GB2191601A - Alignment of arrays of optical waveguides - Google Patents
Alignment of arrays of optical waveguides Download PDFInfo
- Publication number
- GB2191601A GB2191601A GB08614286A GB8614286A GB2191601A GB 2191601 A GB2191601 A GB 2191601A GB 08614286 A GB08614286 A GB 08614286A GB 8614286 A GB8614286 A GB 8614286A GB 2191601 A GB2191601 A GB 2191601A
- Authority
- GB
- United Kingdom
- Prior art keywords
- array
- ofthe
- waveguides
- grooves
- fibres
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/36—Mechanical coupling means
- G02B6/38—Mechanical coupling means having fibre to fibre mating means
- G02B6/3801—Permanent connections, i.e. wherein fibres are kept aligned by mechanical means
- G02B6/3803—Adjustment or alignment devices for alignment prior to splicing
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
- G02B6/2804—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals forming multipart couplers without wavelength selective elements, e.g. "T" couplers, star couplers
- G02B6/2821—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals forming multipart couplers without wavelength selective elements, e.g. "T" couplers, star couplers using lateral coupling between contiguous fibres to split or combine optical signals
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/30—Optical coupling means for use between fibre and thin-film device
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/36—Mechanical coupling means
- G02B6/3628—Mechanical coupling means for mounting fibres to supporting carriers
- G02B6/3648—Supporting carriers of a microbench type, i.e. with micromachined additional mechanical structures
- G02B6/3652—Supporting carriers of a microbench type, i.e. with micromachined additional mechanical structures the additional structures being prepositioning mounting areas, allowing only movement in one dimension, e.g. grooves, trenches or vias in the microbench surface, i.e. self aligning supporting carriers
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/36—Mechanical coupling means
- G02B6/3628—Mechanical coupling means for mounting fibres to supporting carriers
- G02B6/3684—Mechanical coupling means for mounting fibres to supporting carriers characterised by the manufacturing process of surface profiling of the supporting carrier
- G02B6/3688—Mechanical coupling means for mounting fibres to supporting carriers characterised by the manufacturing process of surface profiling of the supporting carrier using laser ablation
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/36—Mechanical coupling means
- G02B6/3628—Mechanical coupling means for mounting fibres to supporting carriers
- G02B6/3684—Mechanical coupling means for mounting fibres to supporting carriers characterised by the manufacturing process of surface profiling of the supporting carrier
- G02B6/3692—Mechanical coupling means for mounting fibres to supporting carriers characterised by the manufacturing process of surface profiling of the supporting carrier with surface micromachining involving etching, e.g. wet or dry etching steps
Abstract
An array of optical fibres (4 Figure 2) is aligned with an array of optical waveguides, e.g. in an integrated optical device 1, each fibre being placed e.g. along a V-groove 6 in a silicon wafer 5, and channels 11 etched into the substrate 2 of the integrated optical device 1 co-operating with the peaks 10 of the V-grooves 6 to enable the fibres to be aligned with the waveguides. <IMAGE>
Description
SPECIFICATION
Alignment apparatus
This invention relates to apparatus for aligning a first array of optical waveguides with a second array of optical waveguides.
It is particularly suitable for use in the manufacture of integrated optical circuits when it is necessary to achieve precise and stable alignment between a plurality of optical waveguides in the form of optical fibres, and a plurality of optical waveguides in an integrated optical device, that is, a device which is fabricated as an assembly of optical elements in a single structure.
It is well knowntoetch a number of spaced apart, parallel, V-shaped grooves into a wafer such as silicon, and then to place an optical fibre along each groove. The fibre may be held in place between the groove, and either a complementary groove in a second silicon wafer or a flat surface by using an adhesive. Thus the lateral spacing of a plurality of fibres may be determined by fixing each fibre in one of a numberof parallel grooves in the silicon wafer.
The end of the optical array so formed is ground and polished so that the ends of the fibres, the end face of the silicon wafer, and the end face of the second wafer orthe flat surface, will all lie in one plane.
When it is desired to form an optical interface between the plurality of fibres, and a plurality of waveguides in an integrated optical device, the end ofthe optical array is caused to abut with the end face of the integrated optical device. The lateral spacing of the optical fibres which is determined by the frequ ency of the grooves, corresponds to the lateral spac- ing ofthewaveguides in the integrated optical device. The optical array must then be aligned in the two degrees offreedom normal to the axes of the fibres, that is, the height and lateral translation must be aligned. This is done by causing lightofaknown intensity to travel along a fibre and a respective waveguide.The intensity of the light being emitted from the waveguide is measured using a sensor, and the intensity of this emitted light is maximised by moving the optical array with respect to the integrated optical device in the two degrees offreedom.
