GB2188748B - Semiconductor device manufacture - Google Patents

Semiconductor device manufacture

Info

Publication number
GB2188748B
GB2188748B GB8608374A GB8608374A GB2188748B GB 2188748 B GB2188748 B GB 2188748B GB 8608374 A GB8608374 A GB 8608374A GB 8608374 A GB8608374 A GB 8608374A GB 2188748 B GB2188748 B GB 2188748B
Authority
GB
United Kingdom
Prior art keywords
semiconductor device
device manufacture
manufacture
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB8608374A
Other versions
GB2188748A (en
GB8608374D0 (en
Inventor
Peter Denis Scovell
Peter Fred Blomley
Roger Leslie Baker
Paul John Rosser
Stephen Robert Jennings
Colin Nicholas Duckworth
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
STC PLC
Original Assignee
STC PLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by STC PLC filed Critical STC PLC
Priority to GB8608374A priority Critical patent/GB2188748B/en
Publication of GB8608374D0 publication Critical patent/GB8608374D0/en
Publication of GB2188748A publication Critical patent/GB2188748A/en
Application granted granted Critical
Publication of GB2188748B publication Critical patent/GB2188748B/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70283—Mask effects on the imaging process
    • G03F7/70291—Addressable masks, e.g. spatial light modulators [SLMs], digital micro-mirror devices [DMDs] or liquid crystal display [LCD] patterning devices

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Liquid Crystal (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
GB8608374A 1986-04-05 1986-04-05 Semiconductor device manufacture Expired GB2188748B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB8608374A GB2188748B (en) 1986-04-05 1986-04-05 Semiconductor device manufacture

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB8608374A GB2188748B (en) 1986-04-05 1986-04-05 Semiconductor device manufacture

Publications (3)

Publication Number Publication Date
GB8608374D0 GB8608374D0 (en) 1986-05-08
GB2188748A GB2188748A (en) 1987-10-07
GB2188748B true GB2188748B (en) 1989-12-13

Family

ID=10595761

Family Applications (1)

Application Number Title Priority Date Filing Date
GB8608374A Expired GB2188748B (en) 1986-04-05 1986-04-05 Semiconductor device manufacture

Country Status (1)

Country Link
GB (1) GB2188748B (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4814799A (en) * 1988-04-15 1989-03-21 The Mead Corporation Method and apparatus for creating a photomask for projecting an image
GB9401566D0 (en) * 1994-01-27 1994-03-23 Univ Dundee Method
JP3263517B2 (en) * 1994-02-08 2002-03-04 株式会社小松製作所 Driving method of liquid crystal mask marker

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1536568A (en) * 1974-12-24 1978-12-20 Thomson Csf Thermo-optic smectic liquid-crystal storage display
GB2093206A (en) * 1981-01-23 1982-08-25 Standard Telephones Cables Ltd Liquid Crystal Cell Operation
GB2136142A (en) * 1983-03-03 1984-09-12 Marconi Co Ltd Producing Modified Prints
GB2142180A (en) * 1983-06-24 1985-01-09 Standard Telephones Cables Ltd Liquid crystal display cell
GB2153129A (en) * 1984-01-06 1985-08-14 Canon Kk Liquid crystal display devices
GB2161951A (en) * 1984-07-17 1986-01-22 Stc Plc Laser addressed smectic displays
GB2162333A (en) * 1984-07-20 1986-01-29 Stc Plc Recording spatially modulated light patterns

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1536568A (en) * 1974-12-24 1978-12-20 Thomson Csf Thermo-optic smectic liquid-crystal storage display
GB2093206A (en) * 1981-01-23 1982-08-25 Standard Telephones Cables Ltd Liquid Crystal Cell Operation
GB2136142A (en) * 1983-03-03 1984-09-12 Marconi Co Ltd Producing Modified Prints
GB2142180A (en) * 1983-06-24 1985-01-09 Standard Telephones Cables Ltd Liquid crystal display cell
GB2153129A (en) * 1984-01-06 1985-08-14 Canon Kk Liquid crystal display devices
GB2161951A (en) * 1984-07-17 1986-01-22 Stc Plc Laser addressed smectic displays
GB2162333A (en) * 1984-07-20 1986-01-29 Stc Plc Recording spatially modulated light patterns

Also Published As

Publication number Publication date
GB2188748A (en) 1987-10-07
GB8608374D0 (en) 1986-05-08

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee