GB202211560D0 - Vacuum pump - Google Patents

Vacuum pump

Info

Publication number
GB202211560D0
GB202211560D0 GBGB2211560.4A GB202211560A GB202211560D0 GB 202211560 D0 GB202211560 D0 GB 202211560D0 GB 202211560 A GB202211560 A GB 202211560A GB 202211560 D0 GB202211560 D0 GB 202211560D0
Authority
GB
United Kingdom
Prior art keywords
vacuum pump
vacuum
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
GBGB2211560.4A
Other versions
GB2621341A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Leybold GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold GmbH filed Critical Leybold GmbH
Priority to GB2211560.4A priority Critical patent/GB2621341A/en
Publication of GB202211560D0 publication Critical patent/GB202211560D0/en
Priority to PCT/EP2023/071832 priority patent/WO2024033309A1/en
Publication of GB2621341A publication Critical patent/GB2621341A/en
Pending legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/048—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps comprising magnetic bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/051—Axial thrust balancing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings
    • F04D29/058—Bearings magnetic; electromagnetic

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
GB2211560.4A 2022-08-09 2022-08-09 Vacuum pump Pending GB2621341A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
GB2211560.4A GB2621341A (en) 2022-08-09 2022-08-09 Vacuum pump
PCT/EP2023/071832 WO2024033309A1 (en) 2022-08-09 2023-08-07 Vacuum pump with a magnetic bearing

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB2211560.4A GB2621341A (en) 2022-08-09 2022-08-09 Vacuum pump

Publications (2)

Publication Number Publication Date
GB202211560D0 true GB202211560D0 (en) 2022-09-21
GB2621341A GB2621341A (en) 2024-02-14

Family

ID=84546131

Family Applications (1)

Application Number Title Priority Date Filing Date
GB2211560.4A Pending GB2621341A (en) 2022-08-09 2022-08-09 Vacuum pump

Country Status (2)

Country Link
GB (1) GB2621341A (en)
WO (1) WO2024033309A1 (en)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2805317B2 (en) * 1988-12-15 1998-09-30 セイコー精機株式会社 Turbo molecular pump
JP3842848B2 (en) * 1996-07-22 2006-11-08 三菱重工業株式会社 Turbo molecular pump
JP2002257137A (en) * 2001-02-27 2002-09-11 Koyo Seiko Co Ltd Magnetic bearing device
JP2018194079A (en) * 2017-05-17 2018-12-06 三菱電機株式会社 Thrust magnetic bearing and blower

Also Published As

Publication number Publication date
GB2621341A (en) 2024-02-14
WO2024033309A1 (en) 2024-02-15

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