GB1126562A - Vapour coating of small bodies - Google Patents

Vapour coating of small bodies

Info

Publication number
GB1126562A
GB1126562A GB1663066A GB1663066A GB1126562A GB 1126562 A GB1126562 A GB 1126562A GB 1663066 A GB1663066 A GB 1663066A GB 1663066 A GB1663066 A GB 1663066A GB 1126562 A GB1126562 A GB 1126562A
Authority
GB
United Kingdom
Prior art keywords
coating
articles
controlled
small bodies
vapour coating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB1663066A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Duracell Inc USA
Original Assignee
PR Mallory and Co Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by PR Mallory and Co Inc filed Critical PR Mallory and Co Inc
Publication of GB1126562A publication Critical patent/GB1126562A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/06—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base
    • H01C17/075—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques
    • H01C17/08—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques by vapour deposition
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C23C14/505—Substrate holders for rotation of the substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Optical Fibers, Optical Fiber Cores, And Optical Fiber Bundles (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

1,126,562. Coating by vapour deposition. P.R. MALLORY & CO. Inc. April 15, 1966 [June 23, 1965], No.16630/66. Heading C7F. Fibres, particles or articles, e.g. resistor substrates, are coated with e.g. Al or Cr-Ni alloy by evaporating metal wires 38 draped over tungsten filaments, whilst the articles are tumbled in a cylinder 11 which is mounted eccentrically in rotating end-plates 13, 14. A protective coating of SiO is subsequently evaporated from a container 43. The coating thickness and composition may be controlled by optical or crystal monitoring or resistance measurement. The substrate is heated by heaters 33, 34 and the temperature is controlled by a. thermocouple 37.
GB1663066A 1965-06-23 1966-04-15 Vapour coating of small bodies Expired GB1126562A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US46629065A 1965-06-23 1965-06-23

Publications (1)

Publication Number Publication Date
GB1126562A true GB1126562A (en) 1968-09-05

Family

ID=23851214

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1663066A Expired GB1126562A (en) 1965-06-23 1966-04-15 Vapour coating of small bodies

Country Status (2)

Country Link
DE (1) DE1521390A1 (en)
GB (1) GB1126562A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4422688A1 (en) * 1994-06-29 1996-01-04 Ardenne Anlagentech Gmbh Appts. for processing runny granular materials in vacuum

Also Published As

Publication number Publication date
DE1521390A1 (en) 1969-11-06

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