This procedure is known as active alignment.
In another known method of aligning an array of fibres with a pluralityofwaveguides in an integrated optical device, the end face of the silicon wafer does not lie in the same plane as the ends of the fibres and end face of the second wafer or flat surface, but instead, it extends beyond that plane. The portion of the wafer which extends beyond the ends ofthe fibres and end face of the second wafer orflat surface, is caused to overlap the integrated optical device when the ends of the fibres abut with the end face ofthe integrated optical device and so fixes the height ofthe fibres relative to the integrated optical device. Thus the height of the fibres relative to the waveguides in the integrated optical device is determined by the dimensions of the V grooves. The lat eral translation of the array of fibres is then actively aligned.
A problem with these known methods ofaligning an array of fibres with a plurality of waveguides, is
that it is necessary to use active alignment methods for at least part of the alignment procedure. Active
alignment methods are labour intensive, and time
consuming and often expensive. They do not lend themselves to automation.
The invention seeks to provide an improved align ment apparatusfor aligning a first array of optical waveguides with a second array of optical waveguides.
According to this invention, there is provided apparatus for passively aligning a first array of opti cal waveguides with a second array of optical waveguides comprising first means for carrying a first array and second means for carrying the second array, part of which first means is capable of overlapping the second means, its lateral position relative to the second means being passively determined by physical characteristics of the seond means such that, when in position, the first array is aligned with the second array.
The first array of optical waveguides may be an array of optical fibres and therefore, this invention allows an array of optical fibres to be aligned with a plurality of waveguides in an integrated optical device, without any active alignment methods being necessary.
Preferably the part of the first means which iscap- able of overlapping the second means is a rigid body having grooves extending along the length of one surface thereof, which grooves continue along the whole length ofthe surface ofthe first means.
The grooves may be V-shaped orthey may be approximately V-shaped, having flattened peaks, and preferably they are parallel to each other.
Preferably, the physical characteristics of the second means are shallow parallel channels extending along the length of one surface thereof.
The frequency ofthe grooves ofthefirst means is such thatthe peaksoftwo or more grooves mayeach be located in a channel ofthe second means.
The height of the optical fibres relative to a surface ofthefirst means is determined by the dimensions of each groove, and the lateral spacing of the optical array, which is determined by the frequency ofthe grooves, is arranged to be the same as the lateral spacing of the waveguides.
Thus the grooves are used to determine the lateral spacing of the fibres, and their height relative to a surface ofthe first means, and the co-operation of the grooves with the channels results in the alignmentofthe lateral translation oftheoptical array and of the height ofthe optical array relative to the waveguides.
One way in which the invention may be performed will now be described by way of example, with refer ence to the accompanying drawings in which:
Figure lisa perspective view of an apparatus made in accordance with the invention,
Figure2 is a transverse cross-section along X-X of
Figure land
Figure 3 is a longitudinal cross-section along Y-Y of Figure 1.
Referring to the drawings, an integrated optical device 1 comprises a substrate 2 of lithium niobate and optical waveguides 3formed by diffusing titanium into the lithium niobate. Optical fibres 4 are held in position between a silicon wafer 5, which has been etched to form V grooves 6, and a flat backing plate 7 made from glass. The space around each fibre 4is filled with a compound 8 such as wax or solder, which may be softened. The end face of the resulting assembly 9 formed from the wafer 5, fibres 4, backing plate 7 and compound 8 is optically polished. The assembly 9 is then heated on a jig to soften the compound 8, and the silicon wafer 5 is moved forwards a distance of approximately 1 mm. The assembly9 may then be secured with a high temperature epoxy resin.
Shallow channels 11 are formed photolithographically in the integrated optical device 1, and are etched into the substrate 2. The channels 11 are approximately 1-2lm deep, and the exact profile of each channel is unimportant, although the base should be substantially flat. The peaks 10 are located in the channels 11, and the assembly 9 is held in position such that the ends ofthe fibres 4 and the end of the backing plate 7 abut with the end of the integrated optical device 1. Contact may be maintained between the assembly 9 and device 1 by the application of a compressive force and so no adhesive is required to hold the assembly 9 and device 1, together. It is therefore possible to insert a refractive indexmatching material 13 between the fibre ends and the waveguide ends.
