GB1197123A - Gas Coherent Radiation Generator and Discharge Tube Therefor - Google Patents
Gas Coherent Radiation Generator and Discharge Tube ThereforInfo
- Publication number
- GB1197123A GB1197123A GB2290768A GB2290768A GB1197123A GB 1197123 A GB1197123 A GB 1197123A GB 2290768 A GB2290768 A GB 2290768A GB 2290768 A GB2290768 A GB 2290768A GB 1197123 A GB1197123 A GB 1197123A
- Authority
- GB
- United Kingdom
- Prior art keywords
- gas
- bores
- tube
- discharge tube
- discharge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000005855 radiation Effects 0.000 title abstract 2
- 230000001427 coherent effect Effects 0.000 title 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 abstract 3
- 239000002826 coolant Substances 0.000 abstract 3
- 229910052802 copper Inorganic materials 0.000 abstract 3
- 239000010949 copper Substances 0.000 abstract 3
- 239000012530 fluid Substances 0.000 abstract 3
- 239000000919 ceramic Substances 0.000 abstract 2
- 238000001816 cooling Methods 0.000 abstract 2
- 239000011521 glass Substances 0.000 abstract 2
- 238000003466 welding Methods 0.000 abstract 2
- 229910052743 krypton Inorganic materials 0.000 abstract 1
- DNNSSWSSYDEUBZ-UHFFFAOYSA-N krypton atom Chemical compound [Kr] DNNSSWSSYDEUBZ-UHFFFAOYSA-N 0.000 abstract 1
- 230000003287 optical effect Effects 0.000 abstract 1
- 230000001737 promoting effect Effects 0.000 abstract 1
- 238000004544 sputter deposition Methods 0.000 abstract 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/04—Arrangements for thermal management
- H01S3/041—Arrangements for thermal management for gas lasers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/032—Constructional details of gas laser discharge tubes for confinement of the discharge, e.g. by special features of the discharge constricting tube
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US64196567A | 1967-05-29 | 1967-05-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1197123A true GB1197123A (en) | 1970-07-01 |
Family
ID=24574592
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB2290768A Expired GB1197123A (en) | 1967-05-29 | 1968-05-14 | Gas Coherent Radiation Generator and Discharge Tube Therefor |
Country Status (3)
| Country | Link |
|---|---|
| DE (1) | DE1764359C3 (enrdf_load_stackoverflow) |
| FR (1) | FR1570768A (enrdf_load_stackoverflow) |
| GB (1) | GB1197123A (enrdf_load_stackoverflow) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4752936A (en) * | 1984-11-15 | 1988-06-21 | Carl-Zeiss-Stiftung | Gas laser, particularly ion laser |
| EP1438774A4 (en) * | 2001-08-29 | 2006-03-08 | Cymer Inc | TWO CHAMBER GAS DISCHARGE LASER SYSTEM WITH VERY NARROW BAND AND HIGH REPEAT SPEED |
| EP1323216A4 (en) * | 2000-10-06 | 2006-03-22 | Cymer Inc | TWO CHAMBER GAS DISCHARGE LASER SYSTEM WITH A VERY NARROW BAND AND HIGH FREQUENCY OF REPETITION |
| EP1458066A3 (en) * | 2001-08-29 | 2006-04-19 | Cymer, Inc. | Line selected F2 two chamber laser system |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3626325A (en) * | 1969-11-10 | 1971-12-07 | Britt Electronic Poducts Corp | Pulsed gas laser with radiation cooling |
| EP0163169A3 (de) * | 1984-06-01 | 1986-12-30 | Siemens Aktiengesellschaft | Luftgekühltes Entladungsrohr für einen Gaslaser und seine Verwendung |
| US4698818A (en) * | 1985-09-30 | 1987-10-06 | Siemens Aktiengesellschaft | Air-cooled discharge tube for an ion laser |
-
1968
- 1968-05-14 GB GB2290768A patent/GB1197123A/en not_active Expired
- 1968-05-22 DE DE19681764359 patent/DE1764359C3/de not_active Expired
- 1968-05-29 FR FR1570768D patent/FR1570768A/fr not_active Expired
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4752936A (en) * | 1984-11-15 | 1988-06-21 | Carl-Zeiss-Stiftung | Gas laser, particularly ion laser |
| US7567607B2 (en) | 1999-12-10 | 2009-07-28 | Cymer, Inc. | Very narrow band, two chamber, high rep-rate gas discharge laser system |
| EP1323216A4 (en) * | 2000-10-06 | 2006-03-22 | Cymer Inc | TWO CHAMBER GAS DISCHARGE LASER SYSTEM WITH A VERY NARROW BAND AND HIGH FREQUENCY OF REPETITION |
| EP1438774A4 (en) * | 2001-08-29 | 2006-03-08 | Cymer Inc | TWO CHAMBER GAS DISCHARGE LASER SYSTEM WITH VERY NARROW BAND AND HIGH REPEAT SPEED |
| EP1458066A3 (en) * | 2001-08-29 | 2006-04-19 | Cymer, Inc. | Line selected F2 two chamber laser system |
Also Published As
| Publication number | Publication date |
|---|---|
| FR1570768A (enrdf_load_stackoverflow) | 1969-06-13 |
| DE1764359B2 (de) | 1977-08-11 |
| DE1764359A1 (de) | 1971-07-15 |
| DE1764359C3 (de) | 1978-04-20 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PS | Patent sealed | ||
| PLE | Entries relating assignments, transmissions, licences in the register of patents | ||
| PLNP | Patent lapsed through nonpayment of renewal fees |