GB1266378A - - Google Patents

Info

Publication number
GB1266378A
GB1266378A GB1266378DA GB1266378A GB 1266378 A GB1266378 A GB 1266378A GB 1266378D A GB1266378D A GB 1266378DA GB 1266378 A GB1266378 A GB 1266378A
Authority
GB
United Kingdom
Prior art keywords
formula
polymer
arylene
units
alkyl
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of GB1266378A publication Critical patent/GB1266378A/en
Expired legal-status Critical Current

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Classifications

    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/025Non-macromolecular photopolymerisable compounds having carbon-to-carbon triple bonds, e.g. acetylenic compounds

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
  • Macromonomer-Based Addition Polymer (AREA)
  • Materials For Photolithography (AREA)

Abstract

1,266,378. Photosensitive polymers and polymeric compositions. GENERAL ELECTRIC CO. 1 Oct., 1969 [1 Oct., 1968], No. 48327/69. Addition to 1,149,697. Heading C3R. [Also in Division G2] A photosensitive material comprises (1) a mixture of (a) an acetylenic polymer of formula where m is 0 or 1, n is at least 10 and R is an arylene, alkyl substituted arylene, haloarylene, alkyl substituted haloarylene, or, when m is 0, R may be alkylene or, when m is 1, R may be -R<SP>1</SP>-X-R<SP>1</SP>- where R<SP>1</SP> is phenylene, halophenylene or alkyl substituted phenylene and X is where R<SP>11</SP> is hydrogen or alkyl, or (b) an acetylenic polymer of formula where n is as above and R<SP>a</SP> is a radical of formula where R<SP>b</SP> is arylene, R<SP>c</SP> is a trivalent aromatic radical and R<SP>d</SP> is alkyl or aryl, or (c) a copolymer having at least 10 repeating units of both (a) and (b), and a photopolymerization sensitizing agent which absorbs actinic radiation and accelerates the cross-linking of the polymer and which is other than a ketone having an aryl substituent directly attached to the carbonyl group, or the material comprises (2) a polymer having at least 10 units, some of the units having the formula and other units the formula where R<SP>f</SP> is as defined above for R when m is 1 and R<SP>g</SP> is alkylene or p-arylene. Suitable photosensitizers mentioned are p-diethynyl benzene, hemoporphyrin, tetraiodofluorescein, Rose Bengal dye, dibenzylidenecyclohexanone, dimethyldiphenyldiphenoquinone, p-diiodobenzene, p-benzoquinone, chalcone, terephthalaldehyde, maleic anhydride, m-dibenzoylbenzene, diphenyl-distyryl-diphenoquinone, dimethyldistyryl-diphenoquinone, chloranil, anthracene, methylene blue, azobenzene, m-dinitrobenzene, m-benzenedisulphonylazide, diacetyl, eosin B, ethyl butyl ketene, acridine yellow, crystal violet and nitrobenzene. The materials may be dissolved in suitable solvents and the solutions used to form films on substrates, the films being exposed to ultraviolet light while certain portions of the film are masked, the unexposed portions subsequently being dissolved leaving the exposed areas which may be used as a resist e.g. in etching or plating operations on the substrate, or the polymer remaining may be thermally decomposed to carbon to provide electrically conductive circuits. Examples are given.
GB1266378D 1968-10-01 1969-10-01 Expired GB1266378A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US76428768A 1968-10-01 1968-10-01

Publications (1)

Publication Number Publication Date
GB1266378A true GB1266378A (en) 1972-03-08

Family

ID=25070259

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1266378D Expired GB1266378A (en) 1968-10-01 1969-10-01

Country Status (4)

Country Link
JP (1) JPS4912420B1 (en)
DE (1) DE1949208A1 (en)
FR (1) FR2024781A6 (en)
GB (1) GB1266378A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6902902B2 (en) 2001-11-27 2005-06-07 Arena Pharmaceuticals, Inc. Human G protein-coupled receptors and modulators thereof for the treatment of metabolic-related disorders
CN110198924A (en) * 2017-01-18 2019-09-03 三菱瓦斯化学株式会社 Compound, resin, composition and pattern forming method

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3473065D1 (en) * 1983-11-26 1988-09-01 Basf Ag Process for the production of resist images and dry resist film for this process
JPH01129807U (en) * 1988-02-25 1989-09-04
US5552503A (en) * 1993-12-22 1996-09-03 At&T Corp. Photodefinable dielectric layers comprising poly(aromatic diacetylenes)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6902902B2 (en) 2001-11-27 2005-06-07 Arena Pharmaceuticals, Inc. Human G protein-coupled receptors and modulators thereof for the treatment of metabolic-related disorders
CN110198924A (en) * 2017-01-18 2019-09-03 三菱瓦斯化学株式会社 Compound, resin, composition and pattern forming method
EP3572393A4 (en) * 2017-01-18 2020-09-30 Mitsubishi Gas Chemical Company, Inc. Compound, resin, composition, and method for forming pattern

Also Published As

Publication number Publication date
JPS4912420B1 (en) 1974-03-25
DE1949208A1 (en) 1970-09-10
FR2024781A6 (en) 1970-09-04

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Legal Events

Date Code Title Description
CSNS Application of which complete specification have been accepted and published, but patent is not sealed