The frequency and position of the peaks 10 and the channels 11 are such that when the peaks 10 are located in the channels 1 1,thefibres3 are aiigned with the waveguides 2. Alignment of the height of the fibres is achieved by etching the grooves 5 to the correct dimensions such that when the peaks 10 are located in the channels 11,the position of maximum intensity, known as the mode centre 12 of each fibre 3 corresponds with the mode centre of the respective waveguide 2 in orderto achieve maximum transmission. The height ofthefibres may be further adjusted by altering the depth ofthe channels 11.
in an alternative embodiment, the space around each fibre 4, is not filled with compound 8, and the assembly 9 is held together by compressive forces.
The wafer 5 is caused to move forward by momentarily releasing the forces, allowing the wafer 5 to move, resulting in wafer 5 extending beyond the ends ofthe fibres and the end face of plate 7.
The channels 11 in the integrated optical device may, instead of being formed by etching, be formed by depositing a dielectric or metallic material on the substrate 12, in such awaythatthe area not covered by the material takes the form of channels.
Also, the height of the fibres relative to the waveguides may be altered by depositing a dielectric or metallic material on to the peaks 10, thus effectively making the grooves deeper.
The apparatus is particularly suitable for use with polarisation-holding fibres which are substantially "D" shaped. The fibres may be positioned such that the flat side of each fibre is in contact with the backing plate. The fibres will then all be oriented in the same direction.
Although the specific embodiment describes a situation where a connection is being formed between a plurality of optical fibres, and a plurality of waveguides, the apparatus may also be used to form connections between a first array of optical fibres and a second array of optical fibres.
Claims (10)
1. Apparatus for passively aligning a first array of optical waveguides with a second array of optical waveguides comprising first means for carrying the first array and second means for carrying the second array, part of which first means is capable of overlapping the second means, its lateral position relative to the second means being passively determined by physical characteristics of the second means such that, when in position, the first array is aligned with the second array.
2. Apparatus according to claim 1 in which the first array of optical waveguides is an array of optical fibres.
3. Apparatus according to claim 1 or 2 in which the second array of optical waveguides is an array of waveguides in an integrated optical device.
4. Apparatus according to claim 1,2 or 3 in which the part of the first means which is capable of overlapping the second means, is a rigid body having grooves extending along the length of one surface thereof.
5. Apparatus according to claim 4 in which the grooves continue along the whole length ofthe surface ofthe first means.
6. Apparatus according to any of the preceding claims in which the physical characteristics ofthe second means are channels extending along the length of one surface thereof.
7. Apparatus according to any ofthe preceding claims in which the frequency of the grooves in the rigid body, is such that the peaks oftwo or more grooves may each be located in a channel ofthe second means.
8. Apparatus according to claims 5, 6 or7 in which each fibre in the array of optical fibres is placed along a groove.
9. Apparatus according to claim 8 in which the lateral spacing ofthefibres is determined bythefre quency ofthe grooves; their height relative to a surface ofthe first means is determined by the dim ensionsofthegrooves; and the alignment ofthe lateral translation of the fibres relative the waveguides in the integrated optical device and of the height of the optical fibres relative to the waveguides re sults from the co-operation of the grooves with the channels.
10. Apparatus substantially as described with re ference to the accompanying drawings and substantially as illustrated therein.
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB08614286A GB2191601A (en) | 1986-06-12 | 1986-06-12 | Alignment of arrays of optical waveguides |
| GB8713829A GB2195785B (en) | 1986-06-12 | 1987-06-12 | Alignment of optical fibres with integrated optical device |
| GB8914729A GB2219414B (en) | 1986-06-12 | 1989-06-27 | Clamping optical fibre having a flat in its cross-section |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB08614286A GB2191601A (en) | 1986-06-12 | 1986-06-12 | Alignment of arrays of optical waveguides |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| GB8614286D0 GB8614286D0 (en) | 1986-07-16 |
| GB2191601A true GB2191601A (en) | 1987-12-16 |
Family
ID=10599339
Family Applications (3)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB08614286A Withdrawn GB2191601A (en) | 1986-06-12 | 1986-06-12 | Alignment of arrays of optical waveguides |
| GB8713829A Expired - Fee Related GB2195785B (en) | 1986-06-12 | 1987-06-12 | Alignment of optical fibres with integrated optical device |
| GB8914729A Expired - Fee Related GB2219414B (en) | 1986-06-12 | 1989-06-27 | Clamping optical fibre having a flat in its cross-section |
Family Applications After (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB8713829A Expired - Fee Related GB2195785B (en) | 1986-06-12 | 1987-06-12 | Alignment of optical fibres with integrated optical device |
| GB8914729A Expired - Fee Related GB2219414B (en) | 1986-06-12 | 1989-06-27 | Clamping optical fibre having a flat in its cross-section |
Country Status (1)
| Country | Link |
|---|---|
| GB (3) | GB2191601A (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4930854A (en) * | 1989-03-03 | 1990-06-05 | The United States Of America As Represented By The Secretary Of The Navy | Optical fiber-to-channel waveguide coupler |
| EP0611142A1 (en) * | 1993-02-12 | 1994-08-17 | Ngk Insulators, Ltd. | A process for optically joining an optical fiber array to an opponent member |
| US5656120A (en) * | 1994-07-28 | 1997-08-12 | Ngk Insulators, Ltd. | Method of fixing optical fiber array to substrate |
| US5835659A (en) * | 1995-02-21 | 1998-11-10 | Ngk Insulators, Ltd. | Optical fiber-fixing substrate, method of producing the same and optical device |
| US6027253A (en) * | 1995-08-24 | 2000-02-22 | Ngk Insulators, Ltd. | Optical fiber array |
| US6633706B2 (en) * | 2000-06-29 | 2003-10-14 | Phoco Co., Ltd. | Method for aligning optical fibers with a waveguide element |
| US6819841B2 (en) * | 2002-08-29 | 2004-11-16 | International Business Machines Corporation | Self-aligned optical waveguide to optical fiber connection system |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CH685521A5 (en) * | 1991-09-10 | 1995-07-31 | Suisse Electronique Microtech | A method for coupling at least one optical fiber with an integrated optical waveguide and micromechanical device of coupling obtained. |
| GB2293248B (en) * | 1994-09-07 | 1998-02-18 | Northern Telecom Ltd | Providing optical coupling between optical components |
| IT1271318B (en) * | 1994-12-23 | 1997-05-27 | Italtel Spa | SYSTEM FOR COUPLING A WAVE GUIDE OPTICAL CONNECTOR |
| US5659647A (en) * | 1995-10-30 | 1997-08-19 | Sandia Corporation | Fiber alignment apparatus and method |
| DE19644758A1 (en) * | 1996-10-29 | 1998-04-30 | Sel Alcatel Ag | Centering arrangement for positioning micro-structured bodies |
| KR19980066890A (en) * | 1997-01-29 | 1998-10-15 | 김광호 | Optical waveguide and optical fiber coupling device and method |
| DE10058074A1 (en) * | 2000-11-23 | 2002-06-06 | Vitalij Lissotschenko | Method for producing a micro-optical functional unit |
| US6628865B2 (en) * | 2000-12-15 | 2003-09-30 | Intel Corporation | Alignment of optical fibers to an etched array waveguide |
| US6886989B2 (en) | 2000-12-15 | 2005-05-03 | Intel Corporation | Alignment of fiber optic bundle to array waveguide using pins |
| GB2379748B (en) * | 2001-06-22 | 2003-09-10 | Bookham Technology Plc | An optical chip with an optically conductive element |
| GB2385678A (en) * | 2002-02-20 | 2003-08-27 | Bookham Technology Plc | Mthod of joining optical components using adhesive |
| US11886013B2 (en) | 2019-06-17 | 2024-01-30 | Aayuna Inc. | Passively-aligned fiber array to waveguide configuration |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1452474A (en) * | 1974-06-21 | 1976-10-13 | Northern Electric Co | Optical fibre connectors |
| GB1524874A (en) * | 1974-12-23 | 1978-09-13 | Western Electric Co | Optical fibre waveguides |
