacement of the objective in its principal plane. Both components can therefore be selectably coupled with the object which is to be displaced and the displacement of which is to be measured.
For the use of the device as an autocollimation telescope for measurement of angles of tilt, the carrier plate and the objective must be mounted to be immovable relative to each other. The tilting of the mirror then produces the relative displacement, which is required for the measurement, between the image of the scale grating and the scanning grating. The mirror in this case is therefore coupled with the object which is to be inclined and the inclination of which relative to the optical axis of the objective is to be measured. It is, however, clear from this that the adjustment of the mirror in the length-measuring system influences only the measurement range and not the measurement accuracy.
The measurement range of the device is limited by the opening of the imaging objective and the mutual position of the scale grating and of the scanning grating on the carrier plate. The measurement range lies in the centimetre range, which is quite adequate for use as a position transmitter in a scanning head of a co-ordinate measurement machine.
Embodiments of the present invention will now be more particularly described, by way of example, with reference to the accompanying drawings, in which:
Fig. I is a schematic view of a measuring device for measuring linear changes in position; Fig. 2 is a view of a carrier plate with scale grating and scanning gratings for two-dimensional measurements, in a modification of the device of Fig. 1; Fig. 4 Fig. 3 is a schematic view of a measuring device for measuring changes in position in three co-ordinate directions; and is a schematic view of a device for measuring changes in angle of tilt.
Referring now to the drawings, there is shown in Fig. 1 a measuring device comprising illuminating equipment 10 with a lamp 11 and a condensor 12. Arranged after the condensor is a carrier plate 13 in the form of a parallelly planar glass plate, to which a onedimensional raster structure 14 has been applied by evaporation. The direction of the raster is perpendicular to the plane of the drawing and covers about two thirds of the surface of the plate 13. A scanning grating 15, the structure direction of which is similarly perpendicular to the plane of the drawing, is provided adjacent to the raster structure. The scanning grating 15 is covered by a photoelectric receiver 16, which is connected with a counter 17.
An imaging objective 18 is arranged at the spacing of its focal width f behind the plane of the raster structures 14 and 15 in the direction of the light beam from the Jamp 11. A planar mirror 19, which is substantially perpendicular to the optical axis 20 of the objective 18, is provided behind the objective 18.
The illuminating equipment 10, the objective 18 and the mirror 19 are arranged on a common frame 21. The carrier plate 13 is connected with a pin which is mounted to be displaceable in a guide 23 in the plane of the drawing and perpendicularly to the optical axi s 20. The pin can be, for example, a feeler or can be coupled to an object which is to be displaced and the displacement of which is to be measured.
The region of the raster structure 14 above the optical axis 20 is imaged, according to geometric optical rules by way of the objective 18 and is reflected by the mirror 19 back into the plane of the raster structure 14, namely in point symmetry to the intersection of the optical axis 20 with the plane of the raster structure 14. If the raster structure 14 moves, then its image moves in opposite direction and at twice the speed. The image of the raster structure 14 in that case runs across the scanning grating 15 and thereby produces a modulated light flux which is converted in the photoelectric receiver 16 into electrical signals which are processed in the counter 17 into an indication proportional to displacement. If the scanning grating comprises four phase-displaced scanning fields, a push-pull signal processing and recognition of direction of the displacement are possible.
The raster structure 14 can also be constructed as a cross grating 24 for measurements in two co -ordinate directions x and y, as is illustrated in Fig. 2. Individual scanning gratings 25 and 26 are respectively associated with the two co-ordinate directions. The scanning gratings with four phase-displaced grating fields are additionally shown to enlarged scale. That surface 27 of the carrier plate 13' which is covered neither by the cross grating 24 nor by the scanning gratings 25 and 26 can be provided with a mirror coating.
This is particularly advantageous if the raster structure 24 is reflective on its side remote from the illuminating equipment.
