GB0709509D0 - Method of operating a lithography tool - Google Patents

Method of operating a lithography tool

Info

Publication number
GB0709509D0
GB0709509D0 GB0709509A GB0709509A GB0709509D0 GB 0709509 D0 GB0709509 D0 GB 0709509D0 GB 0709509 A GB0709509 A GB 0709509A GB 0709509 A GB0709509 A GB 0709509A GB 0709509 D0 GB0709509 D0 GB 0709509D0
Authority
GB
United Kingdom
Prior art keywords
operating
lithography tool
lithography
tool
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
GB0709509A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards Ltd
Original Assignee
BOC Group Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BOC Group Ltd filed Critical BOC Group Ltd
Priority to GB0709509A priority Critical patent/GB0709509D0/en
Publication of GB0709509D0 publication Critical patent/GB0709509D0/en
Priority to PCT/GB2008/050333 priority patent/WO2008142435A1/en
Priority to TW97118170A priority patent/TW200915009A/en
Ceased legal-status Critical Current

Links

GB0709509A 2007-05-18 2007-05-18 Method of operating a lithography tool Ceased GB0709509D0 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
GB0709509A GB0709509D0 (en) 2007-05-18 2007-05-18 Method of operating a lithography tool
PCT/GB2008/050333 WO2008142435A1 (en) 2007-05-18 2008-05-07 Method of operating a lithography tool
TW97118170A TW200915009A (en) 2007-05-18 2008-05-16 Method of operating a lithography tool

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB0709509A GB0709509D0 (en) 2007-05-18 2007-05-18 Method of operating a lithography tool

Publications (1)

Publication Number Publication Date
GB0709509D0 true GB0709509D0 (en) 2007-06-27

Family

ID=38234632

Family Applications (1)

Application Number Title Priority Date Filing Date
GB0709509A Ceased GB0709509D0 (en) 2007-05-18 2007-05-18 Method of operating a lithography tool

Country Status (3)

Country Link
GB (1) GB0709509D0 (en)
TW (1) TW200915009A (en)
WO (1) WO2008142435A1 (en)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62113887A (en) * 1985-11-13 1987-05-25 Hitachi Ltd Vacuum pump
GB0324883D0 (en) * 2003-10-24 2003-11-26 Boc Group Plc Extreme ultra violet lithography
JP4763684B2 (en) * 2004-03-31 2011-08-31 コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ Removal of particles produced by radiation sources
US7502095B2 (en) * 2005-03-29 2009-03-10 Asml Netherlands B.V. Lithographic apparatus, device manufacturing method, and device manufactured thereby
SG126120A1 (en) * 2005-03-29 2006-10-30 Asml Netherlands Bv Lithographic device, device manufacturing method and device manufactured thereby

Also Published As

Publication number Publication date
WO2008142435A1 (en) 2008-11-27
TW200915009A (en) 2009-04-01

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Legal Events

Date Code Title Description
COOA Change in applicant's name or ownership of the application

Owner name: EDWARDS LIMITED

Free format text: FORMER APPLICANT(S): BOC GROUP, THE PLC

AT Applications terminated before publication under section 16(1)