GB0619163D0 - Effusion and cracking cell - Google Patents
Effusion and cracking cellInfo
- Publication number
- GB0619163D0 GB0619163D0 GB0619163A GB0619163A GB0619163D0 GB 0619163 D0 GB0619163 D0 GB 0619163D0 GB 0619163 A GB0619163 A GB 0619163A GB 0619163 A GB0619163 A GB 0619163A GB 0619163 D0 GB0619163 D0 GB 0619163D0
- Authority
- GB
- United Kingdom
- Prior art keywords
- effusion
- cracking cell
- cracking
- cell
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB0619163A GB0619163D0 (en) | 2006-09-28 | 2006-09-28 | Effusion and cracking cell |
PCT/GB2007/003539 WO2008037958A1 (en) | 2006-09-28 | 2007-09-19 | Effusion and cracking cell |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB0619163A GB0619163D0 (en) | 2006-09-28 | 2006-09-28 | Effusion and cracking cell |
Publications (1)
Publication Number | Publication Date |
---|---|
GB0619163D0 true GB0619163D0 (en) | 2006-11-08 |
Family
ID=37434856
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB0619163A Ceased GB0619163D0 (en) | 2006-09-28 | 2006-09-28 | Effusion and cracking cell |
Country Status (2)
Country | Link |
---|---|
GB (1) | GB0619163D0 (en) |
WO (1) | WO2008037958A1 (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2186920A1 (en) * | 2008-10-22 | 2010-05-19 | Applied Materials, Inc. | Arrangement and method for regulating a gas stream or the like |
TWI737718B (en) * | 2016-04-25 | 2021-09-01 | 美商創新先進材料股份有限公司 | Deposition systems including effusion sources, and related methods |
EP3374540A1 (en) * | 2017-01-31 | 2018-09-19 | Applied Materials, Inc. | Material deposition arrangement, vacuum deposition system and method therefor |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5080870A (en) * | 1988-09-08 | 1992-01-14 | Board Of Regents, The University Of Texas System | Sublimating and cracking apparatus |
GB9414415D0 (en) * | 1994-07-16 | 1994-09-07 | Oxford Appl Res Ltd | Cracking feedstocks |
JPH08167575A (en) * | 1994-10-14 | 1996-06-25 | Mitsubishi Electric Corp | Mbe crystal growth device and method |
-
2006
- 2006-09-28 GB GB0619163A patent/GB0619163D0/en not_active Ceased
-
2007
- 2007-09-19 WO PCT/GB2007/003539 patent/WO2008037958A1/en active Application Filing
Also Published As
Publication number | Publication date |
---|---|
WO2008037958A1 (en) | 2008-04-03 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
AT | Applications terminated before publication under section 16(1) |