GB1477941A - Epitaxial methods of growing layers of gallium phosphide - Google Patents

Epitaxial methods of growing layers of gallium phosphide

Info

Publication number
GB1477941A
GB1477941A GB433975A GB433975A GB1477941A GB 1477941 A GB1477941 A GB 1477941A GB 433975 A GB433975 A GB 433975A GB 433975 A GB433975 A GB 433975A GB 1477941 A GB1477941 A GB 1477941A
Authority
GB
United Kingdom
Prior art keywords
melt
wafers
gap
wafer
gallium phosphide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB433975A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Publication of GB1477941A publication Critical patent/GB1477941A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B19/00—Liquid-phase epitaxial-layer growth
    • C30B19/06—Reaction chambers; Boats for supporting the melt; Substrate holders
    • C30B19/061—Tipping system, e.g. by rotation
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B19/00—Liquid-phase epitaxial-layer growth
    • C30B19/06—Reaction chambers; Boats for supporting the melt; Substrate holders
    • C30B19/062—Vertical dipping system
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B19/00—Liquid-phase epitaxial-layer growth
    • C30B19/06—Reaction chambers; Boats for supporting the melt; Substrate holders
    • C30B19/068—Substrate holders
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02367—Substrates
    • H01L21/0237—Materials
    • H01L21/02387—Group 13/15 materials
    • H01L21/02392—Phosphides
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02518—Deposited layers
    • H01L21/02521—Materials
    • H01L21/02538—Group 13/15 materials
    • H01L21/02543—Phosphides
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02518—Deposited layers
    • H01L21/0257—Doping during depositing
    • H01L21/02573—Conductivity type
    • H01L21/02579—P-type
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02612—Formation types
    • H01L21/02617—Deposition types
    • H01L21/02623—Liquid deposition
    • H01L21/02625—Liquid deposition using melted materials
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02612—Formation types
    • H01L21/02617—Deposition types
    • H01L21/02623—Liquid deposition
    • H01L21/02628—Liquid deposition using solutions

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Materials Engineering (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Led Devices (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
GB433975A 1974-02-07 1975-01-31 Epitaxial methods of growing layers of gallium phosphide Expired GB1477941A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1572474A JPS50110570A (US20080094685A1-20080424-C00004.png) 1974-02-07 1974-02-07

Publications (1)

Publication Number Publication Date
GB1477941A true GB1477941A (en) 1977-06-29

Family

ID=11896693

Family Applications (1)

Application Number Title Priority Date Filing Date
GB433975A Expired GB1477941A (en) 1974-02-07 1975-01-31 Epitaxial methods of growing layers of gallium phosphide

Country Status (7)

Country Link
US (1) US3997377A (US20080094685A1-20080424-C00004.png)
JP (1) JPS50110570A (US20080094685A1-20080424-C00004.png)
CA (1) CA1054904A (US20080094685A1-20080424-C00004.png)
DE (1) DE2504815A1 (US20080094685A1-20080424-C00004.png)
FR (1) FR2272731B1 (US20080094685A1-20080424-C00004.png)
GB (1) GB1477941A (US20080094685A1-20080424-C00004.png)
NL (1) NL7501520A (US20080094685A1-20080424-C00004.png)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53148388A (en) * 1977-05-31 1978-12-23 Kokusai Denshin Denwa Co Ltd Method of producing compound semiconductor crystal
US4123302A (en) * 1978-02-21 1978-10-31 Rca Corporation Method for depositing epitaxial semiconductor from the liquid phase
DE2847091C3 (de) * 1978-10-28 1982-03-25 Siemens AG, 1000 Berlin und 8000 München Verfahren und Vorrichtung zur Herstellung von Ga↓1↓-↓x↓Al↓x↓ AS:Si-Epitaxieschichten
US4317689A (en) * 1980-07-18 1982-03-02 Honeywell Inc. Mercury containment for liquid phase growth of mercury cadmium telluride from tellurium-rich solution
JPH04367587A (ja) * 1991-06-14 1992-12-18 Shin Etsu Handotai Co Ltd 液相成長方法及び装置
IL101966A (en) * 1992-05-22 1998-04-05 Ramot Ramatsity Authority For Process for the production of MUILLAG N-I-P EDINESRA structure

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3689330A (en) * 1969-04-18 1972-09-05 Sony Corp Method of making a luminescent diode
US3759759A (en) * 1970-01-29 1973-09-18 Fairchild Camera Instr Co Push pull method for solution epitaxial growth of iii v compounds
US3870575A (en) * 1972-03-21 1975-03-11 Sony Corp Fabricating a gallium phosphide device
JPS5342230B2 (US20080094685A1-20080424-C00004.png) * 1972-10-19 1978-11-09
US3859148A (en) * 1972-12-01 1975-01-07 Bell Telephone Labor Inc Epitaxial crystal growth of group iii-v compound semiconductors from solution
JPS56397B2 (US20080094685A1-20080424-C00004.png) * 1973-03-20 1981-01-07

Also Published As

Publication number Publication date
FR2272731A1 (US20080094685A1-20080424-C00004.png) 1975-12-26
FR2272731B1 (US20080094685A1-20080424-C00004.png) 1979-09-28
DE2504815A1 (de) 1975-08-14
JPS50110570A (US20080094685A1-20080424-C00004.png) 1975-08-30
CA1054904A (en) 1979-05-22
NL7501520A (nl) 1975-08-11
US3997377A (en) 1976-12-14

Similar Documents

Publication Publication Date Title
US3809584A (en) Method for continuously growing epitaxial layers of semiconductors from liquid phase
GB1477941A (en) Epitaxial methods of growing layers of gallium phosphide
US3649193A (en) Method of forming and regularly growing a semiconductor compound
US3996891A (en) Liquid phase epitaxial growth apparatus wherein contacted wafer floats
GB1497457A (en) Semiconductor-liquid phase epitaxial growth method and semiconductor device manufactured using the same
JPH06219900A (ja) Ｓｉドープｎ型ガリウム砒素単結晶の製造方法
Beuchet et al. Hydride multibarrel reactors suitable for microwave and optoelectronic (Ga, In)(As, P) heterostructure growth
JPS5737827A (en) Manufacture of semiconductor device
JPS5737823A (en) Vapor phase growth device
JP2661155B2 (ja) 気相エピタキシャル成長方法
JPS573799A (en) Vapor phase growing method of compound semiconductor
Von Münch Chrystallization and epitaxy of GaAs from the vapour phase
JPS5556624A (en) Aqueous phase epitaxial growing method
JPS5856964B2 (ja) 化合物半導体液相成長法
JPS5826655B2 (ja) ケツシヨウセイチヨウホウ
JPS5474672A (en) Gaas vapor phase growth method
JPS58184722A (ja) ３−ｖ半導体気相成長方法
Davies Studies in Metal Organic Vapour Phase Epitaxy (MOVPE) of Semiconductors
JPS5756400A (en) Continuous vapor-phase epitaxial growing furnace
GB1376973A (en) Method of growing monocrystalline semiconductor material
JPS564232A (en) Method for liquid-phase epitaxial growing
GB1427590A (en) Gallium phosphide semiconductor devices
JPS61205696A (ja) ３−５族化合物半導体の気相成長装置
JPS60176991A (ja) 有機金属熱分解結晶成長装置
JPS6065527A (ja) ３−５族化合物半導体の気相成長方法

Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee