GB2175687B - Interferometric-incremental device for testing flatness - Google Patents

Interferometric-incremental device for testing flatness

Info

Publication number
GB2175687B
GB2175687B GB8610079A GB8610079A GB2175687B GB 2175687 B GB2175687 B GB 2175687B GB 8610079 A GB8610079 A GB 8610079A GB 8610079 A GB8610079 A GB 8610079A GB 2175687 B GB2175687 B GB 2175687B
Authority
GB
United Kingdom
Prior art keywords
interferometric
testing flatness
incremental device
incremental
flatness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB8610079A
Other versions
GB2175687A (en
GB8610079D0 (en
Inventor
Gerd Jager
Hans Buchner
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SUHL FEINMESSZEUGFAB VEB
Original Assignee
SUHL FEINMESSZEUGFAB VEB
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SUHL FEINMESSZEUGFAB VEB filed Critical SUHL FEINMESSZEUGFAB VEB
Publication of GB8610079D0 publication Critical patent/GB8610079D0/en
Publication of GB2175687A publication Critical patent/GB2175687A/en
Application granted granted Critical
Publication of GB2175687B publication Critical patent/GB2175687B/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/306—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces for measuring evenness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02056—Passive reduction of errors
    • G01B9/02061—Reduction or prevention of effects of tilts or misalignment
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02075—Reduction or prevention of errors; Testing; Calibration of particular errors
    • G01B9/02078—Caused by ambiguity
    • G01B9/02079—Quadrature detection, i.e. detecting relatively phase-shifted signals
    • G01B9/02081—Quadrature detection, i.e. detecting relatively phase-shifted signals simultaneous quadrature detection, e.g. by spatial phase shifting
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/45—Multiple detectors for detecting interferometer signals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
GB8610079A 1985-04-26 1986-04-24 Interferometric-incremental device for testing flatness Expired GB2175687B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD27557685 1985-04-26

Publications (3)

Publication Number Publication Date
GB8610079D0 GB8610079D0 (en) 1986-05-29
GB2175687A GB2175687A (en) 1986-12-03
GB2175687B true GB2175687B (en) 1989-03-15

Family

ID=5567197

Family Applications (1)

Application Number Title Priority Date Filing Date
GB8610079A Expired GB2175687B (en) 1985-04-26 1986-04-24 Interferometric-incremental device for testing flatness

Country Status (3)

Country Link
DE (1) DE3612157A1 (en)
FR (1) FR2581177A1 (en)
GB (1) GB2175687B (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3623244A1 (en) * 1985-12-23 1987-06-25 Suhl Feinmesszeugfab Veb CONTACTLESS INTERFEROMETRIC SENSOR FOR INCREMENTAL SCANNING OF VARIOUS INTERFERENCE STRUCTURES
DE3820225C1 (en) * 1988-06-14 1989-07-13 Hpo Hanseatische Praezisions- Und Orbittechnik Gmbh, 2800 Bremen, De

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2658399A1 (en) * 1976-12-23 1978-06-29 Ibm Deutschland INTERFEROMETRIC PROCEDURE

Also Published As

Publication number Publication date
FR2581177A1 (en) 1986-10-31
GB2175687A (en) 1986-12-03
DE3612157A1 (en) 1986-11-06
GB8610079D0 (en) 1986-05-29

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee