GB2186091A - Semiconductor gas sensor - Google Patents

Semiconductor gas sensor Download PDF

Info

Publication number
GB2186091A
GB2186091A GB08702373A GB8702373A GB2186091A GB 2186091 A GB2186091 A GB 2186091A GB 08702373 A GB08702373 A GB 08702373A GB 8702373 A GB8702373 A GB 8702373A GB 2186091 A GB2186091 A GB 2186091A
Authority
GB
United Kingdom
Prior art keywords
sensor device
semiconductor material
electrical sensor
pellet
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
GB08702373A
Other versions
GB8702373D0 (en
Inventor
Dr P T Moseley
Dr D E Williams
Dr J F Mcaleer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
UK Atomic Energy Authority
Original Assignee
UK Atomic Energy Authority
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by UK Atomic Energy Authority filed Critical UK Atomic Energy Authority
Publication of GB8702373D0 publication Critical patent/GB8702373D0/en
Publication of GB2186091A publication Critical patent/GB2186091A/en
Withdrawn legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403Cells and electrode assemblies
    • G01N27/406Cells and probes with solid electrolytes
    • G01N27/407Cells and probes with solid electrolytes for investigating or analysing gases
    • G01N27/4073Composition or fabrication of the solid electrolyte
    • G01N27/4074Composition or fabrication of the solid electrolyte for detection of gases other than oxygen
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B18/00Layered products essentially comprising ceramics, e.g. refractory products
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/01Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
    • C04B35/495Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on vanadium, niobium, tantalum, molybdenum or tungsten oxides or solid solutions thereof with other oxides, e.g. vanadates, niobates, tantalates, molybdates or tungstates
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30Constituents and secondary phases not being of a fibrous nature
    • C04B2235/32Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3205Alkaline earth oxides or oxide forming salts thereof, e.g. beryllium oxide
    • C04B2235/3213Strontium oxides or oxide-forming salts thereof
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30Constituents and secondary phases not being of a fibrous nature
    • C04B2235/32Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3205Alkaline earth oxides or oxide forming salts thereof, e.g. beryllium oxide
    • C04B2235/3215Barium oxides or oxide-forming salts thereof
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30Constituents and secondary phases not being of a fibrous nature
    • C04B2235/32Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3231Refractory metal oxides, their mixed metal oxides, or oxide-forming salts thereof
    • C04B2235/3251Niobium oxides, niobates, tantalum oxides, tantalates, or oxide-forming salts thereof
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/30Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
    • C04B2237/32Ceramic
    • C04B2237/34Oxidic
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/30Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
    • C04B2237/32Ceramic
    • C04B2237/34Oxidic
    • C04B2237/345Refractory metal oxides
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/30Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
    • C04B2237/32Ceramic
    • C04B2237/34Oxidic
    • C04B2237/345Refractory metal oxides
    • C04B2237/346Titania or titanates

Abstract

An electrical sensor device (1) suitable for use in a gas or gaseous mixture includes a sensing portion having, in communication, a first semiconductor material (2) and a second semiconductor material (3). The semiconductor materials may be metal oxides in contact with each other. Electrodes (4), (5) connected to a respective semiconductor material are connected to high impedance voltmeter (8) for measuring the voltage produced by device (1) when contacted by a gas such as H2, CO, C2H4. The device (1) is formed by introducing consecutively powders of first and second semiconductor materials into a die and pressing to give a porous pellet. Electrodes (4) (5) are then formed by sputtering or painting. <IMAGE>

Description

SPECIFICATION Sensor The present invention relates to sensors and more particularly to an electical sensor device which is suitable for use in gases or gaseous mixtures.
According to one aspect of the present invention there is provided an electrical sensor device which includes a sensing portion having a first semiconductor material and a second semiconductor material, said first semiconductor material and said second semiconductor material being in communication.
The sensor device may include a means for measuring a voltage produced by the sensing portion (e.g. a high impedance voltmeter may be used).
Preferably the first and second semiconductor materials are in communication by being in mutual contact.
Examples of semiconductor materials which may be used in a sensor device in accordance with the present invention are semiconductor oxides such as BaO,2ssro 7sNb2o6v BaO,7sSrO2sNb2o6 BaSnO3, BaTiO3 and K4Nb6017.
By way of example a sensor device of the present invention may be used to detect in air, gases such as hydrogen, carbon monoxide and C2H4.
It is preferred that the sensing portion is porous in order to provide extended surface area for contact with a gas or gaseous mixture.
An electrical sensor device in accordance with one embodiment of the present invention may comprise a sensing portion including a pellet having a first semiconductor material and a second semiconductor material in contact.
It will be appreciated that, in accordance with the immediately preceding embodiment of the present invention, the pellet has a composite structure.
Thus, for example, the pellet may be a pellet having two regions, one region being a first semiconductor oxide and the second region being a second semiconductor oxide.
The two regions may comprise two layers of the composite pellet.
The means for measuring the voltage produced may be, for example, a high impedance voltmeter (e.g. a digital voltmeter (DVM)).
In one embodiment of the present invention a pellet for use in accordance with the present invention may be prepared by pressing a first semiconductor material in powder form and a second semiconductor material in powder form to give a porous pellet.
The porous pellet may be provided with electrodes (e.g. of Au or Pt), for example, by painting or sputtering. The electrodes may be provided one on each of the semiconductor materials. Electrodes may be of like material (e.g. both electrodes may be of a Au or both of Pt). The electrodes allow electrical connection to a voltage measuring means via suitable conductors (e.g. Cu wire). It will be appreciated that the response of the electrical sensor device to gases and gaseous mixtures may be monitored by measuring the potential between the electrodes.
In another embodiment of the present invention a pellet for use in accordance with the present invention may be prepared by pressing a first semiconductor material in powder form and a second semiconductor material in powder form such that a porous pellet is formed having a region comprising a first semiconductor material and a region comprising a second semiconductor material.
Thus, for example, in accordance with the immediately preceding embodiment of the invention a first semiconductor material in powder form may be introduced into a die and a second semiconductor material in powdered form may be added to the die to give two regions of powdered material in the die.
Pressing may be carried out to give a porous pellet having a region comprising a first semiconductor material and a region comprising a second semiconductor material.
It will be appreciated that since the measured voltage is developed by the sensing portion the requirement of providing an external electrical supply as is necessary in the case of a sensor working on, for example, resisitivity changes, is substantially avoided (i.e. a device in accordance with the present invention may be substantially "self-powered").
It will be appreciated that in operation a gaseous mixture may be passed over a sensor device in accordance with the present invention, a voltage is developed due to a potential difference between the surfaces of the two semiconductor materials and the voltage is measured.
The magnitude of the voltage is related to the concentration in the gaseous mixture of gas which gives a potential difference between the two semiconductor materials. Thus it is possible, for example, to detect (e.g. H2, CO, and C2H4) in air.
Sensor devices in accordance with the present invention are believed to be less prone to moisture "poisoning" than high resistance modulating devices.
In accordance with another aspect of the present invention there is provided a method of sensing a gas which comprises contacting the gas with an electrical sensor device which includes a sensing portion having a first semiconductor material and a second semiconductor material, said first semiconductor material and said second semiconductor material being in communication, and measuring the voltage produced.
By way of example, an electrical sensor device having a sensing portion including a composite pellet comprising a layer of BaO2sSrO7sNb2o6 in contact with a layer of Ba0.75Sra25Nb2O6 and provided with gold electrodes gave a response (at about 300"C) to 1% hydrogen in air, 1% ethane in air and reduced oxygen partial pressure.
Electrical sensor devices, by way of further example, having composite pellets of BaSnO3 in contact with BaTiO3 and K4Nb6O17 in contact with BaSnO3 have also shown responses to gases.
The invention will now be further described, by way of example only, with reference to the accompanying drawings and with reference to Examples 1 to 3.
In the Drawings: Figure 1 is a diagrammatic representation of an electrical sensor device in accordance with the invention; Figure 2 shows the voltage response of an electrical sensor device in accordance with the present invention (having a sensing portion including a composite pellet of Ba0.25Sr075Nb2O6/ BaO 7sSrO,2sNb206 having gold electrodes) to gases as a function of temperature (with T rising); Figure 3 shows the voltage response of an electrical sensor device in accordance with the present invention (having a sensing portion including a composite pellet of BaO 25SrO 75Nb2O6/ BaO 7sSrO,2sNb206 having gold electrodes) to gases as a function of temperature (with T falling);; Figure 4 shows the voltage response of an electrical sensor device in accordance with the present invention (having a sensing portion including a composite pellet of BaSnO3/BaTiO3 having gold electrodes) to gases as a function of temperature (with T rising); Figure 5 shows the voltage response of an electrical sensor device in accordance with the present invention (having a sensing portion including a composite pellet of BaSnO3/BaTiO3 having gold electrodes) to gases as a function of temperature (with T falling); and Figure 6 shows the voltage response of an electrical sensor device in accordance with the present invention (having a sensing portion including a composite pellet of K4Nb6017/BaSnO3 having gold electrodes) to air, 90% N2/10% 02, various reducing gases in air and to 100% CO2.
Referring now to Fig. 1, there is shown an electrical sensor device comprising a cylindrical pellet 1 provided with a region 2 comprising a first semiconductor material and a region 3 comprising a second semiconductor material.
Electrodes 4 and 5 are provided and are connected via conductors 6 and 7 respectively to a voltage measuring means 8.
In operation a gaseous mixture containing a gas to be detected is passed over pellet 1, voltage is developed between the region 2 and region 3 and the voltage is measured by voltage measuring means 8.
Example 1 A sensor device of the form shown in Fig.
1 of the accompanying drawings was formed by pressing powders as hereinbefore disclosed and used to detect various reducing gases in air and to detect reduced oxygen partial pressure.
The sensor device had a composite pellet comprising a layer of BaO2sSrO7sNb2o6 in contact with a layer of BaO7sSrO2sNb2o6 each layer being provided respectively (at opposite ends of the pellet) with a gold electrode (by painting).
The gold electrodes were connected to a voltage measuring device (DVM) via copper wires.
The sensor device was placed in an enclosure and a sequence of different gases was passed over the device at a number of temperatures.
Thus, 1% hydrogen in air was passed over the sensor device, followed by 1% ethene in air and then 100% CO2 (equivalent to a reduced oxygen partial pressure of 10-6 atmospheres). Each of the test gases was passed over the sensor device for 10 minutes followed by 10 minutes air purge prior to passage of the next gas.
The results are shown in Fig. 2 (temperature rising) and Fig. 3 (temperature falling).
It will be seen that 1% hydrogen in air, 1% ethene in air and the CO2 gave largest responses in the the region of 300"C.
At higher temperatures the responses to hydrogen and to ethene first decrease and then change sign.
It will be seen that for the particular sensor of this Example the response to 100% CO2 is small.
The responses obtained during temperature rising (Fig. 2) were broadly reproduced during temperature falling (Fig. 3).
Example 2 A sensor device of the form shown in Fig.
1 of the accompanying drawings was formed by pressing and used to detect various reducing gases in air and to detect reduced oxygen partial pressure.
The sensor device had a composite pellet comprising a layer of BaSnO3 in contact with a layer of BaTiO3 each layer being provided respectively (at opposite ends of the pellet) with a gold electrode (by painting).
The gold electrodes were connected to a voltage measuring device (DVM) via copper wires.
The sensor device was placed in an enclosure and a sequence of different gases was passed over the device at a number of temperatures.
Thus, 1% hydrogen in air was passed over the sensor device, followed by 1% ethene in air and then 100% CO2 equivalent to a reduced oxygen partial pressure of 10-6 atmospheres). Each of the test gases was passed over the sensor device for 10 minutes followed by 10 minutes air purge prior to passage of the next gas).
Some difference may be seen when comparing the temperature rising responses (Fig.
4) and the temperature falling responses (Fig.
5). It is thought that this may be due to the removal of water at higher temperatures or to a change in stoichiometry (at least at the surface) of one of the semiconductor materials arising from the thermal excursion. During the temperature rising sequence the largest response to 1% hydrogen in air was an increase of positive potential of 50 to 100 mV which was largest at about 400 C.
In the same temperature region the responses to 1% ethene in air and 100% CO2 are also increases in positive potential.
At lower temperature the responses to all three gases gave negative moves in potential.
Under temperature falling conditions, over most of the temperature ranges studied, the response to the introduction of the three gases were negative-going potential shifts which were largest (over 100 mV) for 1% H2 in air at around 300 C.
Example 3 A sensor device of the form shown in Fig.
1 of the accompanying drawings was formed by pressing powders as herein before disclosed and used to detect various gases and to detect reduced oxygen partial pressure.
The sensor device had a composite pellet comprising a layer of K4Nb60,7 in contact with a layer of BaSnO3 each layer being provided respectively (at opposite ends of the pellet) with a gold electrode (by painting).
The gold electrodes were connected to a voltage measuring means (DVM) via copper wires.
The sensor device was placed in an enclosure and a sequence of gases was passed over the device while the temperature was held at about 500"C.
Thus, air was passed over the sensor device, followed by 100% carbon dioxide (equivalent to a reduced oxygen partial pressure of 10--6 atmospheres), then a mixture of 10% oxygen 90% nitrogen, then air containing 1% C2H4, then a mixture of 10% oxygen 90% nitrogen, then 1% CH4 in air, then a mixture of 10% oxygen 90% nitrogen, then 1% CO in air, then a mixture of 10% oxygen 90% nitrogen, then air containing 1% hydrogen and then a mixture of 10% O2 and 90% nitrogen.
The results are shown in Fig. 6.
The arrows in Fig. 6 indicate the points in time at which a particular indicated gas or gaseous mixture was introduced to the sensor device.
Most of the reducing gases gave rise to small negative going potential shifts, but the response to methane was in the opposite sense.
The largest response (150 mV) arose from the 100% CO2 contact and is thought to represent a reduced oxygen partial pressure response.

