GB2168476B - Interferometer in particular for incremental scanning of variable interference structures - Google Patents

Interferometer in particular for incremental scanning of variable interference structures

Info

Publication number
GB2168476B
GB2168476B GB8528756A GB8528756A GB2168476B GB 2168476 B GB2168476 B GB 2168476B GB 8528756 A GB8528756 A GB 8528756A GB 8528756 A GB8528756 A GB 8528756A GB 2168476 B GB2168476 B GB 2168476B
Authority
GB
United Kingdom
Prior art keywords
interferometer
divider
beam splitter
beams
variable interference
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB8528756A
Other languages
English (en)
Other versions
GB8528756D0 (en
GB2168476A (en
Inventor
Gerd Jager
Hans Buchner
Wilfried Hirschfeld
Georg Ranft
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SUHL FEINMESSZEUGFAB VEB
Original Assignee
SUHL FEINMESSZEUGFAB VEB
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SUHL FEINMESSZEUGFAB VEB filed Critical SUHL FEINMESSZEUGFAB VEB
Publication of GB8528756D0 publication Critical patent/GB8528756D0/en
Publication of GB2168476A publication Critical patent/GB2168476A/en
Application granted granted Critical
Publication of GB2168476B publication Critical patent/GB2168476B/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02056—Passive reduction of errors
    • G01B9/02061—Reduction or prevention of effects of tilts or misalignment
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02075—Reduction or prevention of errors; Testing; Calibration of particular errors
    • G01B9/02078—Caused by ambiguity
    • G01B9/02079—Quadrature detection, i.e. detecting relatively phase-shifted signals
    • G01B9/02081—Quadrature detection, i.e. detecting relatively phase-shifted signals simultaneous quadrature detection, e.g. by spatial phase shifting
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
GB8528756A 1984-11-22 1985-11-22 Interferometer in particular for incremental scanning of variable interference structures Expired GB2168476B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD26976884A DD229208B1 (de) 1984-11-22 1984-11-22 Interferometer, insbesondere zur inkrementalen abtastung veraenderlicher interferenzstrukturen

Publications (3)

Publication Number Publication Date
GB8528756D0 GB8528756D0 (en) 1985-12-24
GB2168476A GB2168476A (en) 1986-06-18
GB2168476B true GB2168476B (en) 1988-06-08

Family

ID=5562479

Family Applications (1)

Application Number Title Priority Date Filing Date
GB8528756A Expired GB2168476B (en) 1984-11-22 1985-11-22 Interferometer in particular for incremental scanning of variable interference structures

Country Status (4)

Country Link
DD (1) DD229208B1 (enExample)
DE (1) DE3540856A1 (enExample)
FR (1) FR2573525A1 (enExample)
GB (1) GB2168476B (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3623244A1 (de) * 1985-12-23 1987-06-25 Suhl Feinmesszeugfab Veb Beruehrungsloser interferometrischer sensor zur inkrementalen abtastung veraenderlicher interferenzstrukturen
DE3930632A1 (de) * 1989-09-13 1991-03-14 Steinbichler Hans Verfahren zur direkten phasenmessung von strahlung, insbesondere lichtstrahlung, und vorrichtung zur durchfuehrung dieses verfahrens

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1460861A (en) * 1974-03-05 1977-01-06 Nat Res Dev Interferrometers
DE2926738C2 (de) * 1979-07-03 1982-10-28 Ibm Deutschland Gmbh, 7000 Stuttgart Verfahren zur interferometrischen Oberflächenformanalyse
DD201191B1 (de) * 1981-09-24 1987-07-15 Ilmenau Tech Hochschule Kippinvariantes interferometer mit ebenen spiegeln

Also Published As

Publication number Publication date
GB8528756D0 (en) 1985-12-24
DD229208A1 (de) 1985-10-30
FR2573525A1 (fr) 1986-05-23
DD229208B1 (de) 1988-02-10
GB2168476A (en) 1986-06-18
DE3540856A1 (de) 1986-05-28
DE3540856C2 (enExample) 1989-07-20

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 19931122