GB2147456B - Piezo-electric vibrator assembly - Google Patents

Piezo-electric vibrator assembly

Info

Publication number
GB2147456B
GB2147456B GB08328658A GB8328658A GB2147456B GB 2147456 B GB2147456 B GB 2147456B GB 08328658 A GB08328658 A GB 08328658A GB 8328658 A GB8328658 A GB 8328658A GB 2147456 B GB2147456 B GB 2147456B
Authority
GB
United Kingdom
Prior art keywords
piezo
vibrator assembly
electric vibrator
electric
assembly
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB08328658A
Other versions
GB2147456A (en
GB8328658D0 (en
Inventor
Mutsumi Negita
Iwao Nakayama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Matsushima Kogyo KK
Original Assignee
Matsushima Kogyo KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushima Kogyo KK filed Critical Matsushima Kogyo KK
Publication of GB8328658D0 publication Critical patent/GB8328658D0/en
Publication of GB2147456A publication Critical patent/GB2147456A/en
Application granted granted Critical
Publication of GB2147456B publication Critical patent/GB2147456B/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/13—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials
    • H03H9/132—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials characterized by a particular shape
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders; Supports
    • H03H9/0504—Holders; Supports for bulk acoustic wave devices
    • H03H9/0514—Holders; Supports for bulk acoustic wave devices consisting of mounting pads or bumps
    • H03H9/0519—Holders; Supports for bulk acoustic wave devices consisting of mounting pads or bumps for cantilever
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders; Supports
    • H03H9/0595—Holders; Supports the holder support and resonator being formed in one body
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders; Supports
    • H03H9/10—Mounting in enclosures
    • H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
    • H03H9/1014—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device
    • H03H9/1021—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device the BAW device being of the cantilever type
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders; Supports
    • H03H9/10—Mounting in enclosures
    • H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
    • H03H9/1035—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by two sealing substrates sandwiching the piezoelectric layer of the BAW device
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
GB08328658A 1983-09-27 1983-10-26 Piezo-electric vibrator assembly Expired GB2147456B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17883583A JPS6070811A (en) 1983-09-27 1983-09-27 Longitudinal vibration type piezoelectric vibrator and its manufacture

Publications (3)

Publication Number Publication Date
GB8328658D0 GB8328658D0 (en) 1983-11-30
GB2147456A GB2147456A (en) 1985-05-09
GB2147456B true GB2147456B (en) 1987-04-01

Family

ID=16055493

Family Applications (1)

Application Number Title Priority Date Filing Date
GB08328658A Expired GB2147456B (en) 1983-09-27 1983-10-26 Piezo-electric vibrator assembly

Country Status (4)

Country Link
JP (1) JPS6070811A (en)
CH (1) CH659746A5 (en)
GB (1) GB2147456B (en)
HK (1) HK21489A (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02260710A (en) * 1989-03-30 1990-10-23 Seiko Electronic Components Ltd Longitudinal crystal resonator
JP2011160174A (en) 2010-02-01 2011-08-18 Seiko Epson Corp Vibrating piece substrate and tuning-fork vibrating piece

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1920431U (en) * 1964-12-24 1965-07-29 Philips Nv DEVICE WITH TWO PIEZO CRYSTALS.
FR2257153B1 (en) * 1974-01-09 1978-06-30 Suwa Seikosha Kk
JPS5821216Y2 (en) * 1975-03-25 1983-05-06 セイコーインスツルメンツ株式会社 Support structure of small piezoelectric vibrator
CH1212475A4 (en) * 1975-09-18 1977-07-29
GB1593774A (en) * 1976-11-12 1981-07-22 Citizen Watch Co Ltd Tuning fork-type quartz crystal vibrator
FR2469042A1 (en) * 1979-11-05 1981-05-08 Suisse Horlogerie METHOD FOR FIXING A PIEZOELECTRIC RESONATOR ON A BASE
CH641632B (en) * 1981-01-15 Asulab Sa PIEZO-ELECTRIC MICRO-RESONATOR.
JPS5863210A (en) * 1981-10-12 1983-04-15 Matsushima Kogyo Co Ltd Piezoelectric oscillator

Also Published As

Publication number Publication date
JPS6070811A (en) 1985-04-22
GB2147456A (en) 1985-05-09
CH659746A5 (en) 1987-02-13
GB8328658D0 (en) 1983-11-30
HK21489A (en) 1989-03-17

Similar Documents

Publication Publication Date Title
DE3472004D1 (en) Transducers
GB8508831D0 (en) Vibration transducer
GB8303027D0 (en) Piezoelectric transducers
GB8521410D0 (en) Vibrating elements
EP0155145A3 (en) Piezoelectric resonating device
GB8620782D0 (en) Vibratory transducer
GB8303025D0 (en) Piezoelectric transducers
GB8321068D0 (en) Piezoelectric transducer
GB2137024B (en) Piezoelectric vibration exciter
DE3368968D1 (en) Vibrating device
GB2146839B (en) Piezoelectric resonator
DE3461730D1 (en) Vibrating plate
GB8409946D0 (en) Transducers
GB8412018D0 (en) Plural-amplitude vibration assembly
GB8409932D0 (en) Acoustic ranging
EP0127442A3 (en) Piezoelectric resonator
GB2152767B (en) Piezoelectric fluid-electric generator
GB8414282D0 (en) Transducers
GB2147456B (en) Piezo-electric vibrator assembly
GB2134847B (en) Assembly using ultrasonics
GB8416262D0 (en) Piezo-electric sensor
GB8430110D0 (en) Piezoelectric speaker
GB2149272B (en) Electromechanical transducer
GB2204444B (en) Vibrator assembly
GB8333605D0 (en) Transducers

Legal Events

Date Code Title Description
732 Registration of transactions, instruments or events in the register (sect. 32/1977)
PE20 Patent expired after termination of 20 years

Effective date: 20031025