GB201514287D0 - Plasma generator - Google Patents
Plasma generatorInfo
- Publication number
- GB201514287D0 GB201514287D0 GBGB1514287.0A GB201514287A GB201514287D0 GB 201514287 D0 GB201514287 D0 GB 201514287D0 GB 201514287 A GB201514287 A GB 201514287A GB 201514287 D0 GB201514287 D0 GB 201514287D0
- Authority
- GB
- United Kingdom
- Prior art keywords
- plasma generator
- plasma
- generator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/26—Plasma torches
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
- H05H1/2443—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes the plasma fluid flowing through a dielectric tube
- H05H1/245—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes the plasma fluid flowing through a dielectric tube the plasma being activated using internal electrodes
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
- H05H1/2443—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes the plasma fluid flowing through a dielectric tube
- H05H1/2465—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes the plasma fluid flowing through a dielectric tube the plasma being activated by inductive coupling, e.g. using coiled electrodes
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
- H05H1/4645—Radiofrequency discharges
- H05H1/4652—Radiofrequency discharges using inductive coupling means, e.g. coils
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H2245/00—Applications of plasma devices
- H05H2245/10—Treatment of gases
- H05H2245/17—Exhaust gases
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Electromagnetism (AREA)
- Fluid Mechanics (AREA)
- Plasma Technology (AREA)
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB1514287.0A GB2541214A (en) | 2015-08-12 | 2015-08-12 | Plasma generator |
TW105122477A TW201711530A (en) | 2015-08-12 | 2016-07-15 | Plasma generator |
PCT/GB2016/052283 WO2017025709A1 (en) | 2015-08-12 | 2016-07-26 | Plasma generator |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB1514287.0A GB2541214A (en) | 2015-08-12 | 2015-08-12 | Plasma generator |
Publications (2)
Publication Number | Publication Date |
---|---|
GB201514287D0 true GB201514287D0 (en) | 2015-09-23 |
GB2541214A GB2541214A (en) | 2017-02-15 |
Family
ID=54200637
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB1514287.0A Withdrawn GB2541214A (en) | 2015-08-12 | 2015-08-12 | Plasma generator |
Country Status (3)
Country | Link |
---|---|
GB (1) | GB2541214A (en) |
TW (1) | TW201711530A (en) |
WO (1) | WO2017025709A1 (en) |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5587226A (en) * | 1993-01-28 | 1996-12-24 | Regents, University Of California | Porcelain-coated antenna for radio-frequency driven plasma source |
US6187072B1 (en) * | 1995-09-25 | 2001-02-13 | Applied Materials, Inc. | Method and apparatus for reducing perfluorocompound gases from substrate processing equipment emissions |
US5877471A (en) * | 1997-06-11 | 1999-03-02 | The Regents Of The University Of California | Plasma torch having a cooled shield assembly |
KR100483886B1 (en) * | 2002-05-17 | 2005-04-20 | (주)엔피씨 | Plasma reaction apparatus |
JP5458253B2 (en) * | 2007-12-14 | 2014-04-02 | 国立大学法人佐賀大学 | Plasma sterilizer |
DE102011008575A1 (en) * | 2011-01-14 | 2012-07-19 | J-Plasma Gmbh | Inductive coupled plasma burner comprises a tubular burner channel, an induction coil surrounding the burner channel and a dielectric envelope having a closed or a porous structure |
KR101853370B1 (en) * | 2011-09-16 | 2018-04-30 | 세메스 주식회사 | Antenna structure and plasma generating device |
-
2015
- 2015-08-12 GB GB1514287.0A patent/GB2541214A/en not_active Withdrawn
-
2016
- 2016-07-15 TW TW105122477A patent/TW201711530A/en unknown
- 2016-07-26 WO PCT/GB2016/052283 patent/WO2017025709A1/en active Application Filing
Also Published As
Publication number | Publication date |
---|---|
GB2541214A (en) | 2017-02-15 |
WO2017025709A1 (en) | 2017-02-16 |
TW201711530A (en) | 2017-03-16 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
WAP | Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1) |