GB201818865D0 - Phase difference measurement - Google Patents

Phase difference measurement

Info

Publication number
GB201818865D0
GB201818865D0 GBGB1818865.6A GB201818865A GB201818865D0 GB 201818865 D0 GB201818865 D0 GB 201818865D0 GB 201818865 A GB201818865 A GB 201818865A GB 201818865 D0 GB201818865 D0 GB 201818865D0
Authority
GB
United Kingdom
Prior art keywords
phase difference
difference measurement
measurement
phase
difference
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
GBGB1818865.6A
Other versions
GB2579083A (en
GB2579083B (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oxford Instruments Nanotechnology Tools Ltd
Original Assignee
Oxford Instruments Nanotechnology Tools Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oxford Instruments Nanotechnology Tools Ltd filed Critical Oxford Instruments Nanotechnology Tools Ltd
Priority to GB1818865.6A priority Critical patent/GB2579083B/en
Publication of GB201818865D0 publication Critical patent/GB201818865D0/en
Publication of GB2579083A publication Critical patent/GB2579083A/en
Application granted granted Critical
Publication of GB2579083B publication Critical patent/GB2579083B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/32174—Circuits specially adapted for controlling the RF discharge
    • H01J37/32183—Matching circuits
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R25/00—Arrangements for measuring phase angle between a voltage and a current or between voltages or currents
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/321—Radio frequency generated discharge the radio frequency energy being inductively coupled to the plasma
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32917—Plasma diagnostics
    • H01J37/32926—Software, data control or modelling
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32917—Plasma diagnostics
    • H01J37/32935—Monitoring and controlling tubes by information coming from the object and/or discharge
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R25/00—Arrangements for measuring phase angle between a voltage and a current or between voltages or currents
    • G01R25/005—Circuits for comparing several input signals and for indicating the result of this comparison, e.g. equal, different, greater, smaller, or for passing one of the input signals as output signal
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H7/00—Multiple-port networks comprising only passive electrical elements as network components
    • H03H7/38—Impedance-matching networks
    • H03H7/40—Automatic matching of load impedance to source impedance
GB1818865.6A 2018-11-20 2018-11-20 Phase difference measurement Active GB2579083B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB1818865.6A GB2579083B (en) 2018-11-20 2018-11-20 Phase difference measurement

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB1818865.6A GB2579083B (en) 2018-11-20 2018-11-20 Phase difference measurement

Publications (3)

Publication Number Publication Date
GB201818865D0 true GB201818865D0 (en) 2019-01-02
GB2579083A GB2579083A (en) 2020-06-10
GB2579083B GB2579083B (en) 2021-03-17

Family

ID=64739965

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1818865.6A Active GB2579083B (en) 2018-11-20 2018-11-20 Phase difference measurement

Country Status (1)

Country Link
GB (1) GB2579083B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113267679A (en) * 2021-04-01 2021-08-17 无锡先导智能装备股份有限公司 Phase signal detection/control method, circuit, control device and medium

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4400664A (en) * 1981-05-26 1983-08-23 Motorola, Inc. Digital phase detector
US6046594A (en) * 1997-02-11 2000-04-04 Advanced Energy Voorhees, Inc. Method and apparatus for monitoring parameters of an RF powered load in the presence of harmonics
US9784777B2 (en) * 2014-09-24 2017-10-10 Qualcomm Incorporated Methods and systems for measuring power in wireless power systems

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113267679A (en) * 2021-04-01 2021-08-17 无锡先导智能装备股份有限公司 Phase signal detection/control method, circuit, control device and medium
CN113267679B (en) * 2021-04-01 2024-05-03 无锡先导智能装备股份有限公司 Phase signal detection/control method, circuit, control device and medium

Also Published As

Publication number Publication date
GB2579083A (en) 2020-06-10
GB2579083B (en) 2021-03-17

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