GB1489500A - Apparatus for bombarding a target with a beam of charged particles - Google Patents

Apparatus for bombarding a target with a beam of charged particles

Info

Publication number
GB1489500A
GB1489500A GB4894275A GB4894275A GB1489500A GB 1489500 A GB1489500 A GB 1489500A GB 4894275 A GB4894275 A GB 4894275A GB 4894275 A GB4894275 A GB 4894275A GB 1489500 A GB1489500 A GB 1489500A
Authority
GB
United Kingdom
Prior art keywords
bombarding
target
charged particles
charged
particles
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB4894275A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Priority to GB4894275A priority Critical patent/GB1489500A/en
Publication of GB1489500A publication Critical patent/GB1489500A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
GB4894275A 1975-11-28 1975-11-28 Apparatus for bombarding a target with a beam of charged particles Expired GB1489500A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB4894275A GB1489500A (en) 1975-11-28 1975-11-28 Apparatus for bombarding a target with a beam of charged particles

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB4894275A GB1489500A (en) 1975-11-28 1975-11-28 Apparatus for bombarding a target with a beam of charged particles

Publications (1)

Publication Number Publication Date
GB1489500A true GB1489500A (en) 1977-10-19

Family

ID=10450538

Family Applications (1)

Application Number Title Priority Date Filing Date
GB4894275A Expired GB1489500A (en) 1975-11-28 1975-11-28 Apparatus for bombarding a target with a beam of charged particles

Country Status (1)

Country Link
GB (1) GB1489500A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1982003139A1 (en) * 1981-03-10 1982-09-16 Veeco Instr Inc Screen lens array system

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1982003139A1 (en) * 1981-03-10 1982-09-16 Veeco Instr Inc Screen lens array system
US4354111A (en) * 1981-03-10 1982-10-12 Veeco Instruments Incorporated Screen lens array system

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Legal Events

Date Code Title Description
PS Patent sealed
PCNP Patent ceased through non-payment of renewal fee

Effective date: 19941128