GB1067807A - Improvements in or relating to lapping machines - Google Patents

Improvements in or relating to lapping machines

Info

Publication number
GB1067807A
GB1067807A GB49693/65A GB4969365A GB1067807A GB 1067807 A GB1067807 A GB 1067807A GB 49693/65 A GB49693/65 A GB 49693/65A GB 4969365 A GB4969365 A GB 4969365A GB 1067807 A GB1067807 A GB 1067807A
Authority
GB
United Kingdom
Prior art keywords
lapping
disc
rotation
axis
holder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB49693/65A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Speedlap Corp
Original Assignee
Speedlap Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Speedlap Corp filed Critical Speedlap Corp
Publication of GB1067807A publication Critical patent/GB1067807A/en
Expired legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B53/00Devices or means for dressing or conditioning abrasive surfaces
    • B24B53/017Devices or means for dressing, cleaning or otherwise conditioning lapping tools
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00Lapping machines or devices; Accessories
    • B24B37/005Control means for lapping machines or devices
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00Lapping machines or devices; Accessories
    • B24B37/04Lapping machines or devices; Accessories designed for working plane surfaces
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00Component parts such as frames, beds, carriages, headstocks
    • B24B41/04Headstocks; Working-spindles; Features relating thereto
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00Component parts such as frames, beds, carriages, headstocks
    • B24B41/04Headstocks; Working-spindles; Features relating thereto
    • B24B41/047Grinding heads for working on plane surfaces

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)

Abstract

1,067,807. Lapping. SPEEDLAP CORPORATION. Nov. 23, 1965 [Dec. 8, 1964], No. 49693/65. Heading B3D. A lapping machine comprises a framework, a lapping disc mounted on the framework for rotation about a vertical axis, a contour control member having a maximum horizontal dimension substantially less than the radius of the lapping disc, and means secured to the framework and arranged to position said contour control member so that the lower surface thereof engages the lapping surface of the lapping disc. Workpieces are positioned within truing and retaining rings 30 below pressure plates secured to the lower ends of piston rods 28 of pneumatic jacks 24 mounted at the outer ends of transverse arms 22 provided on a bridge 20 extending between the upper ends of columns 18. The rings 30 slightly overlap the inner and outer peripheries of the annular lapping surface of the lapping disc 14, to which a mixture of abrasive particles and oil is fed. The inner annular portion of the lapping surface wears more rapidly than the outer annular portion; to correct this, contour control devices 32 are provided. Each device includes a bracket 34 extending from a column 18 and mounting a pneumatic jack 38. The piston rod 40 of the jack has threaded into its lower end a bolt 42, Fig. 2 (not shown). Secured between the end of the rod and the head of the bolt are a casing 44, a bushing 46 and a split collar 48 having a conical lower face. Engagement of this face by the head of the bolt expands the collar into tight contact with the inner face of a self-aligning ball thrust bearing 50. The outer annular aligning sleeve of the bearing is received in a recess defined by a clamp ring 52 and a spacer 54. Bolts 56 extending through the ring and spacer are threaded at their lower ends into a holder 58. The lower face of the holder has a central circular recess 60 and an annular recess 62 in which is secured, e.g. by epoxy cement, a wear ring 64 of material having greater abrasion resistance than the material of the lapping disc, e.g. boron carbide. An opening 66 in the holder 58 permits insertion of a screwdriver to turn the screw 42. The holder 58 and wear ring 64 constitute a contour control member 68. Each member 68 has a diameter substantially less than the radial width of the annular lapping surface of the disc 14 and substantially less than the diameter of the rings 30. The radial distance between the axis of rotation of the disc 14 and the axis of rotation of a member 68 is greater than the radial distance between the axis of rotation of the disc 14 and the axis of rotation of a ring 30. The members 68 slightly overlap the outer periphery of the disc 14. When correction is necessary, the jacks 38 are actuated to lower the members 68 into engagement with the disc 14, preferably with a constant pressure of 10 1b. p.s.i. When the lapping surface of the disc has been restored to a planar condition, the members 68 are raised. Alternatively, to accommodate variations in the rate of wear of different portions of the lapping surface of the lapping disc, the contour control member may be continuously urged into engagement with the lapping surface with the pressure being varied as required.
GB49693/65A 1964-12-08 1965-11-23 Improvements in or relating to lapping machines Expired GB1067807A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US416825A US3374582A (en) 1964-12-08 1964-12-08 Lapping machine

