GB2136987B - Alignment of two members e.g. a photomask and wafer spaced parallel planes - Google Patents

Alignment of two members e.g. a photomask and wafer spaced parallel planes

Info

Publication number
GB2136987B
GB2136987B GB08405979A GB8405979A GB2136987B GB 2136987 B GB2136987 B GB 2136987B GB 08405979 A GB08405979 A GB 08405979A GB 8405979 A GB8405979 A GB 8405979A GB 2136987 B GB2136987 B GB 2136987B
Authority
GB
United Kingdom
Prior art keywords
photomask
alignment
members
spaced parallel
parallel planes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB08405979A
Other versions
GB2136987A (en
GB8405979D0 (en
Inventor
Chen Hwa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Applied Biosystems Inc
Original Assignee
Perkin Elmer Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Perkin Elmer Corp filed Critical Perkin Elmer Corp
Publication of GB8405979D0 publication Critical patent/GB8405979D0/en
Publication of GB2136987A publication Critical patent/GB2136987A/en
Application granted granted Critical
Publication of GB2136987B publication Critical patent/GB2136987B/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7073—Alignment marks and their environment
    • G03F9/7076—Mark details, e.g. phase grating mark, temporary mark
GB08405979A 1983-03-11 1984-03-07 Alignment of two members e.g. a photomask and wafer spaced parallel planes Expired GB2136987B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US47462683A 1983-03-11 1983-03-11

Publications (3)

Publication Number Publication Date
GB8405979D0 GB8405979D0 (en) 1984-04-11
GB2136987A GB2136987A (en) 1984-09-26
GB2136987B true GB2136987B (en) 1986-08-06

Family

ID=23884353

Family Applications (1)

Application Number Title Priority Date Filing Date
GB08405979A Expired GB2136987B (en) 1983-03-11 1984-03-07 Alignment of two members e.g. a photomask and wafer spaced parallel planes

Country Status (3)

Country Link
JP (1) JPS59168445A (en)
DE (1) DE3408764A1 (en)
GB (1) GB2136987B (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2710967B2 (en) * 1988-11-22 1998-02-10 株式会社日立製作所 Manufacturing method of integrated circuit device
GB0518096D0 (en) * 2005-09-06 2005-10-12 Fleet Line Markers Ltd Alignment apparatus
US9046783B2 (en) 2012-03-27 2015-06-02 Panasonic Intellectual Property Management Co., Ltd. Photomask, and pattern formation method and exposure apparatus using the photomask

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4037969A (en) * 1976-04-02 1977-07-26 Bell Telephone Laboratories, Incorporated Zone plate alignment marks
FR2436967A1 (en) * 1978-09-19 1980-04-18 Thomson Csf METHOD FOR OPTICAL ALIGNMENT OF PATTERNS IN TWO CLOSE PLANS AND ALIGNMENT DEVICE IMPLEMENTING SUCH A METHOD

Also Published As

Publication number Publication date
JPS59168445A (en) 1984-09-22
GB2136987A (en) 1984-09-26
GB8405979D0 (en) 1984-04-11
DE3408764A1 (en) 1984-09-13

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Legal Events

Date Code Title Description
732 Registration of transactions, instruments or events in the register (sect. 32/1977)
PCNP Patent ceased through non-payment of renewal fee

Effective date: 19930307