GB1568051A - Zener diodes - Google Patents

Description

(54) ZENER DIODES (71) We, NATIONAL RESEARCH DEVELOPMENT CORPORATION, a British Corporation established by Statute, of Kingsgate House, 66-74 Victoria Street, London, S.W.l., do hereby declare the invention, for which we pray that a patent may be granted to us, and the method by which it is to be performed, to be particularly described in and by the following statement:- This invention relates to zener diodes.

Zener diodes comprise pn junction diodes which when reverse biassed provide reference voltages across their terminals which are substantially independent of current. The reference voltage is the breakdown voltage of the diode and this is produced by one or both of two mechanisms, namely tunnelling and avalanche multiplication. Tunnelling occurs across a pn junction in the presence of very high electric fields, approaching 1 MV/cm in silicon, whereas avalanche multiplication occurs at lower values of electric field.

Both of the above mechanisms are temperature sensitive and the temperature coefficients are of opposite sign. In conventional diodes one or other phenomenon predominates depending on the breakdown voltage of the diode so that for a given breakdown voltage the sign and magnitude of the temperature coefficient is substantially invariable.

It is an object of the invention to provide a zener diode in which the temperature coefficient is independent of the breakdown voltage.

According to the invention a zener diode comprises a pn junction having two successive n-type layers on one side of the junction which two layers are differently doped to each other, the layer adjacent the junction being of such thickness and of higher concentration than the other n-type layer so that breakdown in said adjacent layer is due at least in part to a tunnelling mechanism and in part to avalanche multiplication to cause current flow through said junction so that said adjacent layer determines the temperature coefficient of the breakdown voltage and the other layer contributing to the total value of the breakdown voltage.

In order that the invention may be more fully understood reference will now be made to the accompanying drawing in which: Figure 1 illustrates diagrammatically a zener diode embodying the invention, and Figure 2 is a diagram of electric field distribution across the diode.

Referring now to Figure 1 there is shown therein a zener diode comprising a pn junction 1 on one side of which there is a ptype layer 2 and on the other side of which there is an n-type region which is subdivided into a first layer 3 adjacent junction 1 and a further layer 4 adjacent layer 3. Layers 3 and 4 are doped n-type but with different doping concentrations. Layer 3 is more heavily doped than layer 4. Junction I and layers 3 and 4 are formed on a substrate 5 doped n+. The diode has two terminals 6 and 7 at opposite ends thereof and when a reverse bias potential is applied across the terminals the voltage between them rises to a predetermined value which is termed the breakdown voltage and thereafter current will flow between the terminals of magnitude such that the breakdown voltage is not appreciably exceeded. The diode thus acts as a voltage reference.

When the breakdown voltage is reached the electric field distribution across the junction 1 and layers 3 and 4 is as shown in Figure 2. The total area under the curve is the magnitude of the breakdown voltage and it will be seen that the electric field distribution is in two parts. One part is across layer 3 and reaches a peak value at junction 1 whereas the field across layer 4 rises to a much lower value. The temperature coefficient of the breakdown voltage depends on the peak value to which the field rises at the junction. If this is above about 600 kV/cm in silicon breakdown includes a contribution by tunnelling whereas breakdown by avalanche multiplication depends on the width of the depletion layer 3 in which in silicon the electric field is above 350 kV/cm. The steepness of the slope of the electric field across layer 3 depends on the density of the charge introduced into layer 3. By this means the temperature coefficient of the breakdown voltage of the diode illustrated is controlled by the total charge introduced into layer 3 and its width. In a conventional zener diode these factors would determine the value of the breakdown voltage which would thus be invariably related to the temperature coefficient. However, in the diode described above the additional layer 4 provides a further contribution to the breakdown voltage as evidenced by the additional area under the curve in Figure 2 so that the two parameters of temperature coefficients and breakdown voltage can be independently determined. In layer 4 the field is so low that avalance breakdown and tunnelling are both negligible.

As an example, if a zero temperature coefficient of breakdown voltage is desired in a conventional zener diode this will mean that the zener diode must have a breakdown voltage of about 5+ volts in silicon. With such a diode the maximum field at the pn junction is 850 kV/cm and with a doping density of 4.5x10'7/cc the total depletion layer width of such a structure is about 0.12 microns.

Utilising the above figures a zener diode can be fabricated for any value of breakdown voltage and still having a zero temperature coefficient of breakdown voltage. Depletion layer 3 has a doping density of 4.5x10'7/cc and a width of 0.08 microns. The voltage drop across layer 3 is then about 5 volts. The additional voltage drop that is required is provided by layer 4.

As an example for a voltage drop of 20 volts in layer 4, thus giving a total breakdown voltage of 25 volts, layer 4 has a width of 1.75 microns and a doping density of 9x 1015 per cc. The field in layer 3 drops from about 850 kV/cm to 250 kV/cm and the field in layer 4 drops from the latter value to zero.

The field distribution in such a device is shown in Figure 2.