| GB1526649A (en) * | 1976-07-20 | 1978-09-27 | Brugg Ag Kabelwerke | Method for connecting optical fibres and the connector for effecting the method |
| US4123137A (en) * | 1975-04-24 | 1978-10-31 | Bell Telephone Laboratories, Incorporated | Optical fiber arrangement for splicing fibers secured to ribbonlike tape |
| GB2000877A (en) * | 1977-06-21 | 1979-01-17 | Nippon Telegraph & Telephone | Polymer optical circuit with optical leadfibres and method of fabricating the same |
| GB2007867A (en) * | 1977-11-04 | 1979-05-23 | Thomas & Betts Corp | Fibre optic connectors |
| US4201444A (en) * | 1976-04-26 | 1980-05-06 | International Telephone And Telegraph Corporation | Single optical fiber connector |
| GB1574044A (en) * | 1977-02-01 | 1980-09-03 | Plessey Co Ltd | Method of connecting optical fibres |
| GB2060196A (en) * | 1979-10-02 | 1981-04-29 | Northern Telecom Ltd | Protective package for optical fiber splice |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1986002172A1 (en) * | 1984-09-28 | 1986-04-10 | American Telephone & Telegraph Company | Optical waveguide lateral alignment arrangement |
-
1986
- 1986-06-12 GB GB08614286A patent/GB2191601A/en not_active Withdrawn
-
1987
- 1987-06-12 GB GB8713829A patent/GB2195785B/en not_active Expired - Fee Related
-
1989
- 1989-06-27 GB GB8914729A patent/GB2219414B/en not_active Expired - Fee Related
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1452474A (en) * | 1974-06-21 | 1976-10-13 | Northern Electric Co | Optical fibre connectors |
| GB1524874A (en) * | 1974-12-23 | 1978-09-13 | Western Electric Co | Optical fibre waveguides |
| US4123137A (en) * | 1975-04-24 | 1978-10-31 | Bell Telephone Laboratories, Incorporated | Optical fiber arrangement for splicing fibers secured to ribbonlike tape |
| US4201444A (en) * | 1976-04-26 | 1980-05-06 | International Telephone And Telegraph Corporation | Single optical fiber connector |
| GB1526649A (en) * | 1976-07-20 | 1978-09-27 | Brugg Ag Kabelwerke | Method for connecting optical fibres and the connector for effecting the method |
| GB1574044A (en) * | 1977-02-01 | 1980-09-03 | Plessey Co Ltd | Method of connecting optical fibres |
| GB2000877A (en) * | 1977-06-21 | 1979-01-17 | Nippon Telegraph & Telephone | Polymer optical circuit with optical leadfibres and method of fabricating the same |
| GB2007867A (en) * | 1977-11-04 | 1979-05-23 | Thomas & Betts Corp | Fibre optic connectors |
| GB2060196A (en) * | 1979-10-02 | 1981-04-29 | Northern Telecom Ltd | Protective package for optical fiber splice |
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4930854A (en) * | 1989-03-03 | 1990-06-05 | The United States Of America As Represented By The Secretary Of The Navy | Optical fiber-to-channel waveguide coupler |
| US5007700A (en) * | 1989-03-03 | 1991-04-16 | The United States Of America As Represented By The Secretary Of The Navy | Edge-emitting diode-to-optical fiber coupling technique |
| EP0611142A1 (en) * | 1993-02-12 | 1994-08-17 | Ngk Insulators, Ltd. | A process for optically joining an optical fiber array to an opponent member |
| US5482585A (en) * | 1993-02-12 | 1996-01-09 | Ngk Insulators, Ltd. | Process for optically joining an optical fiber array to an opponent member |
| US5656120A (en) * | 1994-07-28 | 1997-08-12 | Ngk Insulators, Ltd. | Method of fixing optical fiber array to substrate |
| US5835659A (en) * | 1995-02-21 | 1998-11-10 | Ngk Insulators, Ltd. | Optical fiber-fixing substrate, method of producing the same and optical device |
| US5991492A (en) * | 1995-02-21 | 1999-11-23 | Ngk Insulators, Ltd. | Optical fiber-fixing substrate, method of producing the same and optical device |
| US6027253A (en) * | 1995-08-24 | 2000-02-22 | Ngk Insulators, Ltd. | Optical fiber array |
| US6633706B2 (en) * | 2000-06-29 | 2003-10-14 | Phoco Co., Ltd. | Method for aligning optical fibers with a waveguide element |
| US6819841B2 (en) * | 2002-08-29 | 2004-11-16 | International Business Machines Corporation | Self-aligned optical waveguide to optical fiber connection system |
Also Published As
| Publication number | Publication date |
|---|---|
| GB2219414B (en) | 1990-05-23 |
| GB2219414A (en) | 1989-12-06 |
| GB8713829D0 (en) | 1987-07-15 |
| GB2195785B (en) | 1990-05-23 |
| GB2195785A (en) | 1988-04-13 |
| GB8914729D0 (en) | 1989-08-16 |
| GB8614286D0 (en) | 1986-07-16 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| WAP | Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1) |