GB0709509D0 - Method of operating a lithography tool - Google Patents
Method of operating a lithography toolInfo
- Publication number
- GB0709509D0 GB0709509D0 GB0709509A GB0709509A GB0709509D0 GB 0709509 D0 GB0709509 D0 GB 0709509D0 GB 0709509 A GB0709509 A GB 0709509A GB 0709509 A GB0709509 A GB 0709509A GB 0709509 D0 GB0709509 D0 GB 0709509D0
- Authority
- GB
- United Kingdom
- Prior art keywords
- operating
- lithography tool
- lithography
- tool
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB0709509A GB0709509D0 (en) | 2007-05-18 | 2007-05-18 | Method of operating a lithography tool |
PCT/GB2008/050333 WO2008142435A1 (en) | 2007-05-18 | 2008-05-07 | Method of operating a lithography tool |
TW97118170A TW200915009A (en) | 2007-05-18 | 2008-05-16 | Method of operating a lithography tool |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB0709509A GB0709509D0 (en) | 2007-05-18 | 2007-05-18 | Method of operating a lithography tool |
Publications (1)
Publication Number | Publication Date |
---|---|
GB0709509D0 true GB0709509D0 (en) | 2007-06-27 |
Family
ID=38234632
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB0709509A Ceased GB0709509D0 (en) | 2007-05-18 | 2007-05-18 | Method of operating a lithography tool |
Country Status (3)
Country | Link |
---|---|
GB (1) | GB0709509D0 (en) |
TW (1) | TW200915009A (en) |
WO (1) | WO2008142435A1 (en) |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62113887A (en) * | 1985-11-13 | 1987-05-25 | Hitachi Ltd | Vacuum pump |
GB0324883D0 (en) * | 2003-10-24 | 2003-11-26 | Boc Group Plc | Extreme ultra violet lithography |
JP4763684B2 (en) * | 2004-03-31 | 2011-08-31 | コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ | Removal of particles produced by radiation sources |
US7502095B2 (en) * | 2005-03-29 | 2009-03-10 | Asml Netherlands B.V. | Lithographic apparatus, device manufacturing method, and device manufactured thereby |
SG126120A1 (en) * | 2005-03-29 | 2006-10-30 | Asml Netherlands Bv | Lithographic device, device manufacturing method and device manufactured thereby |
-
2007
- 2007-05-18 GB GB0709509A patent/GB0709509D0/en not_active Ceased
-
2008
- 2008-05-07 WO PCT/GB2008/050333 patent/WO2008142435A1/en active Application Filing
- 2008-05-16 TW TW97118170A patent/TW200915009A/en unknown
Also Published As
Publication number | Publication date |
---|---|
WO2008142435A1 (en) | 2008-11-27 |
TW200915009A (en) | 2009-04-01 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
COOA | Change in applicant's name or ownership of the application |
Owner name: EDWARDS LIMITED Free format text: FORMER APPLICANT(S): BOC GROUP, THE PLC |
|
AT | Applications terminated before publication under section 16(1) |