GB2243486B - Semiconductor device and manufacturing method thereof - Google Patents

Semiconductor device and manufacturing method thereof

Info

Publication number
GB2243486B
GB2243486B GB9108434A GB9108434A GB2243486B GB 2243486 B GB2243486 B GB 2243486B GB 9108434 A GB9108434 A GB 9108434A GB 9108434 A GB9108434 A GB 9108434A GB 2243486 B GB2243486 B GB 2243486B
Authority
GB
United Kingdom
Prior art keywords
manufacturing
semiconductor device
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB9108434A
Other versions
GB9108434D0 (en
GB2243486A (en
Inventor
Ikeda Tatsuhiko
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Publication of GB9108434D0 publication Critical patent/GB9108434D0/en
Publication of GB2243486A publication Critical patent/GB2243486A/en
Application granted granted Critical
Publication of GB2243486B publication Critical patent/GB2243486B/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
    • H01L27/04Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body
    • H01L27/08Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including only semiconductor components of a single kind
    • H01L27/082Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including only semiconductor components of a single kind including bipolar components only
    • H01L27/0823Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including only semiconductor components of a single kind including bipolar components only including vertical bipolar transistors only
    • H01L27/0826Combination of vertical complementary transistors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/77Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
    • H01L21/78Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
    • H01L21/82Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
    • H01L21/822Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
    • H01L21/8222Bipolar technology
GB9108434A 1990-04-26 1991-04-19 Semiconductor device and manufacturing method thereof Expired - Fee Related GB2243486B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11110290 1990-04-26

Publications (3)

Publication Number Publication Date
GB9108434D0 GB9108434D0 (en) 1991-06-05
GB2243486A GB2243486A (en) 1991-10-30
GB2243486B true GB2243486B (en) 1994-08-03

Family

ID=14552448

Family Applications (1)

Application Number Title Priority Date Filing Date
GB9108434A Expired - Fee Related GB2243486B (en) 1990-04-26 1991-04-19 Semiconductor device and manufacturing method thereof

Country Status (2)

Country Link
JP (1) JP2660360B2 (en)
GB (1) GB2243486B (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5670394A (en) * 1994-10-03 1997-09-23 United Technologies Corporation Method of making bipolar transistor having amorphous silicon contact as emitter diffusion source
US5641691A (en) * 1995-04-03 1997-06-24 The United States Of America As Represented By The Secretary Of The Navy Method for fabricating complementary vertical bipolar junction transistors in silicon-on-sapphire
FR2807567A1 (en) * 2000-04-10 2001-10-12 St Microelectronics Sa METHOD FOR PRODUCING A BIPOLAR TRANSISTOR
JP2003017577A (en) * 2001-07-04 2003-01-17 Denso Corp Semiconductor device
JP3976601B2 (en) * 2002-03-28 2007-09-19 株式会社ルネサステクノロジ Manufacturing method of semiconductor device
GB0811391D0 (en) 2008-06-23 2008-07-30 Rolls Royce Plc A rotor blade

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0301468A2 (en) * 1987-07-29 1989-02-01 Fairchild Semiconductor Corporation Process for fabricating complementary contactless vertical bipolar transistors

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0301468A2 (en) * 1987-07-29 1989-02-01 Fairchild Semiconductor Corporation Process for fabricating complementary contactless vertical bipolar transistors

Also Published As

Publication number Publication date
GB9108434D0 (en) 1991-06-05
JPH04355958A (en) 1992-12-09
JP2660360B2 (en) 1997-10-08
GB2243486A (en) 1991-10-30

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Legal Events

Date Code Title Description
746 Register noted 'licences of right' (sect. 46/1977)

Effective date: 19951107

PCNP Patent ceased through non-payment of renewal fee

Effective date: 20070419