GB201813533D0 - Vacuum pumping and/or abatement system - Google Patents

Vacuum pumping and/or abatement system

Info

Publication number
GB201813533D0
GB201813533D0 GBGB1813533.5A GB201813533A GB201813533D0 GB 201813533 D0 GB201813533 D0 GB 201813533D0 GB 201813533 A GB201813533 A GB 201813533A GB 201813533 D0 GB201813533 D0 GB 201813533D0
Authority
GB
United Kingdom
Prior art keywords
vacuum pumping
abatement system
abatement
pumping
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
GBGB1813533.5A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards Ltd
Original Assignee
Edwards Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Edwards Ltd filed Critical Edwards Ltd
Priority to GBGB1813533.5A priority Critical patent/GB201813533D0/en
Publication of GB201813533D0 publication Critical patent/GB201813533D0/en
Ceased legal-status Critical Current

Links

GBGB1813533.5A 2018-08-20 2018-08-20 Vacuum pumping and/or abatement system Ceased GB201813533D0 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GBGB1813533.5A GB201813533D0 (en) 2018-08-20 2018-08-20 Vacuum pumping and/or abatement system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GBGB1813533.5A GB201813533D0 (en) 2018-08-20 2018-08-20 Vacuum pumping and/or abatement system

Publications (1)

Publication Number Publication Date
GB201813533D0 true GB201813533D0 (en) 2018-10-03

Family

ID=63668239

Family Applications (1)

Application Number Title Priority Date Filing Date
GBGB1813533.5A Ceased GB201813533D0 (en) 2018-08-20 2018-08-20 Vacuum pumping and/or abatement system

Country Status (1)

Country Link
GB (1) GB201813533D0 (en)

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Legal Events

Date Code Title Description
AT Applications terminated before publication under section 16(1)