GB1263226A - Electrolytic detection of defects in insulating layers - Google Patents

Electrolytic detection of defects in insulating layers

Info

Publication number
GB1263226A
GB1263226A GB1488870A GB1488870A GB1263226A GB 1263226 A GB1263226 A GB 1263226A GB 1488870 A GB1488870 A GB 1488870A GB 1488870 A GB1488870 A GB 1488870A GB 1263226 A GB1263226 A GB 1263226A
Authority
GB
United Kingdom
Prior art keywords
defects
anode
insulating layer
phoretic
decoration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB1488870A
Inventor
Kenneth James Brion
Philip H Eisenberg
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Boeing North American Inc
Original Assignee
North American Rockwell Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by North American Rockwell Corp filed Critical North American Rockwell Corp
Publication of GB1263226A publication Critical patent/GB1263226A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/06—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a liquid
    • G01N27/07—Construction of measuring vessels; Electrodes therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/20—Investigating the presence of flaws
    • G01N27/205—Investigating the presence of flaws in insulating materials

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

1,263,226. Electrolytic cells for detecting defects in insulating layers. NORTH AMERICAN ROCKWELL CORP. March 26, 1970 [June 25, 1969], No. 14888/70. Heading C7B. Defects e.g. pinholes 20 are detected in an insulating layer 31 on a conductive substrate 32, e.g. a wafer 11, comprising a dielectric layer coated on a semi-conductor, by passing a current from a decomposable metal (e.g. Cu) anode 12 positioned over the insulating layer through an organic electrolyte 16 which facilitates electro-phoretic decoration to the conductive substrate connected as cathode, e. g. to the Au base support of an electrolytic test cell bowl 10, the current being concentrated by the anode shape in a region of the insulating layer seen through a channel through the anode to observe electro-phoretic decoration of and generation of gas bubbles 21 (e.g. of H 2 ) from defects. The anode is preferably at least partly closed on itself around the channel.
GB1488870A 1969-06-25 1970-03-26 Electrolytic detection of defects in insulating layers Expired GB1263226A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US83636669A 1969-06-25 1969-06-25

Publications (1)

Publication Number Publication Date
GB1263226A true GB1263226A (en) 1972-02-09

Family

ID=25271817

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1488870A Expired GB1263226A (en) 1969-06-25 1970-03-26 Electrolytic detection of defects in insulating layers

Country Status (3)

Country Link
DE (1) DE2018886B2 (en)
GB (1) GB1263226A (en)
NL (1) NL7006221A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4208947A1 (en) * 1991-03-20 1992-09-24 Ngk Insulators Ltd Detection of flaws in ceramic bodies - by impregnating with liq. which can form conducting layer and measuring current through layer

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4208947A1 (en) * 1991-03-20 1992-09-24 Ngk Insulators Ltd Detection of flaws in ceramic bodies - by impregnating with liq. which can form conducting layer and measuring current through layer
US5395641A (en) * 1991-03-20 1995-03-07 Ngk Insulators, Ltd. Process for detecting voids in ceramic bodies

Also Published As

Publication number Publication date
DE2018886B2 (en) 1971-08-15
DE2018886A1 (en) 1971-01-14
NL7006221A (en) 1970-12-29

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