Claims (24)

1. An electrical sensor device which includes a sensing portion having a first semiconductor material and a second semiconductor material, said first semiconductor material and said second semiconductor material being in communication.
2. An electrical sensor device as claimed in Claim 1 wherein the first semiconductor material is a semiconductor oxide.
3. An electrical sensor device as claimed in Claim 2 wherein the semiconductor oxide is BaO 25SrO,75Nb206, BaO75SrO25Nb206, BaSnO3, BaTiO3 or K4Nb60l7
4. An electrical sensor device as claimed in Claim 1 wherein the second semiconductor material is a semiconductor oxide.
5. An electrical sensor device as claimed in Claim 4 wherein the semiconductor oxide is BaO 25SrO 75Nb2 6, BaO75SrO25Nb206, BaSnO3, BaTiO3 or K4Nb6017.
6. An electrical sensor device as claimed in any one of the preceding Claims wherein the sensing portion is porous.
7. An electrical sensor device as claimed is any one of the preceding Claims wherein the first and second semiconductor materials are in communication by being in mutual contact.
8. An electrical sensor device as claimed in any one of the preceding Claims wherein the sensing portion includes a pellet having a first semiconductor material and a second semico- ductor material in contact.
9. An electrical sensor device as claimed in Claim 8 wherein the sensing portion comprises a pellet having two regions, one region being a first semiconductor oxide and the second region being a second semiconductor oxide.
10. An electrical sensor device as claimed in Claim 1 and including a means for measuring a voltage produced by the sensing portion.
11. An electrical sensor device as claimed in Claim 10 wherein the means for measuring a voltage comprises a high impedance voltmeter.
12. An electrical sensor device as claimed in any one of the preceding Claims having a sensing portion including a composite pellet comprising a layer of BaO25SrO75Nb206 in contact with a layer of BaO75SrO.25Nb206.
13. An electrical sensor device as claimed in any one of Claims 1 to 11 having a sensing portion including a composite pellet of BaSnO3 in contact with BaTiO3.
14. An electrical sensor as claimed in any one of Claims 1 to 11 having a sensing portion including a composite pellet of K4Nb60,7 in contact with BaSnO3.
15. A process for the preparation of a pellet for use in an electrical sensor device wherein a first semiconductor material in powder form and a seocnd semiconductor material in powder form are pressed to give a porous pellet.
16. A process as claimed in Claim 15 wherein the porous pellet is provided with electrodes by sputtering or painting.
17. A process for the preparation of a pellet for use in an electrical sensor device wherein said pellet is prepared by pressing a first semiconductor material in powder form and a second semiconductor material in powder form such that a porous pellet is formed having a region comprising a first semiconductor material and a region comprising a second semiconductor material.
18. A process as claimed in Claim 17 wherein a first semiconductor material in powder form is introduced into a die and a second semiconductor material in powdered form is added to the die to give two regions of powdered material in the die and pressing is carried out to give a porous pellet.
19. A method of sensing a gas which comprises contacting the gas with an electrical sensor device which includes a sensing portion having a first semiconductor material and a second semiconductor material, said first semiconductor material and said second semiconductor material being in communication, and measuring the voltage produced.
20. A method as claimed in Claim 19 wherein a gas is detected in air and said gas in hydrogen, carbon monoxide or C2H4.
21. An electrical sensor device substantially as herein before described with reference to Fig. 1 of the accompanying drawings.
22. An electrical sensor device substantially as hereinbefore described with reference to any one of the Examples 1, 2 or 3.
23. A process for preparing an electrical sensor device substantially as hereinbefore described with reference to any one of the Examples 1, 2 or 3.
24. A process of sensing a gas substantially as hereinbefore described with reference to any one of the Examples 1, 2 or 3.
GB08702373A 1986-02-03 1987-02-03 Semiconductor gas sensor Withdrawn GB2186091A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB868602544A GB8602544D0 (en) 1986-02-03 1986-02-03 Sensor

Publications (2)

Publication Number Publication Date
GB8702373D0 GB8702373D0 (en) 1987-03-11
GB2186091A true GB2186091A (en) 1987-08-05

Family

ID=10592405

Family Applications (2)

Application Number Title Priority Date Filing Date
GB868602544A Pending GB8602544D0 (en) 1986-02-03 1986-02-03 Sensor
GB08702373A Withdrawn GB2186091A (en) 1986-02-03 1987-02-03 Semiconductor gas sensor

Family Applications Before (1)

Application Number Title Priority Date Filing Date
GB868602544A Pending GB8602544D0 (en) 1986-02-03 1986-02-03 Sensor

Country Status (1)

Country Link
GB (2) GB8602544D0 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1996000895A1 (en) * 1994-06-29 1996-01-11 Max-Planck-Gesellschaft zur Förderung der Wissenschaften e.V., Berlin Potentiometric co2 sensor with a titanate and stannate-based open reference electrode
EP0701123A1 (en) 1994-09-10 1996-03-13 United Kingdom Atomic Energy Authority Formaldehyde vapour detector
WO1997047962A1 (en) * 1996-06-11 1997-12-18 Robert Bosch Gmbh Sensor for determining the concentration of oxidisable elements in a gas compound

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1203126A (en) * 1968-10-31 1970-08-26 James Edgar Meinhard Electronic olfactory detector
GB1474345A (en) * 1974-08-19 1977-05-25 Philips Electronic Associated Device for determining oxygen concentrations in a gas mixture
GB1533657A (en) * 1974-12-17 1978-11-29 Mullard Ltd Electronic solid state devices
GB1543268A (en) * 1975-08-19 1979-03-28 Nohmi Bosai Kogyo Co Ltd Gas detecting element
EP0024679A1 (en) * 1979-08-22 1981-03-11 Siemens Aktiengesellschaft Selective gas sensor with great sensitivity and stability for determining and measuring the degree of air pollution on the basis of metal oxide semiconductors
US4481499A (en) * 1982-05-07 1984-11-06 Hitachi, Ltd. Gas detector
GB2149122A (en) * 1983-10-31 1985-06-05 Atomic Energy Authority Uk Improvements in or relating to sensors
GB2149121A (en) * 1983-10-31 1985-06-05 Atomic Energy Authority Uk Improvements in or relating to sensors

