GB2111198A - Photoconductive detectors with bias - Google Patents

Photoconductive detectors with bias Download PDF

Info

Publication number
GB2111198A
GB2111198A GB08234079A GB8234079A GB2111198A GB 2111198 A GB2111198 A GB 2111198A GB 08234079 A GB08234079 A GB 08234079A GB 8234079 A GB8234079 A GB 8234079A GB 2111198 A GB2111198 A GB 2111198A
Authority
GB
United Kingdom
Prior art keywords
bias
detector
photoconductive
photosignal
responsivity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
GB08234079A
Other versions
GB2111198B (en
Inventor
Charles Thomas Elliott
Anthony Michael White
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
UK Secretary of State for Defence
Original Assignee
UK Secretary of State for Defence
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by UK Secretary of State for Defence filed Critical UK Secretary of State for Defence
Priority to GB08234079A priority Critical patent/GB2111198B/en
Publication of GB2111198A publication Critical patent/GB2111198A/en
Application granted granted Critical
Publication of GB2111198B publication Critical patent/GB2111198B/en
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144Devices controlled by radiation
    • H01L27/146Imager structures
    • H01L27/14665Imagers using a photoconductor layer
    • H01L27/14669Infrared imagers
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J5/28Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using photoemissive or photovoltaic cells
    • G01J5/30Electrical features thereof
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/08Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
    • H01L31/09Devices sensitive to infrared, visible or ultraviolet radiation
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N25/00Circuitry of solid-state image sensors [SSIS]; Control thereof
    • H04N25/70SSIS architectures; Circuits associated therewith
    • H04N25/701Line sensors
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N25/00Circuitry of solid-state image sensors [SSIS]; Control thereof
    • H04N25/70SSIS architectures; Circuits associated therewith
    • H04N25/76Addressed sensors, e.g. MOS or CMOS sensors
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N5/00Details of television systems
    • H04N5/30Transforming light or analogous information into electric information
    • H04N5/33Transforming infrared radiation

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Signal Processing (AREA)
  • Multimedia (AREA)
  • Power Engineering (AREA)
  • Electromagnetism (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Light Receiving Elements (AREA)

Abstract

An alternating bias is supplied to a modified photoconductive detector (1) and photosignal extracted from each detector element (2). This extraction may be performed using an integrator (11) to produce dc signal output, or alternatively by using a high-pass filter or phase-sensitive detector to extract photosignal at an harmonic of the bias frequency. The detector (1) used is provided with elements (2) that have a responsivity that is a different function of bias amplitude for each polarity. The detector element (2) may be shaped with variation in width or depth, to produce this differential responsivity. Alternatively element bias contacts (3, 5) may be of different width to produce field gradient and differential responsivity. It is advantageous to obscure a part of each element area (2) by including an opaque mask. <IMAGE>

Description

SPECIFICATION A method of photoconductive detector biassing, detector apparatus and a detector adapted therefor Technical field This invention concerns a method of photoconductive detector biassing, a detector apparatus, and, a photoconductive detector adapted for use in the detector apparatus. In particular it concerns a detector apparatus including: a detector comprising at least one photoconductive element, a bias source, connected to the detector, for applying bias to each element of the detector; and, an output circuit connected to each element, responsive to electrical output signal from each element, to extract from each electrical output signal, a photosignal dependent on the intensity of radiation incident upon each element; and, in particular a method of biassing a photoconductive detector wherein bias is applied to each element of the detector and a photosignal dependent on radiation intensity is extracted from the output signal produced by each element.
Photoconductive detectors, particularly those sensitive to infra-red radiation have been considered for use in imaging applications. They may also find application in future laser communication and laser rangefinding system.
Background art Conventional photoconductive detectors comprise one or more square elements of photosensitive material, each element having a pair of spaced bias contacts. For imaging applications, such a detector is placed in the image plane of an optical assembly and is usually shielded to reduce the incidence of background illumination upon the detector. The detector is usually mounted on a cold stage and is cooled to enhance signal-overnoise discrimination. In onp form of conventional detector apparatus using intrinsic photoconductive elements responsive to the middle and far infra-red region of the spectrum, a steady direct current (DC) bias, from a constant current source, is applied to each element. There is thus developed across each detector element a bias pedestal voltage, a voltage dependent on bias current magnitude and element resistance.When radiation of appropriate wavelength is incident upon the detector elements, photosignals-in this case photo-voltages-are developed and these increment the voltage provided by each element.
The incremental photosignal voltage is, for normal radiation intensities, of magnitude several orders smaller than the magnitude of the bias pedestal, and it is usual to back-off each element voltage by subtracting DC voltage to allow extraction and amplification of the photosignal component.
However, to be wholly effective the back-off voltage applied, in each case, must follow changes in the pedestal voltage. Such changes may occur, for example, as a result of cold stage temperature drift, of change in ambient temperature of change of average background illumination, and of current drift. Such pedestal voltage changes are in general also orders of magnitude higher than the photosignal increment.
Furthermore the pedestal voltage and the change of this voltage will vary from element to element.
In general the resistance of each element will differ, since material resistivity and element dimensions vary within manufacturing tolerance.
Because of non-uniformities in the bias pedestal, it is in the very least difficult, if not impractical, in unscanned, so-called "staring" systems, to back off element voltage satisfactorily so that the wanted illumination dependent photosignal can be extracted without the introduction of an unacceptable degree of fixed pattern noise. It is also possible to operate these detectors using constant voltage drive bias instead of constant current in which case device current is measured.
This too requires bias compensation, and this likewise introduces fixed pattern noise.
Because of these difficulties, progress in photoconductive detector development is impeded and this development is giving way to the alternative development of photovoltaic detectors; albeit this latter involves a more complex, generally more expensive and less far advanced technology.
Description of the invention This invention is intended to provide a remedy; a method of biassing, detector apparatus, and, a photoconductive detector, all facilitationg the extraction of useful illumination dependent photosignal from detector element response voltage or current.
According to a first aspect of the invention there is provided a method of biassing a photoconductive detector characterised in that the bias applied is an alternating bias; and, the photoconductive detector, to which the bias is applied, includes at least one photoconductive element having a responsivity variable in different degree dependent upon the polarity of the bias.
According to a second aspect of the invention there is provided detector apparatus for performing the method of biasing, as above, characterised in that the bias source is a source of alternating bias; and, the photoconductive detector includes at least one photoconductive element having a responsivity variable in different degree dependent upon the polarity of bias.
According to a third aspect of the invention there is provided a photoconductive detector including at least one photoconductive element, each element being characterised by a responsivity variable in different degree dependent upon polarity of bias.
The term 'responsivity" used herein refers to that element output signal increment-an increment in voltage for current bias, or an increment in current for voltage bias-produced when unit illumination intensity of radiation of appropriate wavelength is incident upon each photoconductive element.
Such a detector may include at least one photoconductive element, each element being adapted to develop a graded non-uniform bias electric field along its length in response to applied bias, thereby having a polarity dependent responsivity. Each element thus may be shaped, having a width, a depth, or both, of different dimension at points along the length of the element. The width, depth, or both, may be of continuously varied dimension or the dimension may be varied abruptly e.g. stepwise.
Alternatively, each element may be provided with bias contacts of different width, to thus develop nonuniform field. As further alternative each element may have a graded dopant concentration, or graded surface treatment.
Contacts with different recombination properties-for example one contact being an accumulating contact, the other a nonaccumulating contact-may be used to produce the desired field non-uniformity.
When bias is applied to any one of the detector elements described above, and radiation of appropriate wavelength is incident upon the element, photocarriers are generated in the material bulk and are caused to drift in a direction dependent on the polarity of the bias. Thus for one polarity of the bias the photocarriers drift towards higher field, and for the other polarity they drift towards lower field. In a swept-out detector element, the signal contributed by each photocarrier is proportional to the potential difference through which it drifts on its way to the output contact. In each of the elements described above, the electric field is non-uniform and the potential V is dependent on carrier position (x, y).
Thus where the potential has a value VO at one end contact and a value V, at the other, V, > VO, the signal developed by the swept-out photocarriers will in one case be proportional to [ V(x, y)-V0 ] and in the other it will be proportional to # [ V1-V(x, y) ] . Since the electric field is graded, these two sum signals will differ~ the response is different for the two flow directions. However, in contrast to this, in the absence of illumination, each element behaves as a linear device, and there is no difference in response magnitude.
To advantage, a part of the area of each element may be obscured by an opaque mask to give added emphasis to the different photoresponse for positive and negative polarity bias.
Each element behaves in a manner similar to a half-wave rectifier, since it gives an enhanced signal on one half of the bias cycle. To advantage, therefore, complementary element may be connected together in pairs, or may be combined each pair as one to provide the analogue of a full wave rectifier.
Where the elements are shaped in width, appropriate shapes may be chosen to allow close packing of the elements in one dimension (1 -D) or two dimension (2-D) array.
When alternating bias is applied to an illuminated element, the element response signal voltage or a current signal-may be integrated to produce a DC signal. The level of this signal will depend on the intensity of the radiation incident on the element. However, in the absence of radiation, the element behaves as a linear device and the element response signal is of truly alternating character. Thus when this response signal is integrated, the output DC signal level is zero. It is thus possible to separate the photosignal and bias of the overall response signal.
Alternatively, useful photosignal may be extracted by harmonic separation, using either a high-pass filter to block signal at the bias frequency, or a phase-sensitive detector.
Brief description of the drawings In the accompanying drawings:~ Figure 1 is a plan drawing of a detector element of a modified shape; Figure 2 is a schematic block diagram of detector apparatus incorporating a detector including the element shown in the preceding figure; Figure 3 shows (a) a graph showing the responsivity of the element of figure 1 as a function of bias magnitude and polarity; (b) an applied bias waveform; and (c) a photosignal response waveform; Figure 4 is a block diagram of detector apparatus incorporating a detector including a doubled row array of interleaved elements; Figures 5 to 7 are plan drawings of detector elements of different design to the element shown in figure 1; and Figure 8 is a drawing of detector apparatus including a combination element.
Description of the embodiments Embodiments of the invention will now be described, by way of example only, with reference to the drawings.
There is shown in figure 1 a shaped detector element 2 of n-type cadmium mercury telluride infra-red sensitive material, material sensitive to radiation in the 8~14 y window band of the electromagnetic spectrum. It has gold metal contacts 3 and 5, one at either end. This element 2 has been etch-cut from a square 50 y wide, 50 y long and 10 y deep and has a narrow region 15 10 15#long-andabrnadregion 13 50 ,u wide by 35,u long. The element 2 has a typical resistivity of between 12 and 50 QO. The element 2 is thus designed to give on application of bias, between the bias contacts 3 and 5, a bias electric field that varies with distance along the length of the element, a field that is higher in the narrow region 15 and lower in the broad region.
As shown in figure 2, alternating bias, a current bias, is applied from a high impedance source 7 and the detector element response, a voltage response, is applied to the inputs of a high impedance output circuit 11, an integrating amplifier. The photosignal component of the response voltage is shown in figure 3(c). As can be seen from the graph, figure 3(a), the responsivity varies with both bias magnitude and bias polarity. For low values of bias magnitude, the responsivity in each quadrant is linear. In this regime, photocarriers are lost by recombination in the material bulk. At higher values of bias magnitude the responsivity varies non-linearly and in each quadrant a maximum responsivity Rrnax is attained assymptotically.This occurs as photocarrier recombination at the bias contacts becomes the dominant loss mechanism, the photocarrier being "swept-out" at one or other or both of the bias contacts 3 or 5. However, for one polarity of the bias, the contact 3, the contact adjacent the broad region 13 of the element 2, is at bias negative. The photocarriers are caused to drift towards this contact 3, a few only, those generated in the high field narrow region 15, drift in high field in the narrow region 15 and low field in the broad region 13, the greater remainder drift in only the low field in the broad region 13. The responsivity for this polarity is thus low. For the other polarity, the other contact 5 is at negative bias. The photocarriers generated in the element drift in the reverse direction and towards this contact 5.In this case, however, the majority of the photocarriers drift in both low field in the broad region 13 and in the high field in the narrow region 15. The responsivity for this opposite polarity is therefore higher. The difference in responsivity may be enhanced still further using an opaque mask 17 to cover the narrow region 15 of the element 2. In this way a responsivity ratio: Maximum responsivity (forward bias) Rmax (+) Maximum responsivity (reverse bias) may (~) of approximately 3.0 can be achieved for this design of element, though this can be varied widely by modifications of the device dimensions.
An alternating current of peak amplitude 1 to 5 mA allows ranging over a major portion of the responsivity characteristic (of figures 3(a) and 3(b)) and this is optimised to give good output signal strength for modest dissipation of power.
The element output response includes a larger linear alternating component on which the nonlinear photo-response in illumination is superimposed. The variation of the photosignal, which is shown in figure 3(c) thus has a waveform that is non-linear and clipped to different degree in successive half-cycles. When the response is passed through the integrating amplifier 11 the linear bias component of this response signal is integrated to zero. Because, however, the photosignal component of the response signal is assymmetric (see fig 3(c)) it gives, on integration, a finite DC signal. This signal is a linear function of the intensity of radiation incident upon the element 2 of the detector 1.
This method of biassing may be applied to a detector including a double row of shaped elements 2, as is shown in the apparatus of figure 4. The output bias contact 5 of each detector element 2 is connected to the input of an integrating amplifier 11. The output of each amplifier 11 is then fed to a delay line shift register 19 through a sample and hold (S/H) circuit 21. The sample and hold circuits 21 and the shift register are then triggered periodically to produce, at the output O/P of the register 1 9, a serial read-out signal. This read-out signal is then relayed to display or other monitoring circuitry.
Since the response signal developed by each element is non-linear, instead of being processed by integration, the signal may instead be passed to a high pass filter or to a phase-sensitive detector to separate one or more harmonics (2nd, 3rd etc) of the photosignal from the bias frequency signal.
Alternative designs of photoconductive element are shown in figures 5 to 7. In figure 5 the element 2 is of trapezoid shape, 50 ,u long with two contacts, one 1 0y wide, the other 60 ssu wide. In figure 6, the element 2 has a broad region 13 of trapezoid shape from which a narrow region 15 extends. The element 2 is 50 4 long and has two contacts one 10 ,u wide, the other 60 y wide. The narrow region 15 is 12 Ru long. In figure 7 the element is 50# y square but has a contact of restricted length, 6 4 wide, the other contact~50 y wide.Elements of these configurations of cadmium mercury telluride material the same as the example of figure 1, have been examined and it has been shown that these too exhibit an assymmetric responsivity.
The elements 2 may also be shaped to allow close packing in 2-D array as shown for the detector of figure 4. In this way the useful photoconductive material area can be optimised. The elements of this detector are overlaid by metal contacts 3 and 5 and the adjacent rows of elements are interleaved. The whole array may be etch-cut from a single slice of photoconductive material.
In figure 8 a combination element 2' is shown. This element 2' is in the form of a three contact device having one contact 3 to a broad region 13 of the element, and two further contacts 5 each one to a corresponding narrow region 1 5 of the element 2'. Bias is applied to the smaller two contacts 5. Each side of the detector operates on alternate half-cycles with the output added at the summing input of an amplifier 25. The linear bias signal component is cancelled in the input circuit 27 of the amplifier.

