GB2081008B - Semiconductor annealing - Google Patents

Semiconductor annealing

Info

Publication number
GB2081008B
GB2081008B GB8024758A GB8024758A GB2081008B GB 2081008 B GB2081008 B GB 2081008B GB 8024758 A GB8024758 A GB 8024758A GB 8024758 A GB8024758 A GB 8024758A GB 2081008 B GB2081008 B GB 2081008B
Authority
GB
United Kingdom
Prior art keywords
semiconductor annealing
annealing
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB8024758A
Other versions
GB2081008A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ITT Industries Ltd
Original Assignee
ITT Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ITT Industries Ltd filed Critical ITT Industries Ltd
Priority to GB8024758A priority Critical patent/GB2081008B/en
Priority to US06/195,688 priority patent/US4350537A/en
Priority to EP80303617A priority patent/EP0027712B1/en
Priority to DE8080303617T priority patent/DE3065706D1/en
Priority to IE2151/80A priority patent/IE50301B1/en
Publication of GB2081008A publication Critical patent/GB2081008A/en
Application granted granted Critical
Publication of GB2081008B publication Critical patent/GB2081008B/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/26—Bombardment with radiation
    • H01L21/263—Bombardment with radiation with high-energy radiation
    • H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/324—Thermal treatment for modifying the properties of semiconductor bodies, e.g. annealing, sintering
GB8024758A 1979-10-17 1980-07-29 Semiconductor annealing Expired GB2081008B (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
GB8024758A GB2081008B (en) 1980-07-29 1980-07-29 Semiconductor annealing
US06/195,688 US4350537A (en) 1979-10-17 1980-10-09 Semiconductor annealing by pulsed heating
EP80303617A EP0027712B1 (en) 1979-10-17 1980-10-14 Semiconductor annealing
DE8080303617T DE3065706D1 (en) 1979-10-17 1980-10-14 Semiconductor annealing
IE2151/80A IE50301B1 (en) 1979-10-17 1980-10-16 Semiconductor annealing

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB8024758A GB2081008B (en) 1980-07-29 1980-07-29 Semiconductor annealing

Publications (2)

Publication Number Publication Date
GB2081008A GB2081008A (en) 1982-02-10
GB2081008B true GB2081008B (en) 1984-09-26

Family

ID=10515106

Family Applications (1)

Application Number Title Priority Date Filing Date
GB8024758A Expired GB2081008B (en) 1979-10-17 1980-07-29 Semiconductor annealing

Country Status (1)

Country Link
GB (1) GB2081008B (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2156383A (en) * 1984-02-06 1985-10-09 Plessey Co Plc Infra-red material structures
GB2160355B (en) * 1984-05-16 1988-01-13 Plessey Co Plc Annealing semiconductor devices

Also Published As

Publication number Publication date
GB2081008A (en) 1982-02-10

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Legal Events

Date Code Title Description
732 Registration of transactions, instruments or events in the register (sect. 32/1977)
732 Registration of transactions, instruments or events in the register (sect. 32/1977)
732E Amendments to the register in respect of changes of name or changes affecting rights (sect. 32/1977)
732E Amendments to the register in respect of changes of name or changes affecting rights (sect. 32/1977)
PE20 Patent expired after termination of 20 years

Effective date: 20000728