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1203126A (en) * 1968-10-31 1970-08-26 James Edgar Meinhard Electronic olfactory detector
GB1474345A (en) * 1974-08-19 1977-05-25 Philips Electronic Associated Device for determining oxygen concentrations in a gas mixture
GB1533657A (en) * 1974-12-17 1978-11-29 Mullard Ltd Electronic solid state devices
GB1543268A (en) * 1975-08-19 1979-03-28 Nohmi Bosai Kogyo Co Ltd Gas detecting element
EP0024679A1 (en) * 1979-08-22 1981-03-11 Siemens Aktiengesellschaft Selective gas sensor with great sensitivity and stability for determining and measuring the degree of air pollution on the basis of metal oxide semiconductors
US4481499A (en) * 1982-05-07 1984-11-06 Hitachi, Ltd. Gas detector
GB2149122A (en) * 1983-10-31 1985-06-05 Atomic Energy Authority Uk Improvements in or relating to sensors
GB2149121A (en) * 1983-10-31 1985-06-05 Atomic Energy Authority Uk Improvements in or relating to sensors

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1996000895A1 (en) * 1994-06-29 1996-01-11 Max-Planck-Gesellschaft zur Förderung der Wissenschaften e.V., Berlin Potentiometric co2 sensor with a titanate and stannate-based open reference electrode
US5910239A (en) * 1994-06-29 1999-06-08 Max-Plank-Gesellschaft Zur Potentiometric CO2 sensor having an open titanate- or stannate-based reference electrode
EP0701123A1 (en) 1994-09-10 1996-03-13 United Kingdom Atomic Energy Authority Formaldehyde vapour detector
WO1997047962A1 (en) * 1996-06-11 1997-12-18 Robert Bosch Gmbh Sensor for determining the concentration of oxidisable elements in a gas compound

Also Published As

Publication number Publication date
GB8702373D0 (en) 1987-03-11
GB8602544D0 (en) 1986-03-12

Similar Documents

Publication Publication Date Title
JP2582255B2 (en) Method and apparatus for continuously monitoring the concentration of gaseous components other than O2 in a gas mixture
US3943557A (en) Semiconductor package with integral hermeticity detector
US3479257A (en) Methods and apparatus for measuring the content of hydrogen or reducing gases in an atmosphere
US3325378A (en) Electrochemical method and apparatus for measuring hydrogen content
US4441981A (en) Gas sensor
CA1221735A (en) Semiconductor oxide gas combustibles sensor
EP0182921B1 (en) Gas sensor
JPS6488245A (en) Ready response microsensor for gaseous and vaporous object
GR3026284T3 (en) Gas sensor based on semiconductor oxide, for gaseous hydrocarbon determination.
US3952567A (en) Gas sensor
JPH0517650Y2 (en)
US4039941A (en) Gas sensor
CA1104654A (en) Resistor-type solid electrolyte oxygen sensor
GB2186091A (en) Semiconductor gas sensor
GB2167192A (en) Gas sensor
JPS5879151A (en) Method, sensor and device for detecting quantity of gas trace in atmosphere
CN108012416B (en) Self-powered multifunctional flexible circuit board
CA1114726A (en) Carbon monoxide detecting apparatus
GB2142147A (en) Gas sensor
US3890703A (en) Method of making humidity sensor
GB2186090A (en) Gas sensor
JPS6290529A (en) Method for detecting gas and gas sensor
JPS63231258A (en) Sensor
Miura et al. Sensing characteristics of a solid-state ammonia sensor at ambient temperatures
JPH02165034A (en) Hydrogen gas sensor

Legal Events

Date Code Title Description
WAP Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1)