Claims (17)

Claims
1. A method of biassing a photoconductive detector wherein bias is applied to each element of the detector and a photosignal dependent on radiation intensity is extracted from the output signal produced by each element characterised in that the bias is an alternating bias; and, the photoconductive detector, to which the bias is applied, includes at least one photoconductive element having a responsivity variable in different degree dependent upon the polarity of the bias.
2. A method as claimed in claim 1 above wherein the output signal from each element is integrated to enable extraction of photosignal.
3. A method as claimed in claim 1 above wherein the photosignal for each element is extracted by harmonic separation.
4. A method of biassing a photoconductive detector performed substantially as described hereinbefore with reference to figure 2 of the accompanying drawings.
5. Apparatus for performing the method as claimed in claim 1 above, this apparatus including:~ a detector comprising at least one photoconductive element; a bias source, connected to the detector, for applying bias to each element of the detector; and, an output circuit connected to each element, responsive to electrical output signal from each element, to extract from each electrical output signal, a photosignal dependent on the intensity of radiation incident upon each element characterised in that the bias source is a source of alternating bias; and, the photoconductive detector includes at least one photoconductive element having a responsivity variable in different degree dependent upon the polarity of bias.
6. Apparatus as claimed in claim 5 above wherein each output circuit includes an integrator for producing a dc signal corresponding to photosignal.
7. Apparatus as claimed in claim 5 above wherein each output circuit includes a high pass filter for extracting photosignal.
8. Apparatus as claimed in claim 5 above wherein each output circuit includes a phasesensitive detector for extracting photosignal.
9. Apparatus as claimed in claim 5 above wherein the detector includes at least one pair of complementary elements, each pair being connected together or combined as one to provide full-wave rectification.
10. Apparatus, for performing the method as claimed in claim 1 above, constructed, arranged and adapted to operate substantially as described hereinbefore with reference to, and as shown in, figures 2, 4 or 8 of the accompanying drawings.
1 1. A photoconductive detector for use in the Apparatus as claimed in claim 5 above, including a plurality of like elements, each characterized by a responsivity variable in different degree dependent upon polarity of bias.
12. A detector as claimed in claim 1 1 wherein each element is adapted to develop a graded nonuniform bias electric field along its length in response to applied bias.
13. A detector as claimed in claim 12 wherein each element is shaped, having a width, a depth, or both, of different dimension at points along the length of the element.
14. A detector as claimed in claim 12 wherein each element has a pair of bias contacts of different width.
15. A detector as claimed in claim 12 wherein a part of the area of each element is obscured by an opaque mask.
1 6. A photoconductive detector for use in the Apparatus as claimed in claim 5 above, constructed, adapted and arranged to operate substantially as described hereinbefore with reference to and as shown in any one of the figures 4 to 7 of the accompanying drawings.
17. A photoconductive detector, for use in the Apparatus as claimed in claim 9, including a combination element, this element having a broad portion and a ground contact thereto, and two narrow portions, co-extensive with the broad portion, each having a bias contact.
GB08234079A 1981-12-07 1982-11-30 Photoconductive detectors with bias Expired GB2111198B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB08234079A GB2111198B (en) 1981-12-07 1982-11-30 Photoconductive detectors with bias

