GB2123422B - Production of compounds for use in semiconductor preparation - Google Patents

Production of compounds for use in semiconductor preparation

Info

Publication number
GB2123422B
GB2123422B GB08316317A GB8316317A GB2123422B GB 2123422 B GB2123422 B GB 2123422B GB 08316317 A GB08316317 A GB 08316317A GB 8316317 A GB8316317 A GB 8316317A GB 2123422 B GB2123422 B GB 2123422B
Authority
GB
United Kingdom
Prior art keywords
compounds
production
semiconductor preparation
semiconductor
preparation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB08316317A
Other versions
GB8316317D0 (en
GB2123422A (en
Inventor
Marc Marian Faktor
Donald Charlton Bradley
Kenneth Allen Aitchison
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
British Telecommunications PLC
Original Assignee
British Telecommunications PLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by British Telecommunications PLC filed Critical British Telecommunications PLC
Priority to GB08316317A priority Critical patent/GB2123422B/en
Publication of GB8316317D0 publication Critical patent/GB8316317D0/en
Publication of GB2123422A publication Critical patent/GB2123422A/en
Application granted granted Critical
Publication of GB2123422B publication Critical patent/GB2123422B/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
    • C07F9/00—Compounds containing elements of Groups 5 or 15 of the Periodic Table
    • C07F9/02—Phosphorus compounds
    • C07F9/28—Phosphorus compounds with one or more P—C bonds
    • C07F9/50—Organo-phosphines
    • C07F9/5045—Complexes or chelates of phosphines with metallic compounds or metals
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
    • C07F5/00—Compounds containing elements of Groups 3 or 13 of the Periodic Table
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
    • C07F5/00—Compounds containing elements of Groups 3 or 13 of the Periodic Table
    • C07F5/06—Aluminium compounds
    • C07F5/061—Aluminium compounds with C-aluminium linkage
    • C07F5/062—Al linked exclusively to C

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Molecular Biology (AREA)
GB08316317A 1982-07-19 1983-06-15 Production of compounds for use in semiconductor preparation Expired GB2123422B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB08316317A GB2123422B (en) 1982-07-19 1983-06-15 Production of compounds for use in semiconductor preparation

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB8220857 1982-07-19
GB08316317A GB2123422B (en) 1982-07-19 1983-06-15 Production of compounds for use in semiconductor preparation

Publications (3)

Publication Number Publication Date
GB8316317D0 GB8316317D0 (en) 1983-07-20
GB2123422A GB2123422A (en) 1984-02-01
GB2123422B true GB2123422B (en) 1985-11-06

Family

ID=26283381

Family Applications (1)

Application Number Title Priority Date Filing Date
GB08316317A Expired GB2123422B (en) 1982-07-19 1983-06-15 Production of compounds for use in semiconductor preparation

Country Status (1)

Country Link
GB (1) GB2123422B (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0176537B1 (en) * 1984-03-26 1989-01-25 The Secretary of State for Defence in Her Britannic Majesty's Government of the United Kingdom of Great Britain and The preparation of metal alkyls
DE3726485A1 (en) * 1987-08-08 1989-02-16 Merck Patent Gmbh METAL ORGANIC COMPOUNDS
US4885376A (en) * 1987-10-13 1989-12-05 Iowa State University Research Foundation, Inc. New types of organometallic reagents and catalysts for asymmetric synthesis
DE3913165C2 (en) * 1989-04-21 2000-05-18 Merck Patent Gmbh Organometallic compounds and their use for the production of thin layers

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1134672B (en) * 1959-07-17 1962-08-16 Dr Karl Ziegler Process for the separation of mixtures of aluminum triethyl and AEthyl compounds of other metals
GB1119746A (en) * 1966-04-11 1968-07-10 Chisso Corp Method for polymerizing vinyl compounds

Also Published As

Publication number Publication date
GB8316317D0 (en) 1983-07-20
GB2123422A (en) 1984-02-01

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Legal Events

Date Code Title Description
732 Registration of transactions, instruments or events in the register (sect. 32/1977)
PCNP Patent ceased through non-payment of renewal fee

Effective date: 19950615