The size of the carrier plates 13 and 13', the areal coverage by the raster structure 14 or 24 and the location of the scanning grating 15 or gratings 25 and 26 are so selected that, subject to consideration of the imaging properties of the system in point symmetry to the point of intersection of the optical axis 20, a displacement range results which is matched to the desired measurement range and in which there exists a partial region of the raster structure 14 or 24 which can be imaged onto the associated scanning grating.
Fig 3 shows a device for measurement of displacement of a feeler 28 in three co-ordinate directions x, y and z. The pl ane of the drawing contains the x and z directions and a direction perpendicular thereto represents the y direction. The device includes components already described in connection with Figs 1 and 2, and components having the same function are provided with the same reference numerals.
The illuminating equipment 10 and the imaging objective 18 are fastened to a frame 21. Also arranged at the frame 21 are a deflecting mirror 29 and a second illuminating equipment 30. The deflecting mirror 29 deflects the optical axis 20 of the objective 18 through 90'.
A carrier plate 131 with a cross grating 24 and scanning gratings 25 and 26 according to Fig 2 is associated with the illuminating equipment 10, and a carrier plate 13 with a raster structure 14, and a scanning grating 15 according to Fig 1 is associated with the illuminating equipment 30. The carrier plate 13 is connected with the pin 22, which is fastened to be displaceable in z direction by way of a spring parallellogram guide 31 at the frame 21. A feeler 28 is coupled with the pin 22.
The carrier plate 131 is fastened in fixed location to a base carrier 32, at which in turn the frame 21 is suspended by way of a spring parallellogram guide 33 and 34 deflectable in the x and y directions. In a modification of the device the objective 18 and thereby its optical axis 20 in the x-y plane is displaceable relative to the raster structure on the carrier plate 131. All raster structures, and the surfaces not covered by a scanning grating, in the same plane of the carrier plates 13 and 13' are arranged to be reflective on the side remote from the associated illuminating equipment 10 or 30. These reflective surfaces are spaced from the objective 18 by an amount equal to its focal width and have the function o f the planar mirror 19 in the respective other measuring system. The raster structure of the carrier plate 131 is reflected at the reflective side of the carrier plate 13 and the raster structure of the carrier plate 13 is reflected at the reflective side of the carrier plate 13'. The displacement of the carrier plate 13 in the z direction obviously does not influence the imaging of the cross grating 24. Equally, the imaging of the raster structure 14 is not disturbed by the relative displacement of the carrier plate 13'.
In order to ensure equal imaging conditions of the objective 18 towards both sides, it is advantageous if this consists of two optically identical system parts arranged symmetrically relative to each other.
Three-dimensional ly measuring devices hitherto required two decoupled measuring systems respectively for the x-y direction and the z direction. They were usually constructed as completely separate systems. The afore-described embodiment of the present invention combines both such measuring systems into a single system, with only one imaging objective. The single important adjustment of the spacing between the objective and the carrier plates can 0 nevertheless be undertaken independently for each system at the spring parallellogram guides, which are mechanically straightforward.
The device of Fig. 1 is shown in modified form in Fig. 4 and for measurement of angles of tilt. The illuminating equipment 10, the carrier plate 13 and the objective 18 are arranged to be stationary relative to each other at the frame 21, which here is illustrated as a housing. The planar mirror 19 is detached therefrom and can be fastened at a desired distance along the optical axis 20 at a further object (not shown), the tilt of whichshall be measured relative to the optical axis 20. The elements fastened to the frame 21 form a photoelectrically measuring autocollimation telescope.
As already mentioned, the image of the raster structure 14 wanders across the scanning grating 15 on tilting of the mirror 19. The travel s of the image displacement for small angles is directly proportional to the tilting Y of the mirror 19 and the focal length f of the objectite 18, namely s = f.2Y. In the case of f = 60 millimetres and raster structures 14 and 15 with a grating constant of 8 micrometres, an angle of tilt 13.75" corresponds to one signal period.
If a cross grating 24 with scanning gratings 25 and 26, illustrated in Fig. 2, are used as raster structures, then a photoelectric measurement of the angles of tilt in two mutually orthogonal directions is possible. The measurement range is restricted only by the opening of the objective 18 and the extent of the raster structure. It is readily possible to design the measurement range for some degrees of angle in each direction.
Claims (15)
1. An opti-electronic device for measuring changes in relative position, the device comprising a transparent planar carrier element provided in a common- plane with an at least one-dimensional raster structure and a scanning grating associated with the raster 5 structure, illuminating means for illuminating the raster structure, an objective for forming an image from the illuminated raster structure and so arranged that the plane of the raster structure is perpendicular to the optical axis of the objective and spaced from the objective by an amount equal to the focal length thereof, a planar reflecting element for reflecting the image back to the carrier element, one of the elements being so displaceable relative to the other element as to cause the reflected image to move in the raster structure plane and in a direction perpendicular to the direction of the at least one dimension of the raster structure 15 thereby to produce a modulated light flux at the scanning grating, and photoelectric means responsive to the modulation to provide a signal dependent on the displacement of said one element.
2. A device as claimed in claim 1, wherein the raster structure is twodimensional and said one element is so displaceable relative to the other element as to cause the reflected image to move in said plane selectively in directions respectively perpendicular to the directions of the dimensions of the structure.
3. A device as claimed in claim 1, wherein the scanning grating comprises four phase-displaced grating fields and the photoelectric means comprises photoelectric receivers respectively associated with the fields and arranged to provide a rotating field signal
4. A device as claimed in any one of claims 1 to 3, wherein said one element is the carrier element and said other element is the reflecting element, the reflecting element having a reflecting surface fixedly oriented perpendicularly to said optical axis and the carrier element being displaceable in its plane relative to said optical axis and in a direction perpendicular to that of said at least one dimension.
5. A device as claimed in any one of claims 1 to 3, wherein said one element is the reflecting element and said other element is the carrier element, the carrier element being disposed in a fixed position and the reflecting element being angularly displaceable relative to said optical axis and about an axis parallel to the direction of said one dimension.
6. A device as claimed in any one of claims 1 to 4, comprising a deflecting mirror arranged between the objective and the reflecting element to deflect the beam path therebetween through 90', a further such illuminating means, carrier element with raster structure and scanning grating, and photoelectric means arranged in the deflected part of the beam path, and a further such reflecting element arranged in the beam path between the objective and the first-mentioned illuminating means to reflect back to the further carrier element an image formed from the illuminated raster structure thereof, wherein the reflecting element associated with each illuminating means, carrier element and photoelectric means group is provided by a reflecting surface at that side of the raster structure of the carrier element of the respective other group which is remote from the illuminating means of that other group and said one element in each group is the carrier element, the carrier elements being displaceable independently of each other in their respective planes relative to the optical axis of the objective.
7. Device as claimed in claim 6, wherein the objective comprises two optically identical optical elements arranged symmetrically with respect to each other.
8. Device as cl aimed in cl aim 6 or cl aim 7, wherein the illuminating means of each group, the objective and the deflecting mirror are arranged on common frame means which is connected by way of first resiliently biassed parallelogram guide means to a base member, one of the carrier elements being fixedly mounted on the base member and the other carrier element being mounted on the frame means by way of second resiliently biassed parallelogram guide means.
m;
9. A device as claimed in claim 8, wherein the first parallelogram guide means is arranged to permit displacement of the frame means relative to the base member in each of two mutually perpendicular co ordinate directions and the raster structure of the carrier element fixedly mounted on the base member is two-dimensional.
10. A device substantially as hereinbefore described with reference to Fig. 1 of the accompanying drawings.
11. A device as claimed in claim 10 and modified substantially as hereinbefore described with reference to Fig. 2 of the accompanying 10 drawings.
13. A device substantially as hereinbefore described with reference to Fig. 3 of the accompanying drawings.
13. A device substantially as hereinbefore described with reference to Fig. 4 of the accompanying drawings.
14. A scanning head for a co-ordinate measuring machine, the head comprising a device as claimed in any one of the preceding claims.