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB8136751 1981-12-07
GB08234079A GB2111198B (en) 1981-12-07 1982-11-30 Photoconductive detectors with bias

Publications (2)

Publication Number Publication Date
GB2111198A true GB2111198A (en) 1983-06-29
GB2111198B GB2111198B (en) 1985-06-05

Family

ID=26281470

Family Applications (1)

Application Number Title Priority Date Filing Date
GB08234079A Expired GB2111198B (en) 1981-12-07 1982-11-30 Photoconductive detectors with bias

Country Status (1)

Country Link
GB (1) GB2111198B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1988005984A2 (en) * 1987-01-30 1988-08-11 Hughes Aircraft Company Method and apparatus for multiplexing signals from electromagnetic radiation detectors

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1988005984A2 (en) * 1987-01-30 1988-08-11 Hughes Aircraft Company Method and apparatus for multiplexing signals from electromagnetic radiation detectors
WO1988005984A3 (en) * 1987-01-30 1988-10-06 Hughes Aircraft Co Method and apparatus for multiplexing signals from electromagnetic radiation detectors

Also Published As

Publication number Publication date
GB2111198B (en) 1985-06-05

Similar Documents

Publication Publication Date Title
US4521682A (en) Photodetecting device having Josephson junctions
US6218668B1 (en) Coplanar interdigitated grid detector with single electrode readout
US4142198A (en) Monolithic extrinsic silicon infrared detectors with an improved charge collection structure
EP0449559B1 (en) Radiation detection device and radiation
US4551623A (en) Photoconductive detector with an A/C bias and responsivity dependent upon the polarity of the bias
GB1596978A (en) Monolithic extrinsic silicon infrared detectors with charge-coupled readout
US4996432A (en) Radiation detector
US5391868A (en) Low power serial bias photoconductive detectors
Idzorek et al. Silicon photodiode characterization from 1 eV to 10 keV
US6331705B1 (en) Room temperature solid state gamma or X-ray detectors
GB2148646A (en) Photodetecting device
GB2111198A (en) Photoconductive detectors with bias
EP0002694B1 (en) Radiation detector
US6787757B2 (en) Apparatus and methods for generating an electronic signal responsive to selected light
US4535232A (en) Method of biasing a photoconductive detector and detector apparatus therefor
EP0566569A1 (en) Light detector
US4394676A (en) Photovoltaic radiation detector element
US4101924A (en) Semiconductor radiation detector
Zhu et al. A Novel α-Si (C): H Color Sensor Array
EP0003219A1 (en) Radiation sensing device
CN1131822A (en) Photodiode array
GB2111197A (en) Photoconductive detector bias
US5254850A (en) Method and apparatus for improving photoconductor signal output utilizing a geometrically modified shaped confinement region
Krueger et al. HgCdTe photodiodes with cutoff wavelengths of 17 um at 70 K for use in high-resolution interferometers for remote sensing
Vieira et al. LSP image sensors based on SiC heterostructures

Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20001130