GB1044056A - Process and apparatus for working materials with a beam of charged particles - Google Patents

Process and apparatus for working materials with a beam of charged particles

Info

Publication number
GB1044056A
GB1044056A GB11336/64A GB1133664A GB1044056A GB 1044056 A GB1044056 A GB 1044056A GB 11336/64 A GB11336/64 A GB 11336/64A GB 1133664 A GB1133664 A GB 1133664A GB 1044056 A GB1044056 A GB 1044056A
Authority
GB
United Kingdom
Prior art keywords
lens
workpiece
focusing
march
cells
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB11336/64A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Raytheon Technologies Corp
Original Assignee
United Aircraft Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by United Aircraft Corp filed Critical United Aircraft Corp
Publication of GB1044056A publication Critical patent/GB1044056A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/21—Means for adjusting the focus
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K15/00—Electron-beam welding or cutting
    • B23K15/0013—Positioning or observing workpieces, e.g. with respect to the impact; Aligning, aiming or focusing electronbeams
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B17/00—Details of cameras or camera bodies; Accessories therefor
    • G03B17/02—Bodies
    • G03B17/12—Bodies with means for supporting objectives, supplementary lenses, filters, masks, or turrets
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B7/00—Control of exposure by setting shutters, diaphragms or filters, separately or conjointly
    • G03B7/08—Control effected solely on the basis of the response, to the intensity of the light received by the camera, of a built-in light-sensitive device
    • G03B7/099—Arrangement of photoelectric elements in or on the camera
    • G03B7/0993—Arrangement of photoelectric elements in or on the camera in the camera

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Welding Or Cutting Using Electron Beams (AREA)
  • General Induction Heating (AREA)
GB11336/64A 1963-03-23 1964-03-18 Process and apparatus for working materials with a beam of charged particles Expired GB1044056A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DEZ10000A DE1225775B (de) 1963-03-23 1963-03-23 Verfahren und Einrichtung zur Bearbeitung eines Werkstueckes mittels eines Ladungstraegerstrahles

Publications (1)

Publication Number Publication Date
GB1044056A true GB1044056A (en) 1966-09-28

Family

ID=7621153

Family Applications (1)

Application Number Title Priority Date Filing Date
GB11336/64A Expired GB1044056A (en) 1963-03-23 1964-03-18 Process and apparatus for working materials with a beam of charged particles

Country Status (8)

Country Link
US (1) US3283120A (xx)
BE (1) BE645421A (xx)
CH (1) CH419370A (xx)
DE (1) DE1225775B (xx)
FR (1) FR1388356A (xx)
GB (1) GB1044056A (xx)
NL (1) NL6403042A (xx)
NO (1) NO119619B (xx)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1299498B (de) * 1964-07-24 1969-07-17 Steigerwald Strahltech Vorrichtung zur UEberwachung des Strahlauftreffbereichs in Korpuskularstrahl-Bearbeitungsgeraeten
DE1565073A1 (de) * 1965-06-11 1970-01-22 Siemens Ag Schweissverfahren,insbesondere fuer Rundnaehte an Endkappen von Kernreaktor-Brennstabhuellrohren
US3471703A (en) * 1965-08-28 1969-10-07 Ferranti Ltd Photoelectric control means for the deflection of the electron beam in welding apparatus
US3465119A (en) * 1967-06-21 1969-09-02 United Aircraft Corp Multiaxis optical viewing system of a movable electron beam in a vacuum chamber
US3535488A (en) * 1967-07-13 1970-10-20 Rohr Corp Tracer beam method of proofing electron beam weld path
AT299627B (de) * 1968-01-20 1972-06-26 Goetzewerke Verfahren zur Herstellung von Kolbenringen
US3761676A (en) * 1971-05-20 1973-09-25 Farland G Mc Portable electron beam welding apparatus
JPS529971B2 (xx) * 1973-07-02 1977-03-19
DE2555493A1 (de) * 1974-12-19 1976-06-24 Gen Electric Opto-elektronisches geraet zur erfassung der lage und verfahren
JPS5330865A (en) * 1976-09-03 1978-03-23 Hitachi Ltd Electron microscope provided with sample irradiating electron beam quantity measuring unit
US4210806A (en) * 1979-01-18 1980-07-01 International Business Machines Corporation High brightness electron probe beam and method
JPS55165628A (en) * 1979-06-12 1980-12-24 Fujitsu Ltd Apparatus for electron-beam irradiation
US4633611A (en) * 1984-12-31 1987-01-06 Bakish Materials Corporation Process and apparatus for disinfecting seeds
US5185530A (en) * 1990-11-05 1993-02-09 Jeol Ltd. Electron beam instrument
US6745717B2 (en) * 2000-06-22 2004-06-08 Arizona Board Of Regents Method and apparatus for preparing nitride semiconductor surfaces

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2304814A (en) * 1941-03-20 1942-12-15 Charles J Glasser Optical testing device and method of testing
US2472951A (en) * 1946-09-10 1949-06-14 Air Reduction Method and apparatus for controlling torch spacing
DE1100835B (de) * 1952-03-01 1961-03-02 Zeiss Carl Fa Einrichtung zum Fraesen von Profilen, zum Schneiden von Schablonen oder zum Bohren von Duesenkanaelen mittels eines Ladungstraegerstrahles
US2945132A (en) * 1957-03-18 1960-07-12 Zeiss Jena Veb Carl Measuring apparatus having optical and photoelectric means
US3037423A (en) * 1957-12-30 1962-06-05 Polaroid Corp Automatic focusing system
NL248568A (xx) * 1959-02-20
US3158733A (en) * 1962-09-12 1964-11-24 Nat Res Corp Focus control for electron beam heating

Also Published As

Publication number Publication date
NL6403042A (xx) 1964-09-24
BE645421A (xx) 1964-07-16
FR1388356A (fr) 1965-02-05
CH419370A (fr) 1966-08-31
US3283120A (en) 1966-11-01
DE1225775B (de) 1966-09-29
NO119619B (xx) 1970-06-08

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