GB2099601B - X-ray lithography - Google Patents

X-ray lithography

Info

Publication number
GB2099601B
GB2099601B GB8214160A GB8214160A GB2099601B GB 2099601 B GB2099601 B GB 2099601B GB 8214160 A GB8214160 A GB 8214160A GB 8214160 A GB8214160 A GB 8214160A GB 2099601 B GB2099601 B GB 2099601B
Authority
GB
United Kingdom
Prior art keywords
ray lithography
lithography
ray
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB8214160A
Other versions
GB2099601A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Applied Biosystems Inc
Original Assignee
Perkin Elmer Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US05/869,541 external-priority patent/US4215192A/en
Application filed by Perkin Elmer Corp filed Critical Perkin Elmer Corp
Publication of GB2099601A publication Critical patent/GB2099601A/en
Application granted granted Critical
Publication of GB2099601B publication Critical patent/GB2099601B/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70858—Environment aspects, e.g. pressure of beam-path gas, temperature
    • G03F7/70866—Environment aspects, e.g. pressure of beam-path gas, temperature of mask or workpiece
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/2037—Exposure with X-ray radiation or corpuscular radiation, through a mask with a pattern opaque to that radiation
    • G03F7/2039—X-ray radiation
GB8214160A 1978-01-16 1979-01-12 X-ray lithography Expired GB2099601B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US05/869,541 US4215192A (en) 1978-01-16 1978-01-16 X-ray lithography apparatus and method of use
GB791199A GB2012452B (en) 1978-01-16 1979-01-12 Lithography

Publications (2)

Publication Number Publication Date
GB2099601A GB2099601A (en) 1982-12-08
GB2099601B true GB2099601B (en) 1983-06-02

Family

ID=26270210

Family Applications (1)

Application Number Title Priority Date Filing Date
GB8214160A Expired GB2099601B (en) 1978-01-16 1979-01-12 X-ray lithography

Country Status (1)

Country Link
GB (1) GB2099601B (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2383849A (en) * 2002-01-03 2003-07-09 Zarlink Semiconductor Ltd Resist development

Also Published As

Publication number Publication date
GB2099601A (en) 1982-12-08

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 19930112