GB2112933B - Positioning apparatus - Google Patents

Positioning apparatus

Info

Publication number
GB2112933B
GB2112933B GB08235609A GB8235609A GB2112933B GB 2112933 B GB2112933 B GB 2112933B GB 08235609 A GB08235609 A GB 08235609A GB 8235609 A GB8235609 A GB 8235609A GB 2112933 B GB2112933 B GB 2112933B
Authority
GB
United Kingdom
Prior art keywords
positioning apparatus
positioning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB08235609A
Other versions
GB2112933A (en
Inventor
Adriaan Walther
Thomas D Wiseley
David R Beaulieu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
GCA Corp
Original Assignee
GCA Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by GCA Corp filed Critical GCA Corp
Publication of GB2112933A publication Critical patent/GB2112933A/en
Application granted granted Critical
Publication of GB2112933B publication Critical patent/GB2112933B/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7049—Technique, e.g. interferometric
GB08235609A 1981-12-14 1982-12-14 Positioning apparatus Expired GB2112933B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US33025281A 1981-12-14 1981-12-14

Publications (2)

Publication Number Publication Date
GB2112933A GB2112933A (en) 1983-07-27
GB2112933B true GB2112933B (en) 1985-04-03

Family

ID=23288956

Family Applications (1)

Application Number Title Priority Date Filing Date
GB08235609A Expired GB2112933B (en) 1981-12-14 1982-12-14 Positioning apparatus

Country Status (4)

Country Link
JP (1) JPS58145127A (en)
DE (1) DE3245315A1 (en)
FR (1) FR2518255A1 (en)
GB (1) GB2112933B (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2146427B (en) * 1983-08-01 1987-10-21 Canon Kk Semiconductor manufacture
US4615615A (en) * 1984-09-27 1986-10-07 Flexible Manufacturing Systems, Inc. Laser positioning system
US5262822A (en) * 1984-11-09 1993-11-16 Canon Kabushiki Kaisha Exposure method and apparatus
JP2599899B2 (en) * 1994-11-28 1997-04-16 株式会社日立製作所 Wafer alignment method in projection exposure
DE19934296C2 (en) 1999-07-21 2002-01-24 Infineon Technologies Ag Test arrangement and method for testing a digital electronic filter

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4037969A (en) * 1976-04-02 1977-07-26 Bell Telephone Laboratories, Incorporated Zone plate alignment marks

Also Published As

Publication number Publication date
GB2112933A (en) 1983-07-27
JPS58145127A (en) 1983-08-29
FR2518255A1 (en) 1983-06-17
DE3245315A1 (en) 1983-07-07

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee