GB1266378A - - Google Patents
Info
- Publication number
- GB1266378A GB1266378A GB1266378DA GB1266378A GB 1266378 A GB1266378 A GB 1266378A GB 1266378D A GB1266378D A GB 1266378DA GB 1266378 A GB1266378 A GB 1266378A
- Authority
- GB
- United Kingdom
- Prior art keywords
- formula
- polymer
- arylene
- units
- alkyl
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/025—Non-macromolecular photopolymerisable compounds having carbon-to-carbon triple bonds, e.g. acetylenic compounds
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
- Macromonomer-Based Addition Polymer (AREA)
- Materials For Photolithography (AREA)
Abstract
1,266,378. Photosensitive polymers and polymeric compositions. GENERAL ELECTRIC CO. 1 Oct., 1969 [1 Oct., 1968], No. 48327/69. Addition to 1,149,697. Heading C3R. [Also in Division G2] A photosensitive material comprises (1) a mixture of (a) an acetylenic polymer of formula where m is 0 or 1, n is at least 10 and R is an arylene, alkyl substituted arylene, haloarylene, alkyl substituted haloarylene, or, when m is 0, R may be alkylene or, when m is 1, R may be -R<SP>1</SP>-X-R<SP>1</SP>- where R<SP>1</SP> is phenylene, halophenylene or alkyl substituted phenylene and X is where R<SP>11</SP> is hydrogen or alkyl, or (b) an acetylenic polymer of formula where n is as above and R<SP>a</SP> is a radical of formula where R<SP>b</SP> is arylene, R<SP>c</SP> is a trivalent aromatic radical and R<SP>d</SP> is alkyl or aryl, or (c) a copolymer having at least 10 repeating units of both (a) and (b), and a photopolymerization sensitizing agent which absorbs actinic radiation and accelerates the cross-linking of the polymer and which is other than a ketone having an aryl substituent directly attached to the carbonyl group, or the material comprises (2) a polymer having at least 10 units, some of the units having the formula and other units the formula where R<SP>f</SP> is as defined above for R when m is 1 and R<SP>g</SP> is alkylene or p-arylene. Suitable photosensitizers mentioned are p-diethynyl benzene, hemoporphyrin, tetraiodofluorescein, Rose Bengal dye, dibenzylidenecyclohexanone, dimethyldiphenyldiphenoquinone, p-diiodobenzene, p-benzoquinone, chalcone, terephthalaldehyde, maleic anhydride, m-dibenzoylbenzene, diphenyl-distyryl-diphenoquinone, dimethyldistyryl-diphenoquinone, chloranil, anthracene, methylene blue, azobenzene, m-dinitrobenzene, m-benzenedisulphonylazide, diacetyl, eosin B, ethyl butyl ketene, acridine yellow, crystal violet and nitrobenzene. The materials may be dissolved in suitable solvents and the solutions used to form films on substrates, the films being exposed to ultraviolet light while certain portions of the film are masked, the unexposed portions subsequently being dissolved leaving the exposed areas which may be used as a resist e.g. in etching or plating operations on the substrate, or the polymer remaining may be thermally decomposed to carbon to provide electrically conductive circuits. Examples are given.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US76428768A | 1968-10-01 | 1968-10-01 |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1266378A true GB1266378A (en) | 1972-03-08 |
Family
ID=25070259
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB1266378D Expired GB1266378A (en) | 1968-10-01 | 1969-10-01 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JPS4912420B1 (en) |
DE (1) | DE1949208A1 (en) |
FR (1) | FR2024781A6 (en) |
GB (1) | GB1266378A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6902902B2 (en) | 2001-11-27 | 2005-06-07 | Arena Pharmaceuticals, Inc. | Human G protein-coupled receptors and modulators thereof for the treatment of metabolic-related disorders |
CN110198924A (en) * | 2017-01-18 | 2019-09-03 | 三菱瓦斯化学株式会社 | Compound, resin, composition and pattern forming method |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3473065D1 (en) * | 1983-11-26 | 1988-09-01 | Basf Ag | Process for the production of resist images and dry resist film for this process |
JPH01129807U (en) * | 1988-02-25 | 1989-09-04 | ||
US5552503A (en) * | 1993-12-22 | 1996-09-03 | At&T Corp. | Photodefinable dielectric layers comprising poly(aromatic diacetylenes) |
-
1969
- 1969-09-26 JP JP7685069A patent/JPS4912420B1/ja active Pending
- 1969-09-30 DE DE19691949208 patent/DE1949208A1/en active Pending
- 1969-10-01 GB GB1266378D patent/GB1266378A/en not_active Expired
- 1969-10-01 FR FR6933561A patent/FR2024781A6/fr not_active Expired
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6902902B2 (en) | 2001-11-27 | 2005-06-07 | Arena Pharmaceuticals, Inc. | Human G protein-coupled receptors and modulators thereof for the treatment of metabolic-related disorders |
CN110198924A (en) * | 2017-01-18 | 2019-09-03 | 三菱瓦斯化学株式会社 | Compound, resin, composition and pattern forming method |
EP3572393A4 (en) * | 2017-01-18 | 2020-09-30 | Mitsubishi Gas Chemical Company, Inc. | Compound, resin, composition, and method for forming pattern |
Also Published As
Publication number | Publication date |
---|---|
JPS4912420B1 (en) | 1974-03-25 |
DE1949208A1 (en) | 1970-09-10 |
FR2024781A6 (en) | 1970-09-04 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
CSNS | Application of which complete specification have been accepted and published, but patent is not sealed |