GB201503886D0 - White light interferometer - Google Patents

White light interferometer

Info

Publication number
GB201503886D0
GB201503886D0 GB201503886A GB201503886A GB201503886D0 GB 201503886 D0 GB201503886 D0 GB 201503886D0 GB 201503886 A GB201503886 A GB 201503886A GB 201503886 A GB201503886 A GB 201503886A GB 201503886 D0 GB201503886 D0 GB 201503886D0
Authority
GB
United Kingdom
Prior art keywords
white light
light interferometer
interferometer
white
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
GB201503886A
Other versions
GB2536218A (en
GB2536218B (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
REDLUX Ltd
Original Assignee
REDLUX Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by REDLUX Ltd filed Critical REDLUX Ltd
Priority to GB1503886.2A priority Critical patent/GB2536218B/en
Publication of GB201503886D0 publication Critical patent/GB201503886D0/en
Publication of GB2536218A publication Critical patent/GB2536218A/en
Application granted granted Critical
Publication of GB2536218B publication Critical patent/GB2536218B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02034—Interferometers characterised by particularly shaped beams or wavefronts
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02016—Interferometers characterised by the beam path configuration contacting two or more objects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02017—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations
    • G01B9/02019—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations contacting different points on same face of object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02034—Interferometers characterised by particularly shaped beams or wavefronts
    • G01B9/02038—Shaping the wavefront, e.g. generating a spherical wavefront
    • G01B9/02039—Shaping the wavefront, e.g. generating a spherical wavefront by matching the wavefront with a particular object surface shape
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/0209—Low-coherence interferometers

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
GB1503886.2A 2015-03-07 2015-03-07 White light interferometer Active GB2536218B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB1503886.2A GB2536218B (en) 2015-03-07 2015-03-07 White light interferometer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB1503886.2A GB2536218B (en) 2015-03-07 2015-03-07 White light interferometer

Publications (3)

Publication Number Publication Date
GB201503886D0 true GB201503886D0 (en) 2015-04-22
GB2536218A GB2536218A (en) 2016-09-14
GB2536218B GB2536218B (en) 2018-08-15

Family

ID=52998564

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1503886.2A Active GB2536218B (en) 2015-03-07 2015-03-07 White light interferometer

Country Status (1)

Country Link
GB (1) GB2536218B (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SK9405Y1 (en) * 2021-04-07 2021-12-20 Žilinská Univerzita V Žiline Optical interferometer with conical and cylindrical reflecting surface

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AT164460B (en) * 1947-12-23 1949-11-10 Karl Dr Holecek Method for the direct and complete measurement or testing of the form defects on surfaces of rotation or other regularly designed surfaces, especially inner surfaces, by means of light interference
US4869593A (en) * 1988-04-22 1989-09-26 Zygo Corporation Interferometric surface profiler
WO2005114096A2 (en) * 2004-05-18 2005-12-01 Zygo Corporation Methods and systems for determining optical properties using low-coherence interference signals
BRMU8402588U (en) * 2004-10-26 2006-06-06 Photonita Ltda Incoherent light interferometer for measuring internal and external cylindrical and quasi-cylindrical surfaces
WO2009079334A2 (en) * 2007-12-14 2009-06-25 Zygo Corporation Analyzing surface structure using scanning interferometry
TWI418762B (en) * 2010-03-29 2013-12-11 Univ Nat Taiwan Apparatus for low coherence optical imaging
US9377292B2 (en) * 2013-08-06 2016-06-28 Zygo Corporation Interferometry employing refractive index dispersion broadening of interference signals

Also Published As

Publication number Publication date
GB2536218A (en) 2016-09-14
GB2536218B (en) 2018-08-15

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