GB202002394D0 - Capture structure for non-evaporable getter pumps - Google Patents

Capture structure for non-evaporable getter pumps

Info

Publication number
GB202002394D0
GB202002394D0 GBGB2002394.1A GB202002394A GB202002394D0 GB 202002394 D0 GB202002394 D0 GB 202002394D0 GB 202002394 A GB202002394 A GB 202002394A GB 202002394 D0 GB202002394 D0 GB 202002394D0
Authority
GB
United Kingdom
Prior art keywords
capture structure
evaporable getter
getter pumps
pumps
evaporable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
GBGB2002394.1A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards Ltd
Original Assignee
Edwards Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Edwards Ltd filed Critical Edwards Ltd
Priority to GBGB2002394.1A priority Critical patent/GB202002394D0/en
Publication of GB202002394D0 publication Critical patent/GB202002394D0/en
Priority to CN202080039999.4A priority patent/CN113924417A/en
Priority to PCT/EP2020/064964 priority patent/WO2020239975A1/en
Priority to JP2021570362A priority patent/JP2022534259A/en
Priority to EP20730223.3A priority patent/EP3976973A1/en
Priority to US17/612,869 priority patent/US20220120282A1/en
Ceased legal-status Critical Current

Links

GBGB2002394.1A 2019-05-29 2020-02-20 Capture structure for non-evaporable getter pumps Ceased GB202002394D0 (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
GBGB2002394.1A GB202002394D0 (en) 2020-02-20 2020-02-20 Capture structure for non-evaporable getter pumps
CN202080039999.4A CN113924417A (en) 2019-05-29 2020-05-29 Turbo-molecular pump, vacuum pumping system and method for evacuating vacuum chamber
PCT/EP2020/064964 WO2020239975A1 (en) 2019-05-29 2020-05-29 A turbomolecular pump, a vacuum pumping system and a method of evacuating a vacuum chamber
JP2021570362A JP2022534259A (en) 2019-05-29 2020-05-29 Turbomolecular pump, vacuum pump system, and method of evacuating a vacuum chamber
EP20730223.3A EP3976973A1 (en) 2019-05-29 2020-05-29 A turbomolecular pump, a vacuum pumping system and a method of evacuating a vacuum chamber
US17/612,869 US20220120282A1 (en) 2019-05-29 2020-05-29 A turbomolecular pump, a vacuum pumping system and a method of evacuating a vacuum chamber

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GBGB2002394.1A GB202002394D0 (en) 2020-02-20 2020-02-20 Capture structure for non-evaporable getter pumps

Publications (1)

Publication Number Publication Date
GB202002394D0 true GB202002394D0 (en) 2020-04-08

Family

ID=70108401

Family Applications (1)

Application Number Title Priority Date Filing Date
GBGB2002394.1A Ceased GB202002394D0 (en) 2019-05-29 2020-02-20 Capture structure for non-evaporable getter pumps

Country Status (1)

Country Link
GB (1) GB202002394D0 (en)

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Legal Events

Date Code Title Description
AT Applications terminated before publication under section 16(1)