GB1121347A - Ion microscopy - Google Patents

Ion microscopy

Info

Publication number
GB1121347A
GB1121347A GB45265/66A GB4526566A GB1121347A GB 1121347 A GB1121347 A GB 1121347A GB 45265/66 A GB45265/66 A GB 45265/66A GB 4526566 A GB4526566 A GB 4526566A GB 1121347 A GB1121347 A GB 1121347A
Authority
GB
United Kingdom
Prior art keywords
ion microscopy
microscopy
ion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB45265/66A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Battelle Development Corp
Original Assignee
Battelle Development Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Battelle Development Corp filed Critical Battelle Development Corp
Publication of GB1121347A publication Critical patent/GB1121347A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/285—Emission microscopes, e.g. field-emission microscopes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
GB45265/66A 1965-10-11 1966-10-10 Ion microscopy Expired GB1121347A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH1399065A CH448299A (fr) 1965-10-11 1965-10-11 Procédé et appareil de formation d'une image dans un microscope ionique

Publications (1)

Publication Number Publication Date
GB1121347A true GB1121347A (en) 1968-07-24

Family

ID=4397027

Family Applications (1)

Application Number Title Priority Date Filing Date
GB45265/66A Expired GB1121347A (en) 1965-10-11 1966-10-10 Ion microscopy

Country Status (5)

Country Link
CH (1) CH448299A (cs)
DE (1) DE1539715A1 (cs)
FR (1) FR1496035A (cs)
GB (1) GB1121347A (cs)
NL (1) NL6613578A (cs)

Also Published As

Publication number Publication date
DE1539715A1 (de) 1970-01-15
CH448299A (fr) 1967-12-15
NL6613578A (cs) 1967-04-12
FR1496035A (fr) 1967-09-22

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