It will be understood that the above example can be readily modified to provide a greater or lesser value of breakdown voltage than 25 volts and if desired a temperature coefficient of breakdown voltage which is non-zero. By providing layer 3 with a doping concentration which is less than the doping concentration of layer 4 a diode is produced which has a breakdown voltage which is lower than that of a conventional zener diode with the same temperature coefficient.

To fabricate a diode embodying the invention ion implantation techniques can be used and the junction can be formed by very shallow diffusion. The layer in which the additional voltage is developed can comprise an epitaxial layer fabricated by conventional methods.

WHAT WE CLAIM IS: 1. A zener diode comprising a pn junction having two successive n-type layers on one side of the junction which two layers are differently doped to each other, the layer adjacent the junction being of such thickness and of higher concentration than the other n-type layer so that breakdown in said adjacent layer is due at least in part to a tunnelling mechanism and in part to avalanche multiplication to cause current flow through said junction so that said adjacent layer determines the temperature coefficient of the breakdown voltage and the other layer contributing to the total value of the breakdown voltage.

2. The diode as claimed in Claim 1 in which the said layers are formed on a substrate.

3. The diode as claimed in Claim 2 in which the said substrate is doped n+.

4. The diode as claimed in any one of the preceding claims in which the thickness and doping concentration of the n-type layer adjacent the junction are such that the temperature coefficient of the breakdown voltage is zero.

5. The diode as claimed in Claim 4, in which the thickness of the said adjacent layer is approximately 0.08 microns and the doping concentration is approximately 4.5x 1017/cc.

6. A zener diode substantially as described herein with reference to the drawing accompanying the complete specification.

**WARNING** end of DESC field may overlap start of CLMS **.

Claims (6)

**WARNING** start of CLMS field may overlap end of DESC **. electric field is above 350 kV/cm. The steepness of the slope of the electric field across layer 3 depends on the density of the charge introduced into layer 3. By this means the temperature coefficient of the breakdown voltage of the diode illustrated is controlled by the total charge introduced into layer 3 and its width. In a conventional zener diode these factors would determine the value of the breakdown voltage which would thus be invariably related to the temperature coefficient. However, in the diode described above the additional layer 4 provides a further contribution to the breakdown voltage as evidenced by the additional area under the curve in Figure 2 so that the two parameters of temperature coefficients and breakdown voltage can be independently determined. In layer 4 the field is so low that avalance breakdown and tunnelling are both negligible. As an example, if a zero temperature coefficient of breakdown voltage is desired in a conventional zener diode this will mean that the zener diode must have a breakdown voltage of about 5+ volts in silicon. With such a diode the maximum field at the pn junction is 850 kV/cm and with a doping density of 4.5x10'7/cc the total depletion layer width of such a structure is about 0.12 microns. Utilising the above figures a zener diode can be fabricated for any value of breakdown voltage and still having a zero temperature coefficient of breakdown voltage. Depletion layer 3 has a doping density of 4.5x10'7/cc and a width of 0.08 microns. The voltage drop across layer 3 is then about 5 volts. The additional voltage drop that is required is provided by layer 4. As an example for a voltage drop of 20 volts in layer 4, thus giving a total breakdown voltage of 25 volts, layer 4 has a width of 1.75 microns and a doping density of 9x 1015 per cc. The field in layer 3 drops from about 850 kV/cm to 250 kV/cm and the field in layer 4 drops from the latter value to zero. The field distribution in such a device is shown in Figure 2. It will be understood that the above example can be readily modified to provide a greater or lesser value of breakdown voltage than 25 volts and if desired a temperature coefficient of breakdown voltage which is non-zero. By providing layer 3 with a doping concentration which is less than the doping concentration of layer 4 a diode is produced which has a breakdown voltage which is lower than that of a conventional zener diode with the same temperature coefficient. To fabricate a diode embodying the invention ion implantation techniques can be used and the junction can be formed by very shallow diffusion. The layer in which the additional voltage is developed can comprise an epitaxial layer fabricated by conventional methods. WHAT WE CLAIM IS:

1. A zener diode comprising a pn junction having two successive n-type layers on one side of the junction which two layers are differently doped to each other, the layer adjacent the junction being of such thickness and of higher concentration than the other n-type layer so that breakdown in said adjacent layer is due at least in part to a tunnelling mechanism and in part to avalanche multiplication to cause current flow through said junction so that said adjacent layer determines the temperature coefficient of the breakdown voltage and the other layer contributing to the total value of the breakdown voltage.

2. The diode as claimed in Claim 1 in which the said layers are formed on a substrate.

3. The diode as claimed in Claim 2 in which the said substrate is doped n+.

4. The diode as claimed in any one of the preceding claims in which the thickness and doping concentration of the n-type layer adjacent the junction are such that the temperature coefficient of the breakdown voltage is zero.

5. The diode as claimed in Claim 4, in which the thickness of the said adjacent layer is approximately 0.08 microns and the doping concentration is approximately 4.5x 1017/cc.

6. A zener diode substantially as described herein with reference to the drawing accompanying the complete specification.