15. An autocollimation telescope comprising a device as claimed in any one of the preceding claims, the device being arranged to measure angles of tilt.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19904035948 DE4035948A1 (en) | 1990-11-09 | 1990-11-09 | MEASUREMENT OF POSITION CHANGES |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| GB9123748D0 GB9123748D0 (en) | 1992-01-02 |
| GB2250341A true GB2250341A (en) | 1992-06-03 |
Family
ID=6418100
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB9123748A Withdrawn GB2250341A (en) | 1990-11-09 | 1991-11-08 | Dispalcement sensor using the reflected image of a raster structure and a scanning grating |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JPH04268412A (en) |
| DE (1) | DE4035948A1 (en) |
| GB (1) | GB2250341A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103697924A (en) * | 2013-12-16 | 2014-04-02 | 中国科学院长春光学精密机械与物理研究所 | Positioning device of absolute type grating ruler photoelectric receiving device |
| CN104827349A (en) * | 2015-05-21 | 2015-08-12 | 遵义市节庆机电有限责任公司 | Machine tool position detecting device |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4206544A1 (en) * | 1992-03-02 | 1993-09-09 | Lpkf Cad Cam Systeme In Thueri | Two-coordinate distance measurement system - has photoelectric incremental sensor arrangement with opaque scanning plates and window pair groups with line rasters |
| FR3061286B1 (en) * | 2016-12-22 | 2019-05-17 | Universite De Nantes | RELATIVE POSITIONING SYSTEM OF TWO EQUIPMENTS, METHOD OF MEASUREMENT AND ASSOCIATED DEVICES |
| CN109991082B (en) * | 2019-03-28 | 2024-03-08 | 武汉东湖学院 | Young modulus measuring device |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1006698A (en) * | 1962-01-19 | 1965-10-06 | Razdow Lab Inc | Improvements in or relating to an optical system and an apparatus for measuring displacements |
| US4695720A (en) * | 1984-12-05 | 1987-09-22 | EMR Elektronische Messund Regelgerate Gesellschaft m.b.H. | Optoelectronic incremental measuring system with adjustable LED positioning |
| GB2194044A (en) * | 1986-08-15 | 1988-02-24 | Mitutoyo Mfg Co Ltd | Optical type displacement detecting device |
-
1990
- 1990-11-09 DE DE19904035948 patent/DE4035948A1/en not_active Withdrawn
-
1991
- 1991-11-08 GB GB9123748A patent/GB2250341A/en not_active Withdrawn
- 1991-11-08 JP JP29287191A patent/JPH04268412A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1006698A (en) * | 1962-01-19 | 1965-10-06 | Razdow Lab Inc | Improvements in or relating to an optical system and an apparatus for measuring displacements |
| US4695720A (en) * | 1984-12-05 | 1987-09-22 | EMR Elektronische Messund Regelgerate Gesellschaft m.b.H. | Optoelectronic incremental measuring system with adjustable LED positioning |
| GB2194044A (en) * | 1986-08-15 | 1988-02-24 | Mitutoyo Mfg Co Ltd | Optical type displacement detecting device |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103697924A (en) * | 2013-12-16 | 2014-04-02 | 中国科学院长春光学精密机械与物理研究所 | Positioning device of absolute type grating ruler photoelectric receiving device |
| CN103697924B (en) * | 2013-12-16 | 2016-01-13 | 中国科学院长春光学精密机械与物理研究所 | A kind of locating device of absolute grating scale photoelectric receiving device |
| CN104827349A (en) * | 2015-05-21 | 2015-08-12 | 遵义市节庆机电有限责任公司 | Machine tool position detecting device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH04268412A (en) | 1992-09-24 |
| GB9123748D0 (en) | 1992-01-02 |
| DE4035948A1 (en) | 1992-05-14 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| WAP | Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1) |