GB2060711B - Processing electrically conductive material by glow discharge - Google Patents

Processing electrically conductive material by glow discharge

Info

Publication number
GB2060711B
GB2060711B GB8024868A GB8024868A GB2060711B GB 2060711 B GB2060711 B GB 2060711B GB 8024868 A GB8024868 A GB 8024868A GB 8024868 A GB8024868 A GB 8024868A GB 2060711 B GB2060711 B GB 2060711B
Authority
GB
United Kingdom
Prior art keywords
conductive material
electrically conductive
glow discharge
processing electrically
processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB8024868A
Other versions
GB2060711A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to GB8024868A priority Critical patent/GB2060711B/en
Publication of GB2060711A publication Critical patent/GB2060711A/en
Application granted granted Critical
Publication of GB2060711B publication Critical patent/GB2060711B/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32018—Glow discharge
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/36—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
GB8024868A 1980-07-30 1980-07-30 Processing electrically conductive material by glow discharge Expired GB2060711B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB8024868A GB2060711B (en) 1980-07-30 1980-07-30 Processing electrically conductive material by glow discharge

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB8024868A GB2060711B (en) 1980-07-30 1980-07-30 Processing electrically conductive material by glow discharge

Publications (2)

Publication Number Publication Date
GB2060711A GB2060711A (en) 1981-05-07
GB2060711B true GB2060711B (en) 1984-04-04

Family

ID=10515133

Family Applications (1)

Application Number Title Priority Date Filing Date
GB8024868A Expired GB2060711B (en) 1980-07-30 1980-07-30 Processing electrically conductive material by glow discharge

Country Status (1)

Country Link
GB (1) GB2060711B (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2551581A1 (en) * 1983-09-07 1985-03-08 Centre Nat Rech Scient Method and device for heat treatment of various materials by a homogeneous plasma of large volume.
GB2261227B (en) * 1991-11-08 1995-01-11 Univ Hull Surface treatment of metals
RU2048601C1 (en) * 1993-12-20 1995-11-20 Рыжов Николай Михайлович Method and apparatus to diagnose process of steels and alloys chemical thermal treatment in glow discharge
GB2336603A (en) * 1998-04-23 1999-10-27 Metaltech Limited A method and apparatus for plasma boronising

Also Published As

Publication number Publication date
GB2060711A (en) 1981-05-07

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Legal Events

Date Code Title Description
PE20 Patent expired after termination of 20 years

Effective date: 20000729