GB201514287D0 - Plasma generator - Google Patents

Plasma generator

Info

Publication number
GB201514287D0
GB201514287D0 GBGB1514287.0A GB201514287A GB201514287D0 GB 201514287 D0 GB201514287 D0 GB 201514287D0 GB 201514287 A GB201514287 A GB 201514287A GB 201514287 D0 GB201514287 D0 GB 201514287D0
Authority
GB
United Kingdom
Prior art keywords
plasma generator
plasma
generator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
GBGB1514287.0A
Other versions
GB2541214A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards Ltd
Original Assignee
Edwards Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Edwards Ltd filed Critical Edwards Ltd
Priority to GB1514287.0A priority Critical patent/GB2541214A/en
Publication of GB201514287D0 publication Critical patent/GB201514287D0/en
Priority to TW105122477A priority patent/TW201711530A/en
Priority to PCT/GB2016/052283 priority patent/WO2017025709A1/en
Publication of GB2541214A publication Critical patent/GB2541214A/en
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
    • H05H1/2443—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes the plasma fluid flowing through a dielectric tube
    • H05H1/245—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes the plasma fluid flowing through a dielectric tube the plasma being activated using internal electrodes
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
    • H05H1/2443—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes the plasma fluid flowing through a dielectric tube
    • H05H1/2465—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes the plasma fluid flowing through a dielectric tube the plasma being activated by inductive coupling, e.g. using coiled electrodes
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
    • H05H1/4645—Radiofrequency discharges
    • H05H1/4652—Radiofrequency discharges using inductive coupling means, e.g. coils
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H2245/00—Applications of plasma devices
    • H05H2245/10—Treatment of gases
    • H05H2245/17—Exhaust gases

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Electromagnetism (AREA)
  • Fluid Mechanics (AREA)
  • Plasma Technology (AREA)
GB1514287.0A 2015-08-12 2015-08-12 Plasma generator Withdrawn GB2541214A (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
GB1514287.0A GB2541214A (en) 2015-08-12 2015-08-12 Plasma generator
TW105122477A TW201711530A (en) 2015-08-12 2016-07-15 Plasma generator
PCT/GB2016/052283 WO2017025709A1 (en) 2015-08-12 2016-07-26 Plasma generator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB1514287.0A GB2541214A (en) 2015-08-12 2015-08-12 Plasma generator

Publications (2)

Publication Number Publication Date
GB201514287D0 true GB201514287D0 (en) 2015-09-23
GB2541214A GB2541214A (en) 2017-02-15

Family

ID=54200637

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1514287.0A Withdrawn GB2541214A (en) 2015-08-12 2015-08-12 Plasma generator

Country Status (3)

Country Link
GB (1) GB2541214A (en)
TW (1) TW201711530A (en)
WO (1) WO2017025709A1 (en)

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5587226A (en) * 1993-01-28 1996-12-24 Regents, University Of California Porcelain-coated antenna for radio-frequency driven plasma source
US6187072B1 (en) * 1995-09-25 2001-02-13 Applied Materials, Inc. Method and apparatus for reducing perfluorocompound gases from substrate processing equipment emissions
US5877471A (en) * 1997-06-11 1999-03-02 The Regents Of The University Of California Plasma torch having a cooled shield assembly
KR100483886B1 (en) * 2002-05-17 2005-04-20 (주)엔피씨 Plasma reaction apparatus
JP5458253B2 (en) * 2007-12-14 2014-04-02 国立大学法人佐賀大学 Plasma sterilizer
DE102011008575A1 (en) * 2011-01-14 2012-07-19 J-Plasma Gmbh Inductive coupled plasma burner comprises a tubular burner channel, an induction coil surrounding the burner channel and a dielectric envelope having a closed or a porous structure
KR101853370B1 (en) * 2011-09-16 2018-04-30 세메스 주식회사 Antenna structure and plasma generating device

Also Published As

Publication number Publication date
GB2541214A (en) 2017-02-15
WO2017025709A1 (en) 2017-02-16
TW201711530A (en) 2017-03-16

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Legal Events

Date Code Title Description
WAP Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1)