GB1306115A - - Google Patents

Info

Publication number
GB1306115A
GB1306115A GB1306115DA GB1306115A GB 1306115 A GB1306115 A GB 1306115A GB 1306115D A GB1306115D A GB 1306115DA GB 1306115 A GB1306115 A GB 1306115A
Authority
GB
United Kingdom
Prior art keywords
mark
target
circuit
signal
value
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of GB1306115A publication Critical patent/GB1306115A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/21—Means for adjusting the focus
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03K—PULSE TECHNIQUE
    • H03K3/00—Circuits for generating electric pulses; Monostable, bistable or multistable circuits
    • H03K3/02—Generators characterised by the type of circuit or by the means used for producing pulses
    • H03K3/023—Generators characterised by the type of circuit or by the means used for producing pulses by the use of differential amplifiers or comparators, with internal or external positive feedback

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
GB1306115D 1970-04-08 1970-04-08 Expired GB1306115A (enrdf_load_stackoverflow)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB1667270 1970-04-08

Publications (1)

Publication Number Publication Date
GB1306115A true GB1306115A (enrdf_load_stackoverflow) 1973-02-07

Family

ID=10081547

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1306115D Expired GB1306115A (enrdf_load_stackoverflow) 1970-04-08 1970-04-08

Country Status (1)

Country Link
GB (1) GB1306115A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3306367A1 (de) * 1982-03-02 1983-09-08 Cambridge Instruments Ltd., Cambridge Verfahren und anordnung zum bestimmen der fokussierung eines elektronenstrahls
GB2196499A (en) * 1986-10-16 1988-04-27 Motorola Inc Data shaping circuit

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3306367A1 (de) * 1982-03-02 1983-09-08 Cambridge Instruments Ltd., Cambridge Verfahren und anordnung zum bestimmen der fokussierung eines elektronenstrahls
GB2196499A (en) * 1986-10-16 1988-04-27 Motorola Inc Data shaping circuit
GB2196499B (en) * 1986-10-16 1991-04-17 Motorola Inc Data shaping circuit

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Legal Events

Date Code Title Description
PS Patent sealed
PLNP Patent lapsed through nonpayment of renewal fees