GB2162942B - A device for use in assessing the position of a body - Google Patents

A device for use in assessing the position of a body

Info

Publication number
GB2162942B
GB2162942B GB08519700A GB8519700A GB2162942B GB 2162942 B GB2162942 B GB 2162942B GB 08519700 A GB08519700 A GB 08519700A GB 8519700 A GB8519700 A GB 8519700A GB 2162942 B GB2162942 B GB 2162942B
Authority
GB
United Kingdom
Prior art keywords
assessing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB08519700A
Other versions
GB2162942A (en
GB8519700D0 (en
Inventor
Indra Putra Almanar
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
PUTRA SIREGAR NURHAYATI INDRA
Original Assignee
PUTRA SIREGAR NURHAYATI INDRA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by PUTRA SIREGAR NURHAYATI INDRA filed Critical PUTRA SIREGAR NURHAYATI INDRA
Publication of GB8519700D0 publication Critical patent/GB8519700D0/en
Publication of GB2162942A publication Critical patent/GB2162942A/en
Application granted granted Critical
Publication of GB2162942B publication Critical patent/GB2162942B/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
    • G01B11/005—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
GB08519700A 1984-08-07 1985-08-06 A device for use in assessing the position of a body Expired GB2162942B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB848420096A GB8420096D0 (en) 1984-08-07 1984-08-07 Measurement of errors

Publications (3)

Publication Number Publication Date
GB8519700D0 GB8519700D0 (en) 1985-09-11
GB2162942A GB2162942A (en) 1986-02-12
GB2162942B true GB2162942B (en) 1988-04-07

Family

ID=10565029

Family Applications (2)

Application Number Title Priority Date Filing Date
GB848420096A Pending GB8420096D0 (en) 1984-08-07 1984-08-07 Measurement of errors
GB08519700A Expired GB2162942B (en) 1984-08-07 1985-08-06 A device for use in assessing the position of a body

Family Applications Before (1)

Application Number Title Priority Date Filing Date
GB848420096A Pending GB8420096D0 (en) 1984-08-07 1984-08-07 Measurement of errors

Country Status (1)

Country Link
GB (2) GB8420096D0 (en)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3605107A1 (en) * 1986-02-18 1987-09-10 Ulrich Wagensommer DEVICE FOR MEASURING AND POSITIONING
GB8616431D0 (en) * 1986-07-05 1986-08-13 Renishaw Plc Locating co-ordinates of object
DE3781674T2 (en) * 1987-01-20 1993-04-15 Warner Swasey Co POSITION DETERMINATION METHOD WITHIN THE MEASURING SPACE OF A COORDINATE MEASURING DEVICE AND THE LIKE AND SYSTEM THEREFOR.
US4819195A (en) * 1987-01-20 1989-04-04 The Warner & Swasey Company Method for calibrating a coordinate measuring machine and the like and system therefor
US5154002A (en) * 1987-02-26 1992-10-13 Klaus Ulbrich Probe, motion guiding device, position sensing apparatus, and position sensing method
GB8705301D0 (en) * 1987-03-06 1987-04-08 Renishaw Plc Calibration of machines
JPH01502530A (en) * 1987-03-06 1989-08-31 レニショウ パブリック リミテッド カンパニー positioning device
US4884889A (en) * 1987-11-19 1989-12-05 Brown & Sharpe Manufacturing Company Calibration system for coordinate measuring machine
GB8730169D0 (en) * 1987-12-24 1988-02-03 Renishaw Plc Optical apparatus for use with interferometric measuring devices
GB8920448D0 (en) * 1989-09-09 1989-10-25 Renishaw Plc Apparatus for adjusting the alignment of a light beam
IT1231979B (en) * 1989-09-26 1992-01-22 Enea IMPROVEMENT IN MEASURING DEVICES OF OPTICAL ABSORPTION IN MATERIALS IN THE FORM OF THIN LAYERS, USING THE SPECTROSCOPIC TECHNIQUE WITH PHOTOTHERMAL DEFLECTION
US5268746A (en) * 1989-09-26 1993-12-07 Ente Per Le Nuove Tecnologie, L'energia E L'ambiente (Enea) Devices for measuring the optical absorption in thin layer materials by using the photothermal deflection spectroscopy
CN1105297C (en) * 1996-08-16 2003-04-09 K·C·刘 Five-axis/six-axis laser measuring system
TWI231405B (en) 1999-12-22 2005-04-21 Asml Netherlands Bv Lithographic projection apparatus, position detection device, and method of manufacturing a device using a lithographic projection apparatus
EP1111472B1 (en) * 1999-12-22 2007-03-07 ASML Netherlands B.V. Lithographic apparatus with a position detection system
WO2012154023A1 (en) * 2011-05-09 2012-11-15 Universiti Sains Malaysia A system and method for assessing the position of a body
DE102011107451B3 (en) * 2011-07-08 2012-08-23 Albert-Ludwigs-Universität Freiburg Method and device for determining the position and orientation of a body

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL6803013A (en) * 1968-03-02 1969-09-04
JPS5724482B1 (en) * 1971-07-07 1982-05-25
GB2034880B (en) * 1978-11-11 1983-03-09 Ferranti Ltd Twodimensional measuring apparatus
CH643619A5 (en) * 1981-09-25 1984-06-15 Sig Schweiz Industrieges RAILWAY SITE MACHINE.
US4518855A (en) * 1982-09-30 1985-05-21 Spring-Mornne, Inc. Method and apparatus for statically aligning shafts and monitoring shaft alignment
DE3320163A1 (en) * 1983-06-03 1984-12-13 Prüftechnik Dieter Busch + Partner GmbH & Co, 8045 Ismaning DEVICE FOR DETECTING ALIGNMENT FAULTS OF SHAFTS ARRANGED IN ADJUSTMENT
US4572948A (en) * 1983-07-15 1986-02-25 Trw Inc. Position indicator employing light guides

Also Published As

Publication number Publication date
GB8420096D0 (en) 1984-09-12
GB2162942A (en) 1986-02-12
GB8519700D0 (en) 1985-09-11

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 19950806