Publications (1)

Publication Number Publication Date
GB1067807A true GB1067807A (en) 1967-05-03

Family

ID=23651464

Family Applications (1)

Application Number Title Priority Date Filing Date
GB49693/65A Expired GB1067807A (en) 1964-12-08 1965-11-23 Improvements in or relating to lapping machines

Country Status (5)

Country Link
US (1) US3374582A (en)
CH (1) CH446097A (en)
DE (1) DE1502592A1 (en)
FR (1) FR1455729A (en)
GB (1) GB1067807A (en)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3500589A (en) * 1967-07-25 1970-03-17 Fmc Corp Disc brake grinder
US4216629A (en) * 1978-09-15 1980-08-12 Degaeta Albert M Method and apparatus for producing balls
US4270314A (en) * 1979-09-17 1981-06-02 Speedfam Corporation Bearing mount for lapping machine pressure plate
WO1988006949A1 (en) * 1987-03-10 1988-09-22 Gruzinsky Politekhnichesky Institut Imeni V.I.Leni Machine tool for abrasive machining
US5123218A (en) * 1990-02-02 1992-06-23 Speedfam Corporation Circumferential pattern finishing method
US5187901A (en) * 1990-02-02 1993-02-23 Speedfam Corporation Circumferential pattern finishing machine
US5224304A (en) * 1991-11-07 1993-07-06 Speedfam Corporation Automated free abrasive machine for one side piece part machining
US5398459A (en) * 1992-11-27 1995-03-21 Kabushiki Kaisha Toshiba Method and apparatus for polishing a workpiece
US5635083A (en) * 1993-08-06 1997-06-03 Intel Corporation Method and apparatus for chemical-mechanical polishing using pneumatic pressure applied to the backside of a substrate
JPH07237120A (en) * 1994-02-22 1995-09-12 Nec Corp Wafer grinding device
US5733175A (en) * 1994-04-25 1998-03-31 Leach; Michael A. Polishing a workpiece using equal velocity at all points overlapping a polisher
US5607341A (en) * 1994-08-08 1997-03-04 Leach; Michael A. Method and structure for polishing a wafer during manufacture of integrated circuits
US5533924A (en) * 1994-09-01 1996-07-09 Micron Technology, Inc. Polishing apparatus, a polishing wafer carrier apparatus, a replacable component for a particular polishing apparatus and a process of polishing wafers
US5899798A (en) * 1997-07-25 1999-05-04 Obsidian Inc. Low profile, low hysteresis force feedback gimbal system for chemical mechanical polishing
US5951382A (en) * 1997-12-01 1999-09-14 Lucent Technologies Inc. Chemical mechanical polishing carrier fixture and system
US5967885A (en) * 1997-12-01 1999-10-19 Lucent Technologies Inc. Method of manufacturing an integrated circuit using chemical mechanical polishing
US6386947B2 (en) 2000-02-29 2002-05-14 Applied Materials, Inc. Method and apparatus for detecting wafer slipouts
US7399217B1 (en) 2007-02-05 2008-07-15 P.R. Hoffman Machine Products Lapping machine
US8702473B1 (en) 2013-03-04 2014-04-22 Gordon Lyons Rock polishing systems and methods

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2079076A (en) * 1931-04-03 1937-05-04 Libbey Owens Ford Glass Co Truing apparatus for grinding wheels
FR913570A (en) * 1945-08-24 1946-09-13 Automatic equipment for pricking grinding wheels for pulp production
US2687603A (en) * 1951-06-26 1954-08-31 Crane Packing Co Method of lapping quartz crystals
DE1093251B (en) * 1956-01-05 1960-11-17 Karl Hack Dressing device for the end faces of the grinding wheels on spring end grinding machines
DE1110544B (en) * 1957-11-29 1961-07-06 Siemens Ag Single disc lapping machine for semiconductor wafers
US2968135A (en) * 1958-04-07 1961-01-17 Abrading Systems Company Lapping machine

Also Published As

Publication number Publication date
US3374582A (en) 1968-03-26
DE1502592A1 (en) 1969-08-07
FR1455729A (en) 1966-10-14
CH446097A (en) 1967-10-31

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