GB1067807A - Improvements in or relating to lapping machines - Google Patents
Improvements in or relating to lapping machinesInfo
- Publication number
- GB1067807A GB1067807A GB49693/65A GB4969365A GB1067807A GB 1067807 A GB1067807 A GB 1067807A GB 49693/65 A GB49693/65 A GB 49693/65A GB 4969365 A GB4969365 A GB 4969365A GB 1067807 A GB1067807 A GB 1067807A
- Authority
- GB
- United Kingdom
- Prior art keywords
- lapping
- disc
- rotation
- axis
- holder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
- B24B53/017—Devices or means for dressing, cleaning or otherwise conditioning lapping tools
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/005—Control means for lapping machines or devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/04—Headstocks; Working-spindles; Features relating thereto
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/04—Headstocks; Working-spindles; Features relating thereto
- B24B41/047—Grinding heads for working on plane surfaces
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
1,067,807. Lapping. SPEEDLAP CORPORATION. Nov. 23, 1965 [Dec. 8, 1964], No. 49693/65. Heading B3D. A lapping machine comprises a framework, a lapping disc mounted on the framework for rotation about a vertical axis, a contour control member having a maximum horizontal dimension substantially less than the radius of the lapping disc, and means secured to the framework and arranged to position said contour control member so that the lower surface thereof engages the lapping surface of the lapping disc. Workpieces are positioned within truing and retaining rings 30 below pressure plates secured to the lower ends of piston rods 28 of pneumatic jacks 24 mounted at the outer ends of transverse arms 22 provided on a bridge 20 extending between the upper ends of columns 18. The rings 30 slightly overlap the inner and outer peripheries of the annular lapping surface of the lapping disc 14, to which a mixture of abrasive particles and oil is fed. The inner annular portion of the lapping surface wears more rapidly than the outer annular portion; to correct this, contour control devices 32 are provided. Each device includes a bracket 34 extending from a column 18 and mounting a pneumatic jack 38. The piston rod 40 of the jack has threaded into its lower end a bolt 42, Fig. 2 (not shown). Secured between the end of the rod and the head of the bolt are a casing 44, a bushing 46 and a split collar 48 having a conical lower face. Engagement of this face by the head of the bolt expands the collar into tight contact with the inner face of a self-aligning ball thrust bearing 50. The outer annular aligning sleeve of the bearing is received in a recess defined by a clamp ring 52 and a spacer 54. Bolts 56 extending through the ring and spacer are threaded at their lower ends into a holder 58. The lower face of the holder has a central circular recess 60 and an annular recess 62 in which is secured, e.g. by epoxy cement, a wear ring 64 of material having greater abrasion resistance than the material of the lapping disc, e.g. boron carbide. An opening 66 in the holder 58 permits insertion of a screwdriver to turn the screw 42. The holder 58 and wear ring 64 constitute a contour control member 68. Each member 68 has a diameter substantially less than the radial width of the annular lapping surface of the disc 14 and substantially less than the diameter of the rings 30. The radial distance between the axis of rotation of the disc 14 and the axis of rotation of a member 68 is greater than the radial distance between the axis of rotation of the disc 14 and the axis of rotation of a ring 30. The members 68 slightly overlap the outer periphery of the disc 14. When correction is necessary, the jacks 38 are actuated to lower the members 68 into engagement with the disc 14, preferably with a constant pressure of 10 1b. p.s.i. When the lapping surface of the disc has been restored to a planar condition, the members 68 are raised. Alternatively, to accommodate variations in the rate of wear of different portions of the lapping surface of the lapping disc, the contour control member may be continuously urged into engagement with the lapping surface with the pressure being varied as required.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US416825A US3374582A (en) | 1964-12-08 | 1964-12-08 | Lapping machine |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1067807A true GB1067807A (en) | 1967-05-03 |
