GB1052517A - - Google Patents

Info

Publication number
GB1052517A
GB1052517A GB1052517DA GB1052517A GB 1052517 A GB1052517 A GB 1052517A GB 1052517D A GB1052517D A GB 1052517DA GB 1052517 A GB1052517 A GB 1052517A
Authority
GB
United Kingdom
Prior art keywords
vessel
source
gallium
diffusion
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Publication of GB1052517A publication Critical patent/GB1052517A/en
Active legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
    • C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
    • C30B31/10—Reaction chambers; Selection of materials therefor
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Silicon Compounds (AREA)
GB1052517D 1963-03-29 Active GB1052517A (https=)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DES0084444 1963-03-29

Publications (1)

Publication Number Publication Date
GB1052517A true GB1052517A (https=)

Family

ID=7511712

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1052517D Active GB1052517A (https=) 1963-03-29

Country Status (5)

Country Link
AT (1) AT240917B (https=)
BE (1) BE645737A (https=)
CH (1) CH412822A (https=)
GB (1) GB1052517A (https=)
NL (1) NL302761A (https=)

Also Published As

Publication number Publication date
BE645737A (https=) 1964-09-28
NL302761A (https=)
CH412822A (de) 1966-05-15
AT240917B (de) 1965-06-25

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