GB2162942B - A device for use in assessing the position of a body - Google Patents
A device for use in assessing the position of a bodyInfo
- Publication number
- GB2162942B GB2162942B GB08519700A GB8519700A GB2162942B GB 2162942 B GB2162942 B GB 2162942B GB 08519700 A GB08519700 A GB 08519700A GB 8519700 A GB8519700 A GB 8519700A GB 2162942 B GB2162942 B GB 2162942B
- Authority
- GB
- United Kingdom
- Prior art keywords
- assessing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
- G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
- G01B11/005—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB848420096A GB8420096D0 (en) | 1984-08-07 | 1984-08-07 | Measurement of errors |
Publications (3)
Publication Number | Publication Date |
---|---|
GB8519700D0 GB8519700D0 (en) | 1985-09-11 |
GB2162942A GB2162942A (en) | 1986-02-12 |
GB2162942B true GB2162942B (en) | 1988-04-07 |
Family
ID=10565029
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB848420096A Pending GB8420096D0 (en) | 1984-08-07 | 1984-08-07 | Measurement of errors |
GB08519700A Expired GB2162942B (en) | 1984-08-07 | 1985-08-06 | A device for use in assessing the position of a body |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB848420096A Pending GB8420096D0 (en) | 1984-08-07 | 1984-08-07 | Measurement of errors |
Country Status (1)
Country | Link |
---|---|
GB (2) | GB8420096D0 (en) |
Families Citing this family (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3605107A1 (en) * | 1986-02-18 | 1987-09-10 | Ulrich Wagensommer | DEVICE FOR MEASURING AND POSITIONING |
GB8616431D0 (en) * | 1986-07-05 | 1986-08-13 | Renishaw Plc | Locating co-ordinates of object |
DE3781674T2 (en) * | 1987-01-20 | 1993-04-15 | Warner Swasey Co | POSITION DETERMINATION METHOD WITHIN THE MEASURING SPACE OF A COORDINATE MEASURING DEVICE AND THE LIKE AND SYSTEM THEREFOR. |
US4819195A (en) * | 1987-01-20 | 1989-04-04 | The Warner & Swasey Company | Method for calibrating a coordinate measuring machine and the like and system therefor |
US5154002A (en) * | 1987-02-26 | 1992-10-13 | Klaus Ulbrich | Probe, motion guiding device, position sensing apparatus, and position sensing method |
GB8705301D0 (en) * | 1987-03-06 | 1987-04-08 | Renishaw Plc | Calibration of machines |
JPH01502530A (en) * | 1987-03-06 | 1989-08-31 | レニショウ パブリック リミテッド カンパニー | positioning device |
US4884889A (en) * | 1987-11-19 | 1989-12-05 | Brown & Sharpe Manufacturing Company | Calibration system for coordinate measuring machine |
GB8730169D0 (en) * | 1987-12-24 | 1988-02-03 | Renishaw Plc | Optical apparatus for use with interferometric measuring devices |
GB8920448D0 (en) * | 1989-09-09 | 1989-10-25 | Renishaw Plc | Apparatus for adjusting the alignment of a light beam |
IT1231979B (en) * | 1989-09-26 | 1992-01-22 | Enea | IMPROVEMENT IN MEASURING DEVICES OF OPTICAL ABSORPTION IN MATERIALS IN THE FORM OF THIN LAYERS, USING THE SPECTROSCOPIC TECHNIQUE WITH PHOTOTHERMAL DEFLECTION |
US5268746A (en) * | 1989-09-26 | 1993-12-07 | Ente Per Le Nuove Tecnologie, L'energia E L'ambiente (Enea) | Devices for measuring the optical absorption in thin layer materials by using the photothermal deflection spectroscopy |
CN1105297C (en) * | 1996-08-16 | 2003-04-09 | K·C·刘 | Five-axis/six-axis laser measuring system |
TWI231405B (en) | 1999-12-22 | 2005-04-21 | Asml Netherlands Bv | Lithographic projection apparatus, position detection device, and method of manufacturing a device using a lithographic projection apparatus |
EP1111472B1 (en) * | 1999-12-22 | 2007-03-07 | ASML Netherlands B.V. | Lithographic apparatus with a position detection system |
WO2012154023A1 (en) * | 2011-05-09 | 2012-11-15 | Universiti Sains Malaysia | A system and method for assessing the position of a body |
DE102011107451B3 (en) * | 2011-07-08 | 2012-08-23 | Albert-Ludwigs-Universität Freiburg | Method and device for determining the position and orientation of a body |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL6803013A (en) * | 1968-03-02 | 1969-09-04 | ||
JPS5724482B1 (en) * | 1971-07-07 | 1982-05-25 | ||
GB2034880B (en) * | 1978-11-11 | 1983-03-09 | Ferranti Ltd | Twodimensional measuring apparatus |
CH643619A5 (en) * | 1981-09-25 | 1984-06-15 | Sig Schweiz Industrieges | RAILWAY SITE MACHINE. |
US4518855A (en) * | 1982-09-30 | 1985-05-21 | Spring-Mornne, Inc. | Method and apparatus for statically aligning shafts and monitoring shaft alignment |
DE3320163A1 (en) * | 1983-06-03 | 1984-12-13 | Prüftechnik Dieter Busch + Partner GmbH & Co, 8045 Ismaning | DEVICE FOR DETECTING ALIGNMENT FAULTS OF SHAFTS ARRANGED IN ADJUSTMENT |
US4572948A (en) * | 1983-07-15 | 1986-02-25 | Trw Inc. | Position indicator employing light guides |
-
1984
- 1984-08-07 GB GB848420096A patent/GB8420096D0/en active Pending
-
1985
- 1985-08-06 GB GB08519700A patent/GB2162942B/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
GB8420096D0 (en) | 1984-09-12 |
GB2162942A (en) | 1986-02-12 |
GB8519700D0 (en) | 1985-09-11 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PCNP | Patent ceased through non-payment of renewal fee |
Effective date: 19950806 |