GB1181937A - Improvements in or relating to Devices for the Heat Treatment of Plate-like Semiconductor Bodies - Google Patents
Improvements in or relating to Devices for the Heat Treatment of Plate-like Semiconductor BodiesInfo
- Publication number
- GB1181937A GB1181937A GB1676668A GB1676668A GB1181937A GB 1181937 A GB1181937 A GB 1181937A GB 1676668 A GB1676668 A GB 1676668A GB 1676668 A GB1676668 A GB 1676668A GB 1181937 A GB1181937 A GB 1181937A
- Authority
- GB
- United Kingdom
- Prior art keywords
- plate
- heat flow
- pyrographite
- april
- thermal conductivity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D11/00—Arrangement of elements for electric heating in or on furnaces
- F27D11/02—Ohmic resistance heating
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/62—Heating elements specially adapted for furnaces
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
1,181,937. Electrically heated apparatus. SIEMENS A.G. 8 April, 1968 [7 April, 1967], No. 16766/68. Heading H5H. Apparatus for the epitaxial deposition of crystalline layers on heated semi-conductor plates 5 is constructed similarly to the apparatus described in Specification 1,124,330, with a temperature-compensating plate 7 positioned between the coiled or serpentine heater 6 and the base of the reaction chamber 1, but the plate 7 is designed so that the axial heat flow through its central part 7A experiences greater attenuation than that through the outer portion 7B and the outward radial heat flow therethrough is obstructed. Part 7B is of normal graphite and part 7A is of pyrographite cut so that the direction of lowest thermal conductivity is parallel to the axis of symmetry 14. Alternatively, plate 7 comprises a main graphite or carbon section 7a, Fig. 2, with a central inset 7b of the same material or of pyrographite and a layer 7c of material of low thermal conductivity. Alternatively, plate 7 has a thicker central part than the edge part 7D, Fig. 3, and includes recesses 7E to impede radial heat flow. Plate 7 is spaced from heater 6 by distance-pieces 15 of beryllium oxide, Fig. 2.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE1967S0109236 DE1644001B2 (en) | 1967-04-07 | 1967-04-07 | DEVICE FOR THE THERMAL TREATMENT OF DISC-SHAPED SEMICONDUCTOR BODIES |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1181937A true GB1181937A (en) | 1970-02-18 |
Family
ID=7529369
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB1676668A Expired GB1181937A (en) | 1967-04-07 | 1968-04-08 | Improvements in or relating to Devices for the Heat Treatment of Plate-like Semiconductor Bodies |
Country Status (4)
| Country | Link |
|---|---|
| DE (1) | DE1644001B2 (en) |
| FR (1) | FR1557469A (en) |
| GB (1) | GB1181937A (en) |
| NL (1) | NL6803085A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5414927A (en) * | 1993-03-30 | 1995-05-16 | Union Oil Co | Furnace elements made from graphite sheets |
-
1967
- 1967-04-07 DE DE1967S0109236 patent/DE1644001B2/en active Granted
-
1968
- 1968-03-05 NL NL6803085A patent/NL6803085A/xx unknown
- 1968-03-26 FR FR1557469D patent/FR1557469A/fr not_active Expired
- 1968-04-08 GB GB1676668A patent/GB1181937A/en not_active Expired
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5414927A (en) * | 1993-03-30 | 1995-05-16 | Union Oil Co | Furnace elements made from graphite sheets |
| US5912080A (en) * | 1993-03-30 | 1999-06-15 | Union Oil Company Of California, Dba Unocal | Shaped graphite elements fabricated from thin graphite sheets |
| US6083625A (en) * | 1993-03-30 | 2000-07-04 | Union Oil Company Of California | Curved graphite furnace elements |
Also Published As
| Publication number | Publication date |
|---|---|
| FR1557469A (en) | 1969-02-14 |
| DE1644001B2 (en) | 1976-08-26 |
| DE1644001A1 (en) | 1970-04-09 |
| NL6803085A (en) | 1968-10-08 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US3142158A (en) | Thermoelectric cooling device | |
| KR910007069A (en) | Multi-zone flat heater assembly and its operation method | |
| US3386163A (en) | Method for fabricating insulated-gate field effect transistor | |
| GB692250A (en) | Methods of making semiconductive bodies | |
| US3220380A (en) | Deposition chamber including heater element enveloped by a quartz workholder | |
| GB1181937A (en) | Improvements in or relating to Devices for the Heat Treatment of Plate-like Semiconductor Bodies | |
| GB1143907A (en) | Improvements in or relating to methods of manufacturing semiconductor devices | |
| GB992979A (en) | Microtomes | |
| GB1181935A (en) | Improvements in or relating to Devices for the Heat-Treatment of Plate-like Semiconductor Bodies | |
| GB1491255A (en) | Treating slices of material with a gas | |
| GB1072986A (en) | Improvements in and relating to the manufacture of crystalline devices | |
| GB919148A (en) | Improvements in devices for converting heat into electric energy | |
| KR960032594A (en) | Reaction chamber with standard high temperature wall | |
| US4091257A (en) | Deep diode devices and method and apparatus | |
| GB1181936A (en) | Improvements in or relating to Devices for the Heat Treatment of Plate-like Semiconductor Bodies | |
| US3065116A (en) | Vapor deposition of heavily doped semiconductor material | |
| US10290524B2 (en) | Multi-wafer substrate holder with adjustable infrared radiation absorbing zones | |
| GB869710A (en) | Improvements in or relating to radiation detectors | |
| US3330698A (en) | Method of making thermoelectric cooling device | |
| GB1147015A (en) | Semiconductor devices | |
| GB1037146A (en) | Improvements in or relating to processes for manufacturing semiconductor cyrstals having at least two layers of different conductivity and/or conductivity type | |
| GB1442375A (en) | Radiation detector | |
| JPS645002A (en) | Temperature detector | |
| Littman | A Clarification of the Theoretical Upper Bound on the Thermoelectric``Figure of Merit''Derived from Irreversible Thermodynamics | |
| FR2350032A1 (en) | Positive temperature coefficient semiconductor heating device - has heating element in good thermal contact with emission plate for even transfer of heat |