Family
ID=23651464
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB49693/65A Expired GB1067807A (en) | 1964-12-08 | 1965-11-23 | Improvements in or relating to lapping machines |
Country Status (5)
Country | Link |
---|---|
US (1) | US3374582A (en) |
CH (1) | CH446097A (en) |
DE (1) | DE1502592A1 (en) |
FR (1) | FR1455729A (en) |
GB (1) | GB1067807A (en) |
Families Citing this family (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3500589A (en) * | 1967-07-25 | 1970-03-17 | Fmc Corp | Disc brake grinder |
US4216629A (en) * | 1978-09-15 | 1980-08-12 | Degaeta Albert M | Method and apparatus for producing balls |
US4270314A (en) * | 1979-09-17 | 1981-06-02 | Speedfam Corporation | Bearing mount for lapping machine pressure plate |
WO1988006949A1 (en) * | 1987-03-10 | 1988-09-22 | Gruzinsky Politekhnichesky Institut Imeni V.I.Leni | Machine tool for abrasive machining |
US5123218A (en) * | 1990-02-02 | 1992-06-23 | Speedfam Corporation | Circumferential pattern finishing method |
US5187901A (en) * | 1990-02-02 | 1993-02-23 | Speedfam Corporation | Circumferential pattern finishing machine |
US5224304A (en) * | 1991-11-07 | 1993-07-06 | Speedfam Corporation | Automated free abrasive machine for one side piece part machining |
US5398459A (en) * | 1992-11-27 | 1995-03-21 | Kabushiki Kaisha Toshiba | Method and apparatus for polishing a workpiece |
US5635083A (en) * | 1993-08-06 | 1997-06-03 | Intel Corporation | Method and apparatus for chemical-mechanical polishing using pneumatic pressure applied to the backside of a substrate |
JPH07237120A (en) * | 1994-02-22 | 1995-09-12 | Nec Corp | Wafer grinding device |
US5733175A (en) * | 1994-04-25 | 1998-03-31 | Leach; Michael A. | Polishing a workpiece using equal velocity at all points overlapping a polisher |
US5607341A (en) * | 1994-08-08 | 1997-03-04 | Leach; Michael A. | Method and structure for polishing a wafer during manufacture of integrated circuits |
US5533924A (en) * | 1994-09-01 | 1996-07-09 | Micron Technology, Inc. | Polishing apparatus, a polishing wafer carrier apparatus, a replacable component for a particular polishing apparatus and a process of polishing wafers |
US5899798A (en) * | 1997-07-25 | 1999-05-04 | Obsidian Inc. | Low profile, low hysteresis force feedback gimbal system for chemical mechanical polishing |
US5951382A (en) * | 1997-12-01 | 1999-09-14 | Lucent Technologies Inc. | Chemical mechanical polishing carrier fixture and system |
US5967885A (en) * | 1997-12-01 | 1999-10-19 | Lucent Technologies Inc. | Method of manufacturing an integrated circuit using chemical mechanical polishing |
US6386947B2 (en) | 2000-02-29 | 2002-05-14 | Applied Materials, Inc. | Method and apparatus for detecting wafer slipouts |
US7399217B1 (en) | 2007-02-05 | 2008-07-15 | P.R. Hoffman Machine Products | Lapping machine |
US8702473B1 (en) | 2013-03-04 | 2014-04-22 | Gordon Lyons | Rock polishing systems and methods |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2079076A (en) * | 1931-04-03 | 1937-05-04 | Libbey Owens Ford Glass Co | Truing apparatus for grinding wheels |
FR913570A (en) * | 1945-08-24 | 1946-09-13 | Automatic equipment for pricking grinding wheels for pulp production | |
US2687603A (en) * | 1951-06-26 | 1954-08-31 | Crane Packing Co | Method of lapping quartz crystals |
DE1093251B (en) * | 1956-01-05 | 1960-11-17 | Karl Hack | Dressing device for the end faces of the grinding wheels on spring end grinding machines |
DE1110544B (en) * | 1957-11-29 | 1961-07-06 | Siemens Ag | Single disc lapping machine for semiconductor wafers |
US2968135A (en) * | 1958-04-07 | 1961-01-17 | Abrading Systems Company | Lapping machine |
-
1964
- 1964-12-08 US US416825A patent/US3374582A/en not_active Expired - Lifetime
-
1965
- 1965-11-23 GB GB49693/65A patent/GB1067807A/en not_active Expired
- 1965-12-02 FR FR40706A patent/FR1455729A/en not_active Expired
- 1965-12-03 CH CH1669765A patent/CH446097A/en unknown
- 1965-12-07 DE DE1965S0100834 patent/DE1502592A1/en active Pending
Also Published As
Publication number | Publication date |
---|---|
US3374582A (en) | 1968-03-26 |
DE1502592A1 (en) | 1969-08-07 |
FR1455729A (en) | 1966-10-14 |
CH446097A (en) | 1967-10-31 |
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