GB0619163D0 - Effusion and cracking cell - Google Patents

Effusion and cracking cell

Info

Publication number
GB0619163D0
GB0619163D0 GB0619163A GB0619163A GB0619163D0 GB 0619163 D0 GB0619163 D0 GB 0619163D0 GB 0619163 A GB0619163 A GB 0619163A GB 0619163 A GB0619163 A GB 0619163A GB 0619163 D0 GB0619163 D0 GB 0619163D0
Authority
GB
United Kingdom
Prior art keywords
effusion
cracking cell
cracking
cell
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
GB0619163A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oxford Instruments Plasma Technology Ltd
Original Assignee
Oxford Instruments Plasma Technology Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oxford Instruments Plasma Technology Ltd filed Critical Oxford Instruments Plasma Technology Ltd
Priority to GB0619163A priority Critical patent/GB0619163D0/en
Publication of GB0619163D0 publication Critical patent/GB0619163D0/en
Priority to PCT/GB2007/003539 priority patent/WO2008037958A1/en
Ceased legal-status Critical Current

Links

GB0619163A 2006-09-28 2006-09-28 Effusion and cracking cell Ceased GB0619163D0 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
GB0619163A GB0619163D0 (en) 2006-09-28 2006-09-28 Effusion and cracking cell
PCT/GB2007/003539 WO2008037958A1 (en) 2006-09-28 2007-09-19 Effusion and cracking cell

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB0619163A GB0619163D0 (en) 2006-09-28 2006-09-28 Effusion and cracking cell

Publications (1)

Publication Number Publication Date
GB0619163D0 true GB0619163D0 (en) 2006-11-08

Family

ID=37434856

Family Applications (1)

Application Number Title Priority Date Filing Date
GB0619163A Ceased GB0619163D0 (en) 2006-09-28 2006-09-28 Effusion and cracking cell

Country Status (2)

Country Link
GB (1) GB0619163D0 (en)
WO (1) WO2008037958A1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2186920A1 (en) * 2008-10-22 2010-05-19 Applied Materials, Inc. Arrangement and method for regulating a gas stream or the like
TWI737718B (en) * 2016-04-25 2021-09-01 美商創新先進材料股份有限公司 Deposition systems including effusion sources, and related methods
EP3374540A1 (en) * 2017-01-31 2018-09-19 Applied Materials, Inc. Material deposition arrangement, vacuum deposition system and method therefor

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5080870A (en) * 1988-09-08 1992-01-14 Board Of Regents, The University Of Texas System Sublimating and cracking apparatus
GB9414415D0 (en) * 1994-07-16 1994-09-07 Oxford Appl Res Ltd Cracking feedstocks
JPH08167575A (en) * 1994-10-14 1996-06-25 Mitsubishi Electric Corp Mbe crystal growth device and method

Also Published As

Publication number Publication date
WO2008037958A1 (en) 2008-04-03

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Legal Events

Date Code Title Description
AT Applications terminated